基于位置敏感器件的高精度激光位置检测系统
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摘要
光电非接触式测量方法对实现微位移测量具有重要意义,位置敏感器件(PSD)是实现光斑位置探测的传感器件,其探测精度以及基于该器件的数据处理方法直接影响位置测量精度。依据PSD各电极输出的光电流大小反比于入射光位置到各电极之间距离的工作原理,设计了二维激光位置检测系统方案。为了提高PSD输出微弱电流信号的稳定性和位置探测精度,重点研究了信号调理电路设计、参数匹配、滤波方法与实时并行计算方法。实验结果表明:在±2mm方形区域内,基于PSD所设计的探测系统单点稳定性精度优于2μm,能够满足依托项目中激光跟踪仪对空间目标准确定位的要求以及基于激光位置检测的高精度实时微位移测量相关应用的需求。
Non-contact photoelectric measuring method is important to realize micro-displacement measurement.Position sensitive device(PSD)is a kind of light spot position detecting sensor.Its detection accuracy and data processing method based on PSD can directly affect the location measurement accuracy.The working principle of PSD is that photocurrent intensity output from each electrode is inversely proportional to the distance between the position of the incident light and each electrode.According to this principle,the scheme of the two-dimensional laser position detecting system has been designed.In order to improve the stability of the output weak current signals from PSD and the location detection accuracy,signal conditioning circuit design,parameters matching,filtering method and real-time parallel algorithm are mainly studied.The experiment results indicate that,within ±2 mm square area,the stability accuracy of the single point of this detecting system based on PSD is better than 2μm.Therefore,this system can satisfy the requirements of space target accurate positioning of the laser tracker in funded project and application requirements like real-time high accuracy micro-displacement measurement based on laser position detecting.
Non-contact photoelectric measuring method is important to realize micro-displacement measurement.Position sensitive device(PSD)is a kind of light spot position detecting sensor.Its detection accuracy and data processing method based on PSD can directly affect the location measurement accuracy.The working principle of PSD is that photocurrent intensity output from each electrode is inversely proportional to the distance between the position of the incident light and each electrode.According to this principle,the scheme of the two-dimensional laser position detecting system has been designed.In order to improve the stability of the output weak current signals from PSD and the location detection accuracy,signal conditioning circuit design,parameters matching,filtering method and real-time parallel algorithm are mainly studied.The experiment results indicate that,within ±2 mm square area,the stability accuracy of the single point of this detecting system based on PSD is better than 2μm.Therefore,this system can satisfy the requirements of space target accurate positioning of the laser tracker in funded project and application requirements like real-time high accuracy micro-displacement measurement based on laser position detecting.
引文
1 Hou Jinlong.Research on laser triangulation measurement system based on PSD[D].Wuhan:Huazhong University of Science and Technology,2005:1-14.侯金龙.PSD激光三角测量系统的研制[D].武汉:华中科技大学,2005:1-14.
2 Wang Xiaofeng,Shen Hua,Li Jianxin,et al.Method for calibrating the spatial coordinate coherence of shadowgraphtaking camera stations at long distance with PSD[J].Laser&Optoelectronics Progress,2013,50(4):041201.王小锋,沈华,李建欣,等.基于PSD的长距离多阴影照相站的空间坐标一致性标定方法[J].激光与光电子学进展,2013,50(4):041201.
3 Zhai Yusheng,Zhang Zhifeng,Su Yuling,et al.A multi-degree-of-freedom geometric errors measurement method[J].Laser&Optoelectronics Progress,2014,51(8):081203.翟玉生,张志峰,苏玉玲,等.一种多自由度误差同时测量方法[J].激光与光电子学进展,2014,51(8):081203.
4 Qian Hang,Wang Dahui,Ma Lianying,et al.Research on 3-ray automatic alignment in high power excimer laser MOPAsystem[J].Laser&Optoelectronics Progress,2014,51(10):101403.钱航,王大辉,马连英,等.高功率准分子激光MOPA系统中的三路激光准直技术研究[J].激光与光电子学进展,2014,51(10):101403.
5 Zhai Yusheng,Zhang Zhifeng,Su Yuling,et al.Survey of rolling angle measurement methods[J].Laser&Optoelectronics Progress,2014,51(4):040002.翟玉生,张志峰,苏玉玲,等.滚转角测量方法综述[J].激光与光电子学进展,2014,51(4):040002.
6 Zhou Xingmin,Liu Hengbiao,Ge Jianmin.Reflected spot center offset correction in laser triangulation measurement[J].Acta Optica Sinica,2015,35(5):0512001.周兴敏,刘恒彪,葛剑敏.激光三角测量中物面反射光斑重心偏移的修正[J].光学学报,2015,35(5):0512001.
7 Jia Tianxiang,Xu Xiping,Dong Wenbo.Design of automatic testing system for 2Dposition sensitive detector(PSD)[J].Instrument Technique and Sensor,2012,10:67-69.贾天祥,徐熙平,董文博.二维位置敏感探测器(PSD)自动测试系统[J].仪表技术与传感器,2012,10:67-69.
8 Zeng Chao.Research and application of 2Dposition sensitive detector(PSD)[D].Hangzhou:Zhejiang University,2003:5-12.曾超.基于二维位置敏感探测器PSD的研究及应用[D].杭州:浙江大学,2003:5-12.
9 Zhang Min,Liang Yanbing.Experiment on two dimensional quadrilateral position sensing detector[J].Infrared and Laser Engineering,2013,42(2):459-464.张敏,梁雁冰.二维四边形位置敏感探测器实验研究[J].红外与激光工程,2013,42(2):459-464.
10 Duan Jie,Sun Xiangyang,Cai Jinghai,et al.Applications research to PSD in the laser displacement detecting system[J].Infrared and Laser Engineering,2007,36(s1):281-284.段洁,孙向阳,蔡敬海,等.PSD在激光位移检测系统中的应用研究[J].红外与激光工程,2007,36(s1):281-284.
11 Zhu Mingzhu,Chen Peifeng,Zhou Baoyu,et al.The error analysis and experimental study on PSD used in laser position detection[J].Optoelectronic Technology&Information,2006,19(3):10-14.朱明珠,陈培峰,周保玉,等.激光位置检测中PSD的误差分析与实验研究[J].光电子技术与信息,2006,19(3):10-14.
12 Wang Shuaishuai,Zhu Lianqing,Zhou Weihu,et al.Research on micro-displacement measurement system based on PSD[J].Electronic Sci&Tech,2014,27(6):180-183.王帅帅,祝连庆,周维虎,等.基于PSD的微位移测量系统研究[J].电子科技,2014,27(6):180-183.
13 Cheng Yi,Dong Dengfeng,Zhou Weihu,etal.Research of micro-displacement measurement system based on PSD[J].Electronic Design Engineering,2015,23(7):7-11.程意,董登峰,周维虎,等.基于PSD的微位移测量系统研究[J].电子设计工程,2015,23(7):7-11.
2 Wang Xiaofeng,Shen Hua,Li Jianxin,et al.Method for calibrating the spatial coordinate coherence of shadowgraphtaking camera stations at long distance with PSD[J].Laser&Optoelectronics Progress,2013,50(4):041201.王小锋,沈华,李建欣,等.基于PSD的长距离多阴影照相站的空间坐标一致性标定方法[J].激光与光电子学进展,2013,50(4):041201.
3 Zhai Yusheng,Zhang Zhifeng,Su Yuling,et al.A multi-degree-of-freedom geometric errors measurement method[J].Laser&Optoelectronics Progress,2014,51(8):081203.翟玉生,张志峰,苏玉玲,等.一种多自由度误差同时测量方法[J].激光与光电子学进展,2014,51(8):081203.
4 Qian Hang,Wang Dahui,Ma Lianying,et al.Research on 3-ray automatic alignment in high power excimer laser MOPAsystem[J].Laser&Optoelectronics Progress,2014,51(10):101403.钱航,王大辉,马连英,等.高功率准分子激光MOPA系统中的三路激光准直技术研究[J].激光与光电子学进展,2014,51(10):101403.
5 Zhai Yusheng,Zhang Zhifeng,Su Yuling,et al.Survey of rolling angle measurement methods[J].Laser&Optoelectronics Progress,2014,51(4):040002.翟玉生,张志峰,苏玉玲,等.滚转角测量方法综述[J].激光与光电子学进展,2014,51(4):040002.
6 Zhou Xingmin,Liu Hengbiao,Ge Jianmin.Reflected spot center offset correction in laser triangulation measurement[J].Acta Optica Sinica,2015,35(5):0512001.周兴敏,刘恒彪,葛剑敏.激光三角测量中物面反射光斑重心偏移的修正[J].光学学报,2015,35(5):0512001.
7 Jia Tianxiang,Xu Xiping,Dong Wenbo.Design of automatic testing system for 2Dposition sensitive detector(PSD)[J].Instrument Technique and Sensor,2012,10:67-69.贾天祥,徐熙平,董文博.二维位置敏感探测器(PSD)自动测试系统[J].仪表技术与传感器,2012,10:67-69.
8 Zeng Chao.Research and application of 2Dposition sensitive detector(PSD)[D].Hangzhou:Zhejiang University,2003:5-12.曾超.基于二维位置敏感探测器PSD的研究及应用[D].杭州:浙江大学,2003:5-12.
9 Zhang Min,Liang Yanbing.Experiment on two dimensional quadrilateral position sensing detector[J].Infrared and Laser Engineering,2013,42(2):459-464.张敏,梁雁冰.二维四边形位置敏感探测器实验研究[J].红外与激光工程,2013,42(2):459-464.
10 Duan Jie,Sun Xiangyang,Cai Jinghai,et al.Applications research to PSD in the laser displacement detecting system[J].Infrared and Laser Engineering,2007,36(s1):281-284.段洁,孙向阳,蔡敬海,等.PSD在激光位移检测系统中的应用研究[J].红外与激光工程,2007,36(s1):281-284.
11 Zhu Mingzhu,Chen Peifeng,Zhou Baoyu,et al.The error analysis and experimental study on PSD used in laser position detection[J].Optoelectronic Technology&Information,2006,19(3):10-14.朱明珠,陈培峰,周保玉,等.激光位置检测中PSD的误差分析与实验研究[J].光电子技术与信息,2006,19(3):10-14.
12 Wang Shuaishuai,Zhu Lianqing,Zhou Weihu,et al.Research on micro-displacement measurement system based on PSD[J].Electronic Sci&Tech,2014,27(6):180-183.王帅帅,祝连庆,周维虎,等.基于PSD的微位移测量系统研究[J].电子科技,2014,27(6):180-183.
13 Cheng Yi,Dong Dengfeng,Zhou Weihu,etal.Research of micro-displacement measurement system based on PSD[J].Electronic Design Engineering,2015,23(7):7-11.程意,董登峰,周维虎,等.基于PSD的微位移测量系统研究[J].电子设计工程,2015,23(7):7-11.