Structure, mechanical property, and tribological behavior of c-NbN/CN_x multilayers grown by magnetron sputtering

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• 作者：Kan Zhang ; M. Wen ; Q.N. Meng ; Y. Zeng ; C.Q. Hu ; C. Liu ; W.T. Zheng ; ^{WTZheng@jlu.edu.cn}
• 关键词：NbN/CNx ; Multilayer ; Magnetron sputtering ; Hardness ; Friction and wear
• 刊名：Surface and Coatings Technology
• 出版年：2012
• 期刊代码：106_02578972
• 类别：ms
• 出版时间：25 May, 2012
• 卷：206
• 期：19-20
• 页码：4040-4045
• 文件大小：1095 K

摘要

The cubic-NbN/CN_x multilayers with different CN_x layer thicknesses (l_CNx) are deposited on Si(100) substrate by reactive magnetron sputtering in a mixture of Ar and N₂ gas. The effects of l_CNx on the structure, mechanical property and tribological behavior for NbN/CN_x multilayers have been explored. When l_CNx = 0.2 nm, the NbN/CN_x multilayer has a strong NbN(200) texture and a rough interface caused by intermixing between CN_x and NbN layers; while when l_CNx 鈮?#xA0;0.4 nm, the multilayer has a mixture texture of NbN(200) and (111) with a good modulation periodic structure. The stress for all multilayers is compressive ranging in between the stress for both NbN and CN_x single layers, which tends to decrease after an initial ascent with increasing l_CNx. This means that the CN_x layer is beneficial to relaxing the compressive stress induced by NbN layer. In addition, as l_CNx increases, both hardness (H) and elastic modulus (E) first increase, and then decrease after reaching a maximum value. However, the ratio of hardness to Young's modulus, H/E, for the multilayers monotonically decreases with the increase of l_CNx. The obvious enhancement in hardness for multilayers is observed, whose maximum value approaches 39.2 GPa when l_CNx = 0.4 nm, 78%larger than that obtained by the rule of mixture value. The friction coefficient of NbN/CN_x multilayers have a decrease trend with increasing the H/E ratio, but the poor wear resistance occurs as the H/E ratio is high, which can be attributed to the presence of a high stress.