超磁致伸缩作动器激光干涉位移测量系统
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摘要
由于超磁致伸缩作动器的位移在微米级,对其精确测量至关重要,针对激光干涉测量技术中分立元件迈克尔逊激光干涉仪存在环境要求高、调整烦琐和易受干扰等缺点,采用全光纤迈克尔逊干涉仪简化测量前的准备工作;并借助高性能动态信号采集卡,配合Lab VIEW图形化编程工具,应用贝塞尔函数干涉条纹细分技术提高测量精度,开发了超磁致伸缩作动器位移测量系统。实验证明测量误差与理论计算相符,表明测量结果是准确可靠的。该系统适用于超磁致伸缩作动器位移的实验研究和现场测量,可为微位移的测量提供一种参考方法。
Owing to the displacement of the giant magnetostrictive actuator is in the micron level, it is very important for its accurate measurement. In order to overcome the shortcomings of the Michelson interferometer,such as high environmental requirements, complicated adjustment and easy to be interfered in the laser interferometry, the all fiber interferometer is used to simplify the preparatory work before measurement. With the help of high-performance dynamic signal acquisition card and LabVIEW graphical programming tool, the Bessel function interference fringe subdivision technology is used to improve the measurement accuracy, and a giant magnetostrictive actuator displacement measurement system is developed. Experiments show that the measurement errors are within the theoretical range, indicating that the measurement results are accurate and reliable.The system is suitable for experimental research and field measurement of displacement of giant magnetostrictive actuators, and can provide reference for the measurement of micro displacement.
Owing to the displacement of the giant magnetostrictive actuator is in the micron level, it is very important for its accurate measurement. In order to overcome the shortcomings of the Michelson interferometer,such as high environmental requirements, complicated adjustment and easy to be interfered in the laser interferometry, the all fiber interferometer is used to simplify the preparatory work before measurement. With the help of high-performance dynamic signal acquisition card and LabVIEW graphical programming tool, the Bessel function interference fringe subdivision technology is used to improve the measurement accuracy, and a giant magnetostrictive actuator displacement measurement system is developed. Experiments show that the measurement errors are within the theoretical range, indicating that the measurement results are accurate and reliable.The system is suitable for experimental research and field measurement of displacement of giant magnetostrictive actuators, and can provide reference for the measurement of micro displacement.
引文
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[11]张群,何其芳,罗迎.基于贝塞尔函数基信号分解的微动群目标特征提取方法[J].电子与信息学报,2016,38(12):3056-3062.
[12]石屹,金登男.基于贝塞尔曲线拟合的心电信号模式分类方法[J].计算机工程与设计,2013,34(4):1437-441.
[2]段小艳,任冬梅.激光干涉法微位移测量技术综述[J].计测技术,2012,32(6):1-5.
[3]霍雷,曾晓东,安毓英,等.利用激光多普勒外差原理对振动物体测量及分析[J].激光技术,2011,35(5):600-602.
[4]陆秋海,李德葆.工程振动试验分析[M]. 2版.北京:清华大学出版社,2015.
[5]刁晓飞.基于空间分离的高速外差激光干涉测量若干关键技术研究[D].哈尔滨:哈尔滨工业大学,2014.
[6]何京徽,许素安,谢敏,等.基于LabVIEW的激光双频外差干涉纳米位移测量系统[J].测控技术,2014,33(5):31-34.
[7]王艳阳,石云波,王华,等.高g值加速度传感器校准不确定度及误差分析[J].传感技术学报,2016,29(7):971-976.
[8]乐燕芬,李霄夏,句爱松.激光外差干涉仪相位计的设计[J].激光技术,2014,38(1):119-123.
[9]孙桥,王建林,胡红波,等.低g值碰撞式冲击加速度计量标准装置研究与建立[J].振动与冲击,2015,34(10):179-183.
[10]姜春雷.基于多重反馈自混合干涉的振动测量技术研究[D].哈尔滨:哈尔滨工业大学,2017.
[11]张群,何其芳,罗迎.基于贝塞尔函数基信号分解的微动群目标特征提取方法[J].电子与信息学报,2016,38(12):3056-3062.
[12]石屹,金登男.基于贝塞尔曲线拟合的心电信号模式分类方法[J].计算机工程与设计,2013,34(4):1437-441.