强耦合串联石墨烯纳米机械振子
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摘要
与微米机械振子相比,纳米机械振子使用纳米级材料制备,尺寸更小,质量更轻,它作为探测器,在探测力、质量等物理量时拥有更高的灵敏度.石墨烯有高强度、低密度等优良的机械特性,被认为是制备纳米机械振子的理想材料.基于其制备的石墨烯纳米机械振子有着高谐振频率、高品质因子和谐振频率可调性高等优势,对于纳米力学的基础研究和应用都具有重要的意义.本文利用微纳加工工艺(包括电子束曝光、电子束蒸发镀膜、反应离子刻蚀和微米级定点干法转移技术)制备了串联石墨烯纳米机械振子样品,并在极低温下(10mK)测量了石墨烯机械振子的机械性质,实现两个串联石墨烯纳米机械振子的强耦合,耦合强度为1.34MHz,协同系数C=399.
Comparing to microelectromechanical resonators,nanomechanical resonators,fabricated with nanomaterials,have smaller size,lighter weight and higher sensitivity.Because of its high strength and low density,graphene is considered as an ideal candidate to host nanoelectromechanical resonators.Taking the advantages of high and tunable resonant frequency,high quality factor,graphene nanoelectromechanical resonators attracts significant interests in both nanoscale mechanics study and applications.Here we fabricated graphene nanoelectromechanical resonators(GNEM)in achain using micro and nanofabrication technique,including electron beam lithography,electron beam evaporation,reactive ion etching and microscale deteministic dry transfer technique,and measured the properties of the GNEM at ultra low temperature(10 mK),achieving strong coupling regime of GNEMs with a coupling strength of 1.34 MHz and cooperativity of 399.
Comparing to microelectromechanical resonators,nanomechanical resonators,fabricated with nanomaterials,have smaller size,lighter weight and higher sensitivity.Because of its high strength and low density,graphene is considered as an ideal candidate to host nanoelectromechanical resonators.Taking the advantages of high and tunable resonant frequency,high quality factor,graphene nanoelectromechanical resonators attracts significant interests in both nanoscale mechanics study and applications.Here we fabricated graphene nanoelectromechanical resonators(GNEM)in achain using micro and nanofabrication technique,including electron beam lithography,electron beam evaporation,reactive ion etching and microscale deteministic dry transfer technique,and measured the properties of the GNEM at ultra low temperature(10 mK),achieving strong coupling regime of GNEMs with a coupling strength of 1.34 MHz and cooperativity of 399.
引文
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