交变光场时空耦合型位移测量系统的研制
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摘要
针对现有光栅精密刻划加工难度大制约测量精度的问题,设计了一种以交变光场为测量媒介的时空耦合线性位移测量系统。该测量系统利用四路正交的交变光场与四组正交的正弦透光面调制耦合形成电行波信号实现高精度位移测量。在对测量系统测量原理分析的基础上,建立了该系统的理论模型和误差模型,通过仿真详细分析了该系统在时间相位不正交、空间相位不正交以及结构安装不平行时的误差规律。开展实验验证了一次、二次和四次谐波的产生原因,根据误差来源改进了测量装置的结构,优化了相应的参数。实验结果表明:在180mm测量范围内,用栅距0.6mm的测量系统实现了±0.4μm的测量精度。该测量系统规避了现有光栅精密刻划的问题,结构简单、安装方便,为光学位移测量提供了新思路。
Regarding the restriction of precision ruling process difficulty on the measurement precision,a linear space-time coupling displacement measuring system was designed,taking an alternating light field as the measuring medium.The measuring system coupled four orthogonal alternating light fields and four orthogonal sinusoidal light transmitting surface into electrical traveling wave signal,thus achieving high precision displacement measurements.Through analysis of the measuring principle of the system.The theory model and error model of this measurement system were established,and the measuring error characteristic was analyzed in detail by model simulation when time phase and space phase were not orthogonal and mechanical installation was inaccurate respectively.Experiments were conducted for verification of the origins of the first harmonic,the second harmonic and the fourth harmonic.According to which,the measuring equipment was improved and its parameters were optimized.The experiment result shows that the measuring errors of the optimized measuring system are controlled within ±0.4μm in the measuring range of 180 mm with grating pitch of 0.6mm.The system avoids precision ruling process of current grating,and has simple structure and easy installation,which provide an excellent approach for optical displacement measurements.
Regarding the restriction of precision ruling process difficulty on the measurement precision,a linear space-time coupling displacement measuring system was designed,taking an alternating light field as the measuring medium.The measuring system coupled four orthogonal alternating light fields and four orthogonal sinusoidal light transmitting surface into electrical traveling wave signal,thus achieving high precision displacement measurements.Through analysis of the measuring principle of the system.The theory model and error model of this measurement system were established,and the measuring error characteristic was analyzed in detail by model simulation when time phase and space phase were not orthogonal and mechanical installation was inaccurate respectively.Experiments were conducted for verification of the origins of the first harmonic,the second harmonic and the fourth harmonic.According to which,the measuring equipment was improved and its parameters were optimized.The experiment result shows that the measuring errors of the optimized measuring system are controlled within ±0.4μm in the measuring range of 180 mm with grating pitch of 0.6mm.The system avoids precision ruling process of current grating,and has simple structure and easy installation,which provide an excellent approach for optical displacement measurements.
引文
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[2]王一光,陈兴林,李晓杰.光刻机工件台宏动三自由度建模及自适应神经网络控制[J].光学精密工程,2015,23(1):132-140.WANG Y G,CHEN X L,LI X J.Three degrees of freedom modeling and adaptive neural network control for long-stroke wafer stage[J].Opt.Precision Eng.,2015,23(1):132-140.(in Chinese)
[3]李文昊,张成山,巴音贺希格,等.莫尔条纹法精确控制全息光栅光栅常数的研究[J].仪器仪表学报,2013,34(12):2867-2873.LI W H,ZHANG CH SH,BAYANHESHIG,et al..Study on precisely controlling the grating constant of holographic grating with Moire pattern method[J].Chinese Journal of Scientific Instrument,2013,34(12):2867-2873.(in Chinese)
[4]司新春,唐燕,胡松,等.基于复合光栅的大范围高精度对准方法[J].光学学报,2016,36(1):0105003.SI X CH,TANG Y,HU S,et al..High-precision alignment technique with large measurement range based on composite gratings[J].Acta Optica Sinica,2016,36(1):0105003.(in Chinese)
[5]陈自然,刘小康,郑永,等.精密位移动态测量信号特征辨识及细分新方法研究[J].仪器仪表学报,2015,36(10):2224-2230.CHEN Z R,LIU X K,ZHENG Y,et al..Study on the novel characteristic identification and subdivision method for precision displacement dynamic measurement signals[J].Chinese Journal of Scientific Instrument,2015,36(10):2224-2230.(in Chinese)
[6]冯金扬,叶雄英,陈烽,等.集成双光栅干涉微梁位移测量方法[J].光学精密工程,2012,20(8):1747-1753.FENG J Y,YE X Y,CHEN F,et al..Interferometric displacement measurement of microcantilevers based on integrated dual gratings[J].Opt.Precision Eng.,2012,20(8):1747-1753.(in Chinese)
[7]张磊,郭劲.分体式激光扩束系统平行度测量装置的设计[J].光学精密工程,2012,20(4):789-795.ZHANG L,GUO J.Design of parallelism measuring equipment for laser beams from independent laser expanding beam system[J].Opt.Precision Eng.,2012,20(4):789-795.(in Chinese)
[8]钱义先,洪雪婷,金伟民.光学相关的双CCD成像系统图像运动位移测量[J].中国激光,2013,40(7):0708002.QIAN Y X,HONG X T,JIN W M.Motion measurement of dual-CCD imaging system based on optical correlator[J].Chinese Journal of Lasers,2013,40(7):0708002.(in Chinese)
[9]张震,周孟莲,张检民,等.CCD中的激光光斑阴影现象及机理[J].光学精密工程,2013,21(5):1365-1371.ZHANG ZH,ZHOU M L,ZHANG J M,et al..Shadows of laser spots in CCD and their mechanism[J].Opt.Precision Eng.,2013,21(5):1365-1371.(in Chinese)
[10]常丽.莫尔条纹纳米级细分关键技术研究[D].沈阳:沈阳工业大学,2013.CHANG L.Research on Key Technology of Moire Fringe Nanoscale Subdivision[D].Shenyang:Shenyang University of Technology,2013.(in Chinese)
[11]宋玉龙,楚广生,马天翔,等.一种基于软件倍频的编码器细分方法[J].仪器仪表学报,2014,35(6S):142-146.SONG Y L,CHU G SH,MA T X,et al..Encoder subdivision method based on the software frequency doubling[J].Chinese Journal of Scientific Instrument,2014,35(6S):142-146.(in Chinese)
[12]SUGIYAMA Y,MATSUI Y,TOYODA H,et al..A 3.2kHz,14-bit optical absolute rotary encoder with a CMOS profile sensor[J].IEEE Sensors Journal,2008,8(8):1430-1436.
[13]王显军.光电轴角编码器细分信号误差及精度分析[J].光学精密工程,2012,20(2):379-386.WANG X J.Errors and precision analysis of subdivision signals for photoelectric angle encoders[J].Opt.Precision Eng.,2012,20(2):379-386.(in Chinese)
[14]HANDEL P.Parameter estimation employing a dual-channel sine-wave model under a Gaussian assumption[J].IEEE Transactions on Instrumentation and Measurement,2008,57(8):1661-1669.
[15]李彦,付敏,朱革,等.基于光敏阵列直接调制的单栅式时栅位移传感器[J].光学精密工程,2016,24(5):1028-1035.LI Y,FU M,ZHU G,et al..Single grate type time-grating displacement sensor based on photosensitive array direct modulation[J].Opt.Precision Eng.,2016,24(5):1028-1035.(in Chinese)
[16]鲁进,陈锡侯,汤其富,等.变耦型时栅传感器及测头姿态对测量误差的影响[J].光学精密工程,2016,24(9):2271-2282.LU J,CHEN X H,TANG Q F,et al..Variable coupling time grating sensor and effects of sensorhead attitudes on measuring errors[J].Opt.Precision Eng.,2016,24(9):2271-2282.(in Chinese)
[17]杨洪涛,章刘沙,周姣,等.寄生式时栅安装误差对传感器测量精度的影响[J].光学精密工程,2016,24(2):319-326.YANG H T,ZHANG L SH,ZHOU J,et al..Effect of installation error of parasitic time grating on sensor measuring accuracy[J].Opt.Precision Eng.,2016,24(2):319-326.(in Chinese)
[18]付敏,彭东林,朱革,等.光强正交调制型位移传感器的数学模型与误差分析[J].光学精密工程,2015,23(3):784-793.FU M,PENG D L,ZHU G,et al..Mathematical model and error analysis of light intensity orthogonal modulation type displacement sensor[J].Opt.Precision Eng.,2015,23(3):784-793.(in Chinese)
[19]彭东林,孙世政,高忠华,等.时栅位移传感器的误差分离与补偿方法研究[J].自动化仪表,2012,33(1):15-17.PENG D L,SUN SH ZH,GAO ZH H,et al..Research on error separation and compensation for time-grating angular displacement sensor[J].Process Automation Instrumentation,2012,33(1):15-17.(in Chinese)
[20]彭东林,刘小康,张兴红,等.基于谐波修正法的高精度时栅位移传感器[J].仪器仪表学报,2006,27(1):31-33.PENG D L,LIU X K,ZHAGN X H,et al..High-precision time-grating displacement sensor based on harmonic wave correcting method[J].Chinese Journal of Scientific Instrument,2006,27(1):31-33.(in Chinese)