Tetrahedral Amorphous Carbon Films Prepared by Filtered Catholic Vacuum Arc Deposition
- 作者：Zhang XuWu XiangyingZhang HuixingZhang Tonghe
- 会议时间：2005-09-22
- 关键词：非晶碳 ; 碳薄膜 ; 真空电弧沉积 ; 化学惰性 ; 摩擦系数
- 作者单位：Zhang Xu(北京师范大学低能核物理研究所,100875)Wu Xiangying,Zhang Huixing,Zhang Tonghe(Beijing Radiation Center,Beijing, 100875,China)
- 母体文献：北京市纪念中国博士后制度实施二十周年——首都现代制造技术发展论坛论文集
- 会议名称：北京市纪念中国博士后制度实施二十周年——首都现代制造技术发展论坛
- 会议地点：北京
- 主办单位：北京工业大学
- 语种：chi
摘要
The tetrahedral amorphous carbon films are attracting materials because of their properties similar to diamond,such as high hardness, resistivity,optical transparency, chemical inertness and low coefficient of friction. These properties make it i-deal for wear resistance application on cutting tools, automotive component, aerospace components and orthopedic prosthesis etc. In this paper the structures, mechanical properties adhesion and wear resistance of the tetrahedral amorphous carbon films deposited on silicon, Crl8Ni9 stainless steel and high speed steel and M2 steel substrate by pulsed and direct current filtered catholic vacuum arc deposition system have been investigated. The high quality tetrahedral amorphous carbon film has been obtained. The hardness and elastic modulus of the tetrahedral amorphous carbon films higher than 78Gpa and 435Gpa respectively determined by nano indentation tests. The friction performance of the tetrahedral amorphous carbon films was also studied by SRV tests, the results show ; the tetrahedral amorphous carbon films have much lower wear coefficient and wear rate than that of silicon,stainless steel and high speed steel substrate.