Sputtering of Au by cluster impact

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• 作者：Steffen Zimmermann ; Herbert M. Urbassek
• 关键词：Sputtering ; Molecular-dynamics simulation ; Cluster impact ; Au
• 刊名：Nuclear Instruments and Methods in Physics Research Section B ; Beam Interactions with Materials and Atoms
• 出版年：2007
• 期刊代码：42_0168583x
• 类别：ph
• 出版时间：February 2007
• 卷：255
• 期：1
• 页码：208-213
• 文件大小：319 K

摘要

Using molecular-dynamics simulation, we study the sputtering of a Au (1 1 1) surface by Au_n clusters (n = 1–201) with impact energies between 0.16 and 64 keV/atom. We vary systematically both the total energy E and the cluster size n, such that the dependence of the sputter yield on these quantities can be discussed. As our basic result, we find the sputter yield Y to scale with the total energy E of the projectile. The sputter yield exhibits a polynomial increase, ∝E^1.6, up to a critical energy E_c 40 keV, which coincides roughly with the threshold energy for subcascade formation. Above E_c, the yield increases approximately linearly with E. These findings are discussed in the light of the considerable data base of Au sputtering which has been built up in recent years due both to experimental and simulational work.