Tribological properties of DLC film prepared by C+ ion beam-assisted deposition (IBAD)
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- 作者：Bai Xiuqin (13) xqbai@mail.whut.edu.
Peter B枚hm (2)
Li Jian (3)
Yan Xinping (1) - 关键词：Key words DLC film ; C+ ion beam ; assisted deposkion (IBAD) ; tribological properties
- 刊名：Journal of Wuhan University of Technology--Materials Science Edition
- 出版时间：March 2006
- 出版年：2006
- 期刊代码：pc358_1000-2413
- 类别：ch
- 卷：21
- 期：1
- 页码：49-52
- 数据来源：sp
摘要
C+ ion beam-assisted deposition was utilized to prepare deposit diamond-like carbon (DLC) film. With the help of a series of experiments such as Raman spectroscopy, FT-IR spectroscopy, AFM and nanoindentation, the DLC film has been recognized as hydrogenated DLC film and its tribological properties have been evaluated. The ball-on-disc testing results show that the hardness and the tribological properties of the DLC film produced by C+ ion beam-assisted deposition are improved significantly. DLC film produced by C+ ion beam-assisted deposition is positive to have a prosperous tribological application in the near future.