光栅刻划机阿贝误差对光栅衍射波前质量的影响及其校正方法
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摘要
衍射波前质量是衡量刻划光栅性能的重要指标之一,光栅刻划机若存在阿贝误差,将直接影响刻线位置精度,从而影响光栅的波前质量。建立了刻划机阿贝误差与光栅衍射波前质量的物理模型,并分析了该误差对波前质量的影响。针对该误差设计了一种基于双频激光干涉测量的阿贝误差测量光路,测量了刻划机的阿贝误差,根据物理模型对其导致的光栅衍射波前误差作了仿真分析,并提出了基于双层工作台结构的误差控制校正方法。对两块尺寸为80mm×100mm、刻线密度为79groove/mm的中阶梯光栅进行了阿贝误差校正前后的对比刻划实验。结果表明,通过对阿贝误差的测量和校正,光栅闪耀级次为-36级的衍射波前误差由0.529λ降低至0.159λ(λ=632.8nm),有效地降低了阿贝误差对光栅衍射波前质量的影响。
Diffracted wavefront quality is one of the important performance indexes of gratings.If there is Abbe error in the grating ruling engine,it will directly affect the positioning accuracy of grooves,thus affecting wavefront quality of gratings.The physical models of the Abbe error and the quality of the grating diffraction wave are established,to analyze the influence of the error on the wavefront quality.Aiming at the Abbe error,a kind of measurement optical path is designed based on dual-frequency laser interferometry,and the influence of Abbe error on diffracted wavefront of the grating is measured and simulated.Furthermore,the error control method based on double-layer grating table structure is proposed.Before and after revising Abbe error,the ruling experiments for two echelle gratings with the size of 80 mm×100 mm and groove density of 79groove/mm are carried out.The results show that the diffracted wavefront error of the gratings in-36 blaze order is reduced from 0.529λ to 0.159λ(λ=632.8nm)by the measurement and correction of the Abbe error,which effectively reduces the influence of Abbe error on the quality of grating′s diffracted wavefront.
Diffracted wavefront quality is one of the important performance indexes of gratings.If there is Abbe error in the grating ruling engine,it will directly affect the positioning accuracy of grooves,thus affecting wavefront quality of gratings.The physical models of the Abbe error and the quality of the grating diffraction wave are established,to analyze the influence of the error on the wavefront quality.Aiming at the Abbe error,a kind of measurement optical path is designed based on dual-frequency laser interferometry,and the influence of Abbe error on diffracted wavefront of the grating is measured and simulated.Furthermore,the error control method based on double-layer grating table structure is proposed.Before and after revising Abbe error,the ruling experiments for two echelle gratings with the size of 80 mm×100 mm and groove density of 79groove/mm are carried out.The results show that the diffracted wavefront error of the gratings in-36 blaze order is reduced from 0.529λ to 0.159λ(λ=632.8nm)by the measurement and correction of the Abbe error,which effectively reduces the influence of Abbe error on the quality of grating′s diffracted wavefront.
引文
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[2]Mi Xiaotao,Yu Hongzhu,Yu Haili,et al.Analyze and improve of rod structure for large diffraction grating ruling engine[J].Optics and Precision Engineering,2015,23(3):745-752.糜小涛,于宏柱,于海利,等.大型衍射光栅刻划机拉杆结构的分析与改进[J].光学精密工程,2015,23(3):745-752.
[3]Song Nan,Feng Shulong,Yu Haili,et al.Design and analysis of diamond carrier aerostatic guideway in large diffraction grating ruling engine[J].Chinese J Lasers,2015,42(4):0408007.宋楠,冯树龙,于海利,等.大光栅刻划机气浮刀架导轨设计与分析[J].中国激光,2015,42(4):0408007.
[4]Yang Zengpeng,Tang Yuguo,Bayanheshig,et al.Optimization design method for optical system of prism-grating ultraspectral imaging spectrometers[J].Acta Optica Sinica,2014,34(9):0911003.杨增鹏,唐玉国,巴音贺希格,等.棱镜光栅组合色散型超光谱成像系统的优化设计[J].光学学报,2014,34(9):0911003.
[5]Liu Yujuan,Cui Jicheng,Bayanheshig,et al.Design and application of imaging spectrometer with convex grating[J].Optics and Precision Engineering,2012,20(1):52-57.刘玉娟,崔继承,巴音贺希格,等.凸面光栅成像光谱仪的研制与应用[J].光学精密工程,2012,20(1):52-57.
[6]Lu Yuxian,Qi Xiangdong,Mi Xiaotao,et al.Detection and calculation of mosaic grating error based on wavefront method[J].Acta Optica Sinica,2016,36(5):0505001.卢禹先,齐向东,糜小涛,等.基于波前法的光栅拼接误差检测及计算方法[J].光学学报,2016,36(5):0505001.
[7]Lu Yuxian,Qi Xiangdong,Yu Haili,et al.Precision analysis of grating replicated mosaic error based on the principle of Fraunhofer[J].Chinese J Lasers,2016,43(5):0508005.卢禹先,齐向东,于海利,等.基于夫琅禾费原理的光栅复制拼接误差精度分析[J].中国激光,2016,43(5):0508005.
[8]Yu Lei,Lin Guanyu,Yu Xiangyang.Optical system of far ultraviolet imaging spectrometer for space-based upper atmosphere remote sensing[J].Acta Optica Sinica,2013,33(1):0122001.于磊,林冠宇,于向阳.空间高层大气遥感远紫外成像光谱仪的光学设计[J].光学学报,2013,33(1):0122001.
[9]Yang Chao,Yu Haili,Feng Shulong,et al.Influence of running accuracy of ruling carriage system on grating spectrum performance[J].Optics and Precision Engineering,2014,22(10):2674-2682.杨超,于海利,冯树龙,等.光栅刻划刀架系统的运行精度对光栅光谱性能的影响[J].光学精密工程,2014,22(10):2674-2682.
[10]Li Xiaotian,Bayanheshig,Qi Xiangdong,et al.Two-dimensional fast Fourier transform method of analyzing the influence of plane grating′s line error and surface error on grating′s spectral performance[J].Acta Optica Sinica,2012,32(11):1105001.李晓天,巴音贺希格,齐向东,等.刻线误差与面型误差对平面光栅光谱性能影响的二维快速傅里叶变换分析方法[J].光学学报,2012,32(11):1105001.
[11]Yu Haili,Qi Xiangdong,Bayanheshig,et al.Solving resolution of diffraction gratings using coefficients of Zernike polynomials[J].Spectroscopy and Spectral Analysis,2012,32(1):264-267.于海利,齐向东,巴音贺希格,等.利用泽尼克系数求衍射光栅的分辨本领[J].光谱学与光谱分析,2012,32(1):264-267.
[12]Yang Chao,Yu Haili,Zhang Shanwen,et al.Active control technology to correct the quality of the grating wavefrontfront[J].Chinese J Lasers,2015,42(1):0108002.杨超,于海利,张善文,等.光栅刻划机衍射波前质量的主动控制校正方法[J].中国激光,2015,42(1):0108002.
[13]Harrison G R,Sturgis N,Davis S P,et al.Interferometrically controlled ruling of ten-inch diffraction gratings[J].Journal of the Optical Society America,1959,49(3):205-211.
[14]Mi Xiaotao,Yu Hongzhu,Gao Jianxiang,et al.Design of controller of the micro-positioning system for large diffracton grating ruling engine[J].Chinese Journal of Scientific Instrument,2015,36(2):473-480.糜小涛,于宏柱,高键翔,等.大型衍射光栅刻划机微定位系统控制器设计[J].仪器仪表学报,2015,36(2):473-480.
[15]Harrison G R,Thompson S W.Large diffraction gratings ruled on a commercial measuring machine controlled interferometrically[J].Journal of the Optical Socoity America,1970,60(5):591-595.
[16]Harrison G R,Thompson S W,Kazukonis H,et al.750-mm ruling engine producing large gratings and echelles[J].Journal of the Optical Society America,1972,62(6):751-756.
[17]Li Xiaotian,Yu Haili,Qi Xiangdong,et al.300mm-travel stage of grating ruling engine and its self-adaptive control method[J].Chinese J Lasers,2014,41(6):0608001.李晓天,于海利,齐向东,等.光栅刻划机300mm行程工作台研制及其自适应控制方法[J].中国激光,2014,41(6):0608001.
[18]Kita T,Harada T.Ruling engine using apiezoelectric device for large and high-groove density gratings[J].Applied Optics,1992,31(10):1399-1406.