摘要
Mechanical grinding was applied to fiat the free-standing diamond film deposited by 100 kW high power DC Arc Plasma Jet CVD system.The influences of grinding speed and pressure on the surface morphology, diamond removal rate and diamond removal mechanism were studied by scanning electron microscopy, digimatic micrometer and X-ray photoelectron spectroscopy, respectively.The results showed that speed and pressure had significant effects on the surface morphology and diamond removal rate.While the grinding speed and pressure were 40 r/min and 0.50 MPa respectively, the diamond removal rate could reach 80.5 μm/h.No iron atoms were detected on the surface of the grinded diamond film.The speculated diamond removal mechanism was mainly the combination of micro-cleavage and stress-induced local graphitization.