光学表面中高频误差的仿真分析
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摘要
在光学设计和装调过程中,常常需要随时根据面形质量来预估光学系统的性能,传统的方法都是借助泽尼克多项式拟合光学表面面形来进行仿真评价。但非球面光学元件在加工过程中常常产生中高频误差,这类误差会引入小角度的散射,进而影响光学系统像质评价。提供了一种"点对应点"的仿真方法,通过准确评价面形质量获得高精度的像质预估结果,解决了传统的泽尼克多项式不能描述中高频成分的关键问题。该方法在实际光学系统中进行了验证,仿真结果和实测数据吻合度优于90%。
During the process of optical design and assembly,it is necessary to estimate the performance of optical system based on the surface quality of the mirrors. The traditional way is to use the Zernike polynomial, which is restricted to depict the consecutive and smooth surface. Otherwise, get the ideal surface during aspherical surface polishing is very difficult, the mid-and-high frequency errors which is very harmful to the optical system′ s image quality will be produced at the same time. In this paper, a new "point-to-point" method was introduced, any surface with mid-and-high frequency errors could be exactly simulated, and the optical system′s performance can be estimated accurately. An example of the optical system was cited, it was revealed that the camera′ s simulated performace is very close to the measurement, the coincident to real system is over 90%.
During the process of optical design and assembly,it is necessary to estimate the performance of optical system based on the surface quality of the mirrors. The traditional way is to use the Zernike polynomial, which is restricted to depict the consecutive and smooth surface. Otherwise, get the ideal surface during aspherical surface polishing is very difficult, the mid-and-high frequency errors which is very harmful to the optical system′ s image quality will be produced at the same time. In this paper, a new "point-to-point" method was introduced, any surface with mid-and-high frequency errors could be exactly simulated, and the optical system′s performance can be estimated accurately. An example of the optical system was cited, it was revealed that the camera′ s simulated performace is very close to the measurement, the coincident to real system is over 90%.
引文
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[7]Wu Dongliang,Dai Yifan,Wang Guilin.Influence of midand-high frequency errors in optical processing on fractional encircled energy[J].Optics and Precision Engineering,2009,17(11):2705-2711.(in Chinese)吴冬良,戴一帆,王贵林.光学加工中高频误差对环围能量比的影响[J].光学精密工程,2009,17(11):2705-2711.
[8]Wu Dongliang,Dai Yifan,Wang Guilin.Influence of midand-high frequency errors from optical processing on ratio of scattering loss[J].Optics and Precision Engineering,2009,17(10):2365-2370.(in Chinese)吴冬良,戴一帆,王贵林.光学加工中高频误差对散射损失比的影响[J].光学精密工程,2009,17(10):2365-2370.
[2]Mo Weidong,Fan Qi,Qu Shaobo,et al.Research on algorithm and reliability to fit interference wave surface with Zernike polynomials[J].Chinese Journal of Lasers,2010,37(S1):267-272.(in Chinese)莫卫东,范琦,屈少波,等.泽尼克多项式拟合干涉波面算法的等价性与可靠性研究[J].中国激光,2010,37(S1):267-272.
[3]Fan Xinlong,Guan Chunlin,Rao Changhui.Wave-front fitting capability analysis of 1.8 m telescope′s adaptive secondary mirror[J].Acta Optica Sinica,2011,31(8):0822002.(in Chinese)樊新龙,官春林,饶长辉.1.8 m望远镜变形次镜波前拟合能力分析[J].光学学报,2011,31(8):0822002.
[4]Wang Qingfeng,Cheng Dewen,Wang Yongtian.Description of free-form optical curved surface using two-variable orthogonal polynomials[J].Acta Optica Sinica,2012,32(9):0922002.(in Chinese)王庆丰,程德文,王涌天.双变量正交多项式描述光学自由曲面[J].光学学报,2012,32(9):0922002.
[5]Chen Wei,Yao Hanming,Wu Fan,et al.Application of image restoration in wave front power spectral density analysis[J].Infrared and Laser Engineering,2008,37(1):161-163.(in Chinese)陈伟,姚汉民,伍凡,等.图像复原在波前功率谱密度计算中的应用[J].红外与激光工程,2008,37(1):161-163.
[6]Cheng Haobo,Feng Zhijing,Wang Yingwei.Evaluation on the figure errors of optical aspheric surfaces after magnetorheological polishing[J].Journal of Tsinghua University(Science and Technology),2004,44(11):1497-1500.(in Chinese)程灏波,冯之敬,王英伟.磁流变抛光光学非球面元件表面误差的评价[J].清华大学学报(自然科学版),2004,44(11):1497-1500.
[7]Wu Dongliang,Dai Yifan,Wang Guilin.Influence of midand-high frequency errors in optical processing on fractional encircled energy[J].Optics and Precision Engineering,2009,17(11):2705-2711.(in Chinese)吴冬良,戴一帆,王贵林.光学加工中高频误差对环围能量比的影响[J].光学精密工程,2009,17(11):2705-2711.
[8]Wu Dongliang,Dai Yifan,Wang Guilin.Influence of midand-high frequency errors from optical processing on ratio of scattering loss[J].Optics and Precision Engineering,2009,17(10):2365-2370.(in Chinese)吴冬良,戴一帆,王贵林.光学加工中高频误差对散射损失比的影响[J].光学精密工程,2009,17(10):2365-2370.