一阶不连续光学元件MRF流体动力学分析方法
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摘要
一阶不连续光学元件的磁流变抛光问题是制约我国高精高效光学制造领域发展的难题之一,其涉及锥形、矩形等几何形貌元件的光学元件加工问题以及常见光学元件的边缘效应控制问题。提出了基于一阶不连续光学元件的磁流变抛光流体动力学方法,建立了该类元件抛光区域流体动力分析的理论方法和数值手段。首先,对磁流变抛光工况下的流场进行了合理假设,其次,从微元流体动力方程出发,建立了适用于一阶不连续面形的流场分析方法,最后,基于有限差分法和数值迭代方法建立了流场控制方程的数值计算方法。通过对切入距离为1～18mm的抛光过程进行数值仿真,发现该方法所获取的一阶不连续面形的压力分布形态是正确的,产生的不连续压降与实验观测一致。
Magnetorheological finishing of first-order discontinuous optical elements is one of the difficult problems that restrict the development of high-precision and high-efficiency optical manufacturing in China.In this paper,a fluid dynamics analysis method for magnetorheological finishing concerning the first order discontinuous optical elements is presented.Firstly,reasonable assumptions are made for the flow field under the practical condition of magnetorheological finishing.Secondly,based on the micro-element hydrodynamic equation,a flow field analysis method suitable for the first order discontinuous surface shape is established.Finally,a numerical calculation method for the flow field governing equation is established based on the finite difference method and numerical iteration method.Through numerical simulation for cutting distance ranging over 1～18 mm,it is found that the pressure distribution pattern of the first-order discontinuous surface obtained by the proposed method is correct,and the discontinuous pressure drop generated by the proposed method is consistent with that of the experimental observation.
Magnetorheological finishing of first-order discontinuous optical elements is one of the difficult problems that restrict the development of high-precision and high-efficiency optical manufacturing in China.In this paper,a fluid dynamics analysis method for magnetorheological finishing concerning the first order discontinuous optical elements is presented.Firstly,reasonable assumptions are made for the flow field under the practical condition of magnetorheological finishing.Secondly,based on the micro-element hydrodynamic equation,a flow field analysis method suitable for the first order discontinuous surface shape is established.Finally,a numerical calculation method for the flow field governing equation is established based on the finite difference method and numerical iteration method.Through numerical simulation for cutting distance ranging over 1～18 mm,it is found that the pressure distribution pattern of the first-order discontinuous surface obtained by the proposed method is correct,and the discontinuous pressure drop generated by the proposed method is consistent with that of the experimental observation.
引文
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[20]Alexander K,Giuseppe C,Carlos P,et al.High refractive index Fresnel lens on a fiber fabricated by nanoimprint lithography for immersion applications.[J].Optics Letters,2016,41(15):3423-3426.
[21]Saner C,Lu L,Zhang D,et al.Chemical approaches for nanoscale patterning based on particle lithography with proteins and organic thin films[J].Nanotechnology Reviews,2015,4(2):129-143.
[22]邹志同.EUV光刻技术与摩尔定律[J].集成电路应用,2017(3):50-52.(Zou Zhitong.EUV lithography and Moore’s law.Integrated Circuit Applications,2017(3):50-52)
[23]Plummer W T,Chin A K.Method and reflective apparatus for combining high-power laser beams:U.S.Patent 9496675[P].2016-11-15.
[24]Simard L,Ellerbroek B,Bhatia R,et al.Thirty meter telescope science instruments:A status report[C]//Proc of SPIE.2016:9908V1.
[25]Hu H,Dai Y F,Peng X Q,et al.Research on reducing the edge effect in magnetorheological finishing[J].Applied Optics,2011,50(9):1220-1226.
[2]杨力.先进光学制造技术[M].北京:科学出版社,2001.(Yang Li.Advanced optical manufacturing technology.Beijing:Science Press,2001)
[3]Tricard M,Dumas P,Forbes G.Subaperture approaches for asphere polishing and metrology[C]//Proc of SPIE.2005,5638:284-299.
[4]彭小强.确定性磁流变抛光的关键技术研究[D].长沙:国防科学技术大学,2004.(Peng Xiaoqiang.Research on the key technology of deterministic magnetorheological polishing.Changsha:National University of Defense Technology,2004)
[5]Beier M,Scheiding S,Gebhardt A,et al.Fabrication of high precision metallic freeform mirrors with Magnetorheological Finishing(MRF)[C]//Proc of SPIE.2013:88840S.
[6]Schinhaerl M,Raschera R,Stampb R,et al.Filter algorithm for influence functions in the computer controlled polishing of high-quality optical lenses[J].International Journal of Machine Tools&Manufacture,2006,47:107-111.
[7]戴一帆.大中型光学非球面镜制造与测量新技术[M].北京:国防工业出版社,2011.(Dai Yifan.New technology for manufacturing and measuring large and medium-sized optical aspherical mirrors.Beijing:National Defense Industry Press,2011)
[8]罗勇.二次非球面镜参数求解模型及求解算法研究[J].科学技术与工程,2010,10(36):8968-8971.(Luo Yong.Research on solving model and algorithm of parameters of quadratic aspherical mirror.Science Technology and Engineering,2010,10(36):8968-8971)
[9]宋辞.离轴非球面光学零件磁流变抛光关键技术研究[D].长沙:国防科学技术大学,2012.(Song Ci.Research on the key technology of magnetorheological polishing for off-axis aspheric optical parts.Changsha:National University of Defense Technology,2012)
[10]刘振宇,罗霄,邓伟杰,等.大口径非球面的组合加工[J].光学精密工程,2013,21(11):2791-2797.(Liu Zhenyu,Luo Xiao,Deng Weijie,et al.Combined machining of large diameter aspheric surface.Optical Precision Engineering,2013,21(11):2791-2797)
[11]Johns M.The Giant Magellan Telescope(GMT)[C]//Proc of SPIE.2006:77334Z.
[12]李圣怡,彭小强.光学零件可控柔体制造的理论基础与方法[J].机械工程学报,2013,49(17):1-9.(Li Shengyi,Peng Xiaoqiang.Theoretical basis and method of controlled flexible manufacturing of optical parts.Journal of Mechanical Engineering,2013,49(17):1-9)
[13]Waluschka E.Cylindrical optic figuring dwell time optimization[C]//Proc of SPIE.2000,4318:25-32.
[14]Tuell M T.Novel tooling for production of aspheric surfaces[D].Tucson:University of Arizona,2002.
[15]潘君骅.光学非球面的设计、加工与检验[M].苏州:苏州大学出版社,2004.(Pan Junhua.Design,processing and testing of optical aspheric surface.Suzhou:Soochow University Press,2004)
[16]Dumas P,Hall C,Hallock B,et al.Complete sub-aperture pre-polishing&finishing solution to improve speed and determinism in asphere manufacture[C]//Proc of SPIE.2007:667111.
[17]袁巨龙,吴喆,吕冰海,等.非球面超精密抛光技术研究现状[J].机械工程学报,2012,48(23):167-177.(Yuan Julong,Wu Zhe,Lu Binghai,et al.Research status of aspheric surface ultra-precision polishing technology.Journal of Mechanical Engineering,2012,48(23):167-177)
[18]Goodman D S.Handbook of optics[M].New York:McGraw Hill,1995.
[19]Li Xiaoping,Zhao Yiwen,Lei Min.High precision and stability temperature control system for the immersion liquid in immersion lithography[J].Flow Measurement and Instrumentation,2016,53:317-325.
[20]Alexander K,Giuseppe C,Carlos P,et al.High refractive index Fresnel lens on a fiber fabricated by nanoimprint lithography for immersion applications.[J].Optics Letters,2016,41(15):3423-3426.
[21]Saner C,Lu L,Zhang D,et al.Chemical approaches for nanoscale patterning based on particle lithography with proteins and organic thin films[J].Nanotechnology Reviews,2015,4(2):129-143.
[22]邹志同.EUV光刻技术与摩尔定律[J].集成电路应用,2017(3):50-52.(Zou Zhitong.EUV lithography and Moore’s law.Integrated Circuit Applications,2017(3):50-52)
[23]Plummer W T,Chin A K.Method and reflective apparatus for combining high-power laser beams:U.S.Patent 9496675[P].2016-11-15.
[24]Simard L,Ellerbroek B,Bhatia R,et al.Thirty meter telescope science instruments:A status report[C]//Proc of SPIE.2016:9908V1.
[25]Hu H,Dai Y F,Peng X Q,et al.Research on reducing the edge effect in magnetorheological finishing[J].Applied Optics,2011,50(9):1220-1226.