一种新型精密微定位平台的设计与分析
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摘要
为了减小微定位平台的寄生运动,提高微定位平台的直线度,采用二级柔顺杠杆机构作为放大机构,以直梁型柔性铰链作为导向机构,设计了一种基于压电陶瓷驱动的新型精密微定位平台。根据虚功原理建立了新型精密微定位平台的理论模型,推导了其放大倍数、刚度的计算公式;采用ANSYS Workbench对新型精密微定位平台进行了有限元仿真分析,并搭建了试验测试系统。试验结果表明:微定位平台的最大行程可以达到68.32μm,放大倍数可以达到2.02,直线度为1.19%～1.42%,误差较小。经比较分析,试验结果与理论值贴合度较高,表明二级柔顺杠杆机构响应速度快、定位精度较高。
In order to reduce the parasitic movement of the micro-positioning platform and improve its straightness, a twostage compliant lever mechanism is used as the amplifying mechanism, and a straight beam-type flexible hinge is adopted as the guiding mechanism to design a new type of precise micro-positioning platform. According to the virtual-work principle, the theoretical model of the novel precise micro-positioning platform is established, and the calculation formulas of magnification and stiffness are deduced. ANSYS Workbench is adopted to conduct the finite element simulation analysis on the micro-positioning platform, and an experimental test system is set up. The experimental results show that the maximum stroke of the micro-positioning platform reaches 68.32 μm, the magnification reaches 2.02, and the linearity is 1.19% to 1.42%, with minor errors.Based on a series of comparative analysis, it is found that the experimental results are compatible with the theoretical value,which indicates that the two-stage compliant lever mechanism is characterized with fast response speed and high accuracy of positioning.
In order to reduce the parasitic movement of the micro-positioning platform and improve its straightness, a twostage compliant lever mechanism is used as the amplifying mechanism, and a straight beam-type flexible hinge is adopted as the guiding mechanism to design a new type of precise micro-positioning platform. According to the virtual-work principle, the theoretical model of the novel precise micro-positioning platform is established, and the calculation formulas of magnification and stiffness are deduced. ANSYS Workbench is adopted to conduct the finite element simulation analysis on the micro-positioning platform, and an experimental test system is set up. The experimental results show that the maximum stroke of the micro-positioning platform reaches 68.32 μm, the magnification reaches 2.02, and the linearity is 1.19% to 1.42%, with minor errors.Based on a series of comparative analysis, it is found that the experimental results are compatible with the theoretical value,which indicates that the two-stage compliant lever mechanism is characterized with fast response speed and high accuracy of positioning.
引文
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[11]刘敏,张宪民.基于类Ⅴ型柔性铰链的微位移放大机构[J].光学精密工程,2017,25(4):467-476.
[2] Qi Ke-qi,Yang Xiang,Chao Fang,et al. Analysis of the displacement amplification ratio of bridge-type mechanism[J].Mechanism and Machine Theory,2015,87:45-56.
[3]胡俊峰,杨展宏,徐贵阳.基于响应面法的微操作平台可靠性稳健设计[J].振动与冲击, 2017, 36(15):245-252.
[4]胡俊峰,陈星星,蔡建阳.减小桥式微操作平台温度效应的参数与构型优化设计[J].机械设计, 2017(5):99-104.
[5]李杨民,肖霄,汤晖.一种新型3自由度大行程微定位平台设计与分析[J].机械工程学报, 2013, 49(19):48-54.
[6]张建瓴,陈万银,可欣荣,等.一种微位移放大机构的设计与仿真[J].机械设计, 2009, 26(12):9-12.
[7]黄卫清,史小庆,王寅.菱形压电微位移放大机构的设计[J].光学精密工程, 2015, 23(3):803-809.
[8]马立,谢炜,刘波,等.柔性铰链微定位平台的设计[J].光学精密工程, 2014, 22(2):338-345.
[9]王兴松,王湘江,毛燕.基于超磁致伸缩材料的折弯型压曲放大机构设计、分析与控制[J].机械工程学报,2007,55(11):27-33.
[10]常旭,高思田,李东升,等.一种精密平台的柔性铰链设计和有限元验证[J].机械传动,2017,41(10):70-74.
[11]刘敏,张宪民.基于类Ⅴ型柔性铰链的微位移放大机构[J].光学精密工程,2017,25(4):467-476.