双辉等离子渗钽对TiAlN/Ta复合涂层结构和性能的影响
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摘要
采用Ta层作为过渡层,通过双辉等离子渗金属(DGPSA)与射频磁控溅射(RFMS)辅助直流脉冲磁控溅射技术(DCPMS)制备TiAlN/Ta复合涂层。借助掠入射XRD、SEM、AFM、纳米压痕、划痕以及摩擦磨损测试了不同工艺制备的Ta过渡层对复合涂层的相结构、表面(截面)形貌、硬度、结合力、韧性和摩擦磨损性能的影响。结果表明,TiAlN复合涂层在高偏压作用下结构致密,RFMS技术制备的Ta过渡层为柱状晶结构,复合涂层表面粗糙度较小,硬度较大而磨损稳定性和耐磨性较差;而DGPSA技术制备的Ta过渡层为纳米晶结构,复合涂层表面粗糙度较大,硬度降低但磨损稳定性与耐磨性都增强。对比发现,通过DGPSA技术制备Ta过渡层使得TiAlN/Ta复合涂层的结合力与韧性大幅度提高。
Using metal Ta layer as a transition layer,the TiAlN/Ta composite coatings were prepared by double glow plasma surface alloying(DGPSA) and RF magnetron sputtering(RFMS) with DC pulsed magnetron sputtering technique(DCPMS).The phase structure,surface(cross-section) topography,hardness,adhesion strength,toughness and friction and wear properties of the composite coatings were investigated by grazing incidence X-ray diffraction(GIXRD),scanning electron microscopy(SEM),atomic force microscopy(AFM),nanoindentation,scratches,and friction and wear tests.It is found that the structure of the composite coating is condensed under high bias pressure.The Ta transition layer prepared by RFMS technique has columnar crystal structure.The composite coating has low surface roughness,high hardness and poor wear stability and wear resistance.The Ta transition layer prepared by DGPSA technique has a nanocrystalline structure with increasing surface roughness,decreasing hardness,enhanced wear stability and wear resistance.In contrast,the adhesion and toughness of TiAlN/Ta composite coating are significantly improved by using DGPSA technique to prepare Ta transition layer.
Using metal Ta layer as a transition layer,the TiAlN/Ta composite coatings were prepared by double glow plasma surface alloying(DGPSA) and RF magnetron sputtering(RFMS) with DC pulsed magnetron sputtering technique(DCPMS).The phase structure,surface(cross-section) topography,hardness,adhesion strength,toughness and friction and wear properties of the composite coatings were investigated by grazing incidence X-ray diffraction(GIXRD),scanning electron microscopy(SEM),atomic force microscopy(AFM),nanoindentation,scratches,and friction and wear tests.It is found that the structure of the composite coating is condensed under high bias pressure.The Ta transition layer prepared by RFMS technique has columnar crystal structure.The composite coating has low surface roughness,high hardness and poor wear stability and wear resistance.The Ta transition layer prepared by DGPSA technique has a nanocrystalline structure with increasing surface roughness,decreasing hardness,enhanced wear stability and wear resistance.In contrast,the adhesion and toughness of TiAlN/Ta composite coating are significantly improved by using DGPSA technique to prepare Ta transition layer.
引文
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[2]PAN Y,ZHOU B.ZrB2:Adjusting the phase structure to improve the brittle fracture and electronic properties[J].Ceramics International,2017,43:8763-8768.
[3]MATTHEWS A,FRANKLIN S,HOLMBERG K.Tribological coatings:contact mechanisms and selection[J].Journal of Physics D:Applied Physics,2007,40(18):5463.
[4]SANGIOVANNI D G,CHIRITA V,HULTMAN L.Toughness enhancement in TiAlN-based quarternary alloys[J].Thin Solid Films,2012,520(11):4080-4088.
[5]PARK J K,ZIEBERT C,STüBER M,et al.Improvement of hardness and toughness of TiAlN coating by nanoscale multilayered structurization with Si3N4[J].Plasma Processes&Polymers,2007,4(S1):S902-S905.
[6]SUI X,Li G,JIANG C,et al.Improved toughness of layered architecture TiAlN/CrN coatings for titanium high speed cutting[J].Ceramics International,2017,44(5):5629-5635.
[7]BARTOSIK M,RUMEAU C,HAHN R,et al.Fracture toughness and structural evolution in the TiAlN system upon annealing[J].Scientific Reports,2017,7(1):16476.
[8]ZHANG B,ZHANG C,SHE J,et al.Recent progresses in oxidation resistance of TiAlN coatings by magnetron sputtering[J].Materials Review,2013,27(21):14-18.
[9]ZHANG Q,ZHONG X,LI C,et al.Synthesis and mechanical properties of Ti/TiN/TiAlN composite coatings by arc ion plating and magnetron sputtering[J].Chinese Journal of Vacuum Science&Technology,2015,35(2):195-200.
[10]PFEILER M,SCHEU C,HUTTER H,et al.On the effect of Ta on improved oxidation resistance of Ti-Al-Ta-Ncoatings[J].Journal of Vacuum Science&Technology A:Vacuum,Surfaces&Films,2009,27(3):554-560.
[11]高原,徐晋勇,高清,等.双层辉光离子渗金属技术特点分析[J].热加工工艺,2006,35(3):26-30.GAO Y,XU JY,GAO Q,et al.Analysis on characteristics of double glow discharge plasma surface alloying process[J].Hot Working Technology,2006,35(3):26-30(in Chinese).
[12]WARCHOLINSKI B,GILEWICZ A.Effect of substrate bias voltage on the properties of CrCN and CrN coatings deposited by cathodic arc evaporation[J].Vacuum,2013,90(1):145-150.
[13]TANG Y,LI Y S,YANG Q,et al.Study of carbide-forming element interlayers for diamond nucleation and growth on silicon and WC-Co substrates[J].Thin Solid Films,2010,519(5):1606-1610.
[14]高原.离子渗金属阴极表面空位浓度分布及对扩散的影响[J].真空,1993(6):53-56.GAO Y.The vacancy density distributed surface and affecting to spreading speed under double glow discharge surface alloying process[J].Vacuum,1993(6):53-56(in Chinese).
[15]RONG W,HEI H,ZHONG Q,et al.Nanostructured TaxCinterlayer synthesized via double glow plasma surface alloying process for diamond deposition on cemented carbide[J].Applied Surface Science,2015,359:41-47.
[16]PEMMASANI S P,VALLETI K,GUNDAKARAM R C,et al.Effect of microstructure and phase constitution on mechanical properties of Ti11-x Alx N coatings[J].Applied Surface Science,2014,313(10):936-946.
[17]GROCHLA D,SIEGEL A,HAMANN S,et al.Time-and space-resolved high-throughput characterization of stresses during sputtering and thermal processing of Al-Cr-N thin films[J].Journal of Physics D:Applied Physics,2013,46137(46):84011.
[18]黎业生,汪伟.纳米压痕法测量Cu膜的硬度和弹性模量[J].金属学报,2010,46(9):1098-1102.LI YS,WANG W.Measurements of hardness and elastic modulus of Cu thin film by means of nanoindentation[J].Acta Metallurgica Sinica,2010,46(9):1098-1102(in Chinese).
[19]XI C,VLASSAK J J.Numerical study on the measurement of thin film mechanical properties by means of nanoindentation[J].Journal of Materials Research,2001,16(10):2974-2982.
[20]GONCZY S T,RANDALL N.An ASTM standard for quantitative scratch adhesion testing of thin,hard ceramic coatings[J].International Journal of Applied Ceramic Technology,2005,2(5):422-428.
[21]KILPI L,YLIVAARA O M E,VAAJOKI A,et al.Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon[J].Journal of Vacuum Science&Technology A:Vacuum,Surfaces,and Films,2016,34(1):01A124.
[22]KABIR M S,MUNROE P,ZHOU Z,et al.Scratch adhesion and tribological behaviour of graded Cr/CrN/CrTiN coatings synthesized by closed-field unbalanced magnetron sputtering[J].Wear,2017,380-381:163-175.
[23]华敏奇,袁振海.划痕试验法对特殊薄膜系结合力的检测与评价[J].分析测试技术与仪器,2002,8(4):218-225.HUA MQ,YUAN ZH.Experiment and evaluation of coalescent properties of some special film-substrate systems by scratching method[J].Analysis&Testing Techonology&Instruments,2002,8(4):218-225(in Chinese).
[24]PATHADE H P,WAKCHAURE V D.Experimental investigation of flank wear in coated carbide tipped tool for machining AISI 304[J].International Journal of Mechanical&Production Engineering Research&Development,2013,3(1):63-86.
[25]ZHANG L,YANG H,PANG X,et al.Microstructure,residual stress,and fracture of sputtered TiN films[J].Surface&Coatings Technology,2013,224(7):120-125.
[26]ZHANG S,SUN D,FU Y,et al.Effect of sputtering target power on microstructure and mechanical properties of nanocomposite nc-TiN/a-SiNx thin films[J].Thin Solid Films,2004,447(3):462-467.
[27]SHI X W,LI X R,YAO N,et al.A study on magnetic filter controlling tin films prepared by arc ion plating[J].Applied Mechanics and Materials,2011,117-119:1071-1075.