Dielectric tunable properties of (Ba_1−xSr_x)TiO₃ thin films on LaAlO₃ substrate

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• 作者：Wu ; Wenbiao ; Peng ; Dongwen ; Ding ; Yongping ; Meng ; Zhongyan
• 关键词：BST ; Sol&ndash ; gel ; Thin film ; Coplanar capacitor ; Tunability
• 刊名：Materials Science in Semiconductor Processing
• 出版年：2001
• 期刊代码：65_13698001
• 类别：ms
• 出版时间：December, 2001
• 卷：4
• 期：6
• 页码：673-678
• 文件大小：338 K

摘要

(Ba_1−xSr_x)TiO₃ (1−x=0.8, 0.7, 0.6 and 0.5) thin films were prepared on (001) LaAlO₃ substrates by sol–gel method. The films were found to be crystallized in preferential (001) orientation after post-deposition annealing at 750°C for 1.5h and 1100°C for 2h in air, respectively. We investigated the dependence of tunability and dissipation factor on annealing temperature and different Ba/Sr ratios. It was found that the tunability increased dramatically and dissipation factor decreased obviously with increasing annealing temperature, and Ba_0.6Sr_0.4TiO₃ thin films annealed at 1100°C for 2h have a tunability of 46.9%at 80kV/cm bias filed and a dissipation factor of 0.008 at 1MHz.