基于PZT纳米纤维柔性压力传感器的研制
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摘要
设计制作了一种柔性压力传感器,以聚对苯二甲酸乙二醇酯(PET)作为柔性基底,用静电纺丝技术制备的锆钛酸铅(PZT)纳米纤维作为敏感材料。将PZT纳米纤维铺设到带有氧化铟锡(ITO)叉指电极的PET柔性基底上,再将聚二甲基硅氧烷(PDMS)薄膜覆盖在PZT纳米纤维上制成柔性压力传感器。利用X射线衍射仪(XRD)和扫描电子显微镜(SEM)分别对PZT纳米纤维的晶体结构和形貌进行了表征,并通过测试系统测试了传感器的性能。测试结果表明:在20~60 kPa内,随着压强的增大,传感器的开路电压随之线性增大,最大约为10 V,其中灵敏度约为180 mV/kPa。
A kind of flexible pressure sensor was designed and fabricated with polyethylene gycol terephthalate(PET)as the flexible substrate and lead zirconate titanate(PZT)nanofibers prepared by the electrostatic spinning technology as the sensitive material.The PZT nanofibers were laid on the PET flexible substrate with the fork electrodes of indium tin oxide(ITO),and then the polydimethylsiloxane(PDMS)film was coated on the PZT nanofibers to fabricate the flexible pressure sensor.The crystal structure and morphology of the PZT nanofibers were characterized by X-ray diffractometer(XRD)and scanning electron microscope(SEM),respectively.Besides,the performance of the sensor was tested with a test system.The test results show that the opencircuit voltage of the sensor increases linearly with the increase of the pressure at a range of 20-60 kPa,and the maximum open-circuit voltage is about 10 V,while the sensitivity is about180 mV/kPa.
A kind of flexible pressure sensor was designed and fabricated with polyethylene gycol terephthalate(PET)as the flexible substrate and lead zirconate titanate(PZT)nanofibers prepared by the electrostatic spinning technology as the sensitive material.The PZT nanofibers were laid on the PET flexible substrate with the fork electrodes of indium tin oxide(ITO),and then the polydimethylsiloxane(PDMS)film was coated on the PZT nanofibers to fabricate the flexible pressure sensor.The crystal structure and morphology of the PZT nanofibers were characterized by X-ray diffractometer(XRD)and scanning electron microscope(SEM),respectively.Besides,the performance of the sensor was tested with a test system.The test results show that the opencircuit voltage of the sensor increases linearly with the increase of the pressure at a range of 20-60 kPa,and the maximum open-circuit voltage is about 10 V,while the sensitivity is about180 mV/kPa.
引文
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