摘要
The effects of the introduction of oxygen were studied on the Fe62Co32Cr6-O alloy films synthesized by magnetron co-sputtering. The as-deposited films exhibited a high saturation magnetization and a suitable in-plane uniaxial anisotropy field at an optimized condition of an oxygen gas flow ratio of 1.3%. Also, a high real permeability of 鈭?00 at frequency up to 3.3 GHz was obtained from the microwave permeability measurement at the optimized condition above. The combination of high saturation magnetization, adjustable in-plane uniaxial magnetic anisotropy field, and high resistivity makes the Fe62Co32Cr6-O films become a promising candidate for the high-frequency applications.