等厚等倾复合型干涉仪
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摘要
干涉仪是可以快速高效,非接触地获取被测元件信息的光学测量仪器。为拓展单个干涉仪应用范围,设计出一种利用切换式系统,能根据测量需求实现等厚干涉和等倾干涉之间转换的复合型干涉仪。在介绍复合型干涉仪基本结构的基础上,分析了干涉仪设计中需要注意的问题和事项,着重讨论了光源的选择,准直物镜像差要求,聚光镜设计参数。利用ZEMAX软件完成了干涉仪光学系统的设计。最后,用FRED软件对干涉仪建模,进行仿真分析,得到了等厚干涉和等倾干涉干涉图,干涉条纹均清晰可见。表明此干涉仪可应用于实际光学测量之中。
Interferometer is a kind of optical measuring instrument that can obtain measured component information in a fast,efficient and non-contact way. In order to expand application scope of single interferometer,compound interferometer that can realize shift from equal thickness interference to equal inclination interference by switched system according to measurement requirements was designed, which can be used for surface measurement of plane, large plane and spherical surface. Based on introduction to basic structure of compound interferometer,issues and matters needing attention were analyzed in terms of interferometer design,mainly including choice of light source,the collimator's aberration requirement,and the design parameters of the concentrator. Design on interferometer optical system was completed by ZEMAX software. At last,modeling was conducted on interferometer by FRED software to simulation analysis,and interferograms of equal thickness interference and equal inclination interference were got,with clear interference fringe. It showed that this interferometer can be used in actual optical measurement.
Interferometer is a kind of optical measuring instrument that can obtain measured component information in a fast,efficient and non-contact way. In order to expand application scope of single interferometer,compound interferometer that can realize shift from equal thickness interference to equal inclination interference by switched system according to measurement requirements was designed, which can be used for surface measurement of plane, large plane and spherical surface. Based on introduction to basic structure of compound interferometer,issues and matters needing attention were analyzed in terms of interferometer design,mainly including choice of light source,the collimator's aberration requirement,and the design parameters of the concentrator. Design on interferometer optical system was completed by ZEMAX software. At last,modeling was conducted on interferometer by FRED software to simulation analysis,and interferograms of equal thickness interference and equal inclination interference were got,with clear interference fringe. It showed that this interferometer can be used in actual optical measurement.
引文
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[6]刘李瑶,杨甬英,王晨,等.点衍射干涉检测技术[J].中国光学,2017,10(4):391-414.
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[8]郭仁慧.近红外大口径波长移相干涉仪关键技术及应用研究[D].南京:南京理工大学,2013.
[9]苏志德,史振广,彭吉,等.菲索干涉仪中精确移相的实现[J].中国光学,2013,6(2):244-250.
[10]羡一民.HE-NE激光的波长检测及稳频技术—激光干涉仪技术综述[J].工具技术,2014,48(11):80-85.
[2]孙沁园,陈磊,郑东晖,等.采用短相干光源的动态斐索干涉仪[J].红外与激光工程,2018,1(2):202-208.
[3]王青,徐新华.干涉仪测量球面曲率半径的精度分析[J].东南大学学报,2009,39(11):55-59.
[4] Hariharan P.Phase-shifting interferometry measurements.with.high-reflectancesurfaces[J].Optical Engineering,2002,41(4):856-859.
[5]杨志文.菲索型球面干涉仪测试精度分析[J].长春理工大学学报,1988(2):74-80.
[6]刘李瑶,杨甬英,王晨,等.点衍射干涉检测技术[J].中国光学,2017,10(4):391-414.
[7]汤昌社,潘嘉声,周建友,等.基于机器视觉与等倾干涉术的平面度测量装置[J].中国测试技术,2008,34(2):16-17.
[8]郭仁慧.近红外大口径波长移相干涉仪关键技术及应用研究[D].南京:南京理工大学,2013.
[9]苏志德,史振广,彭吉,等.菲索干涉仪中精确移相的实现[J].中国光学,2013,6(2):244-250.
[10]羡一民.HE-NE激光的波长检测及稳频技术—激光干涉仪技术综述[J].工具技术,2014,48(11):80-85.