The investigation of Al-based sputtering target by novel powder metallurgy method and its thin film properties
- 作者：Kun-Ming ChenDeng-An TsaiHao-Chia LiaoIn-Gann ChenWeng-Sing Hwang
- 会议时间：2013-11-01
- 关键词：Hot pressing (HP) ; Hot isostatic pressing (HIP) ; Novel powder metallurgy forming (NPMF) ; Al-Cr alloy target ; Al-Cr-N film
- 作者单位：Kun-Ming Chen(SolarApplied Materials Technology Corp,No.1,Gongye 3rd Rd.,Annan Dist.,Tainan City 70995,Taiwan;Department of Materials Science and Engineering,National Cheng Kung University,Tainan 70101,Taiwan)Deng-An Tsai,Hao-Chia Liao(SolarApplied Materials Technology Corp,No.1,Gongye 3rd Rd.,Annan Dist.,Tainan City 70995,Taiwan)In-Gann Chen,Weng-Sing Hwang(Department of Materials Science and Engineering,National Cheng Kung University,Tainan 70101,Taiwan)
- 母体文献：2013年全国粉末冶金学术会议及海峡两岸粉末冶金技术研讨会论文集
- 会议名称：2013年全国粉末冶金学术会议及海峡两岸粉末冶金技术研讨会
- 会议地点：厦门
- 主办单位：中国机械工程学会
- 语种：chi
摘要