飞秒激光加工光波导的工艺与传输特性研究
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摘要
利用飞秒激光横向直写方式加工光波导,采用散射光测量法分析了光波导的传输损耗。为了提高光波导的传输性能,分析了不同数值孔径的聚焦物镜、加工速度和加工能量对光波导传输损耗的影响。实验结果表明,聚焦物镜数值孔径为0.25,激光功率为6 m W,加工速度在45~60μm/s时,飞秒激光加工的光波导具有较好的传输性能,其传输损耗低于-0.2 d B/cm。
In this paper,optical waveguides were written by transverse scan of femtosecond laser. Scattered light measurement method was used to measure waveguide transmission loss. In order to improve the transmission performance of optical waveguide,the influence of focusing lens,processing speed and energy of the different numerical aperture on the transmission loss of optical waveguides was analyzed. Experimental results show that,when the numerical aperture of the focusing lens is 0. 25,the laser power is 6 m W,processing speed is about 45 ~ 60 μm / s,the transmission loss of written optical waveguide is below -0. 2 d B / cm.
In this paper,optical waveguides were written by transverse scan of femtosecond laser. Scattered light measurement method was used to measure waveguide transmission loss. In order to improve the transmission performance of optical waveguide,the influence of focusing lens,processing speed and energy of the different numerical aperture on the transmission loss of optical waveguides was analyzed. Experimental results show that,when the numerical aperture of the focusing lens is 0. 25,the laser power is 6 m W,processing speed is about 45 ~ 60 μm / s,the transmission loss of written optical waveguide is below -0. 2 d B / cm.
引文
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[16]XIA Guocai,SUN Xiaoyan,DUAN Ji'an.Beam shaping technologies for efficiency laser fabrication[J].Laser&Optoelectrionics Progress,2012,49(10):10000.(in Chinese)夏国才,孙小燕,段吉安.用于实现激光高效率加工的光束整形技术[J].激光与光电子学进展,2012,49(10):100002.
[17]CHEN Lei.Research and fabrication of waveguide in sapphire with femtosecond laser pulses[D].Changchun:Jilin University,2009.(in Chinese)陈磊.利用飞秒激光在蓝宝石内制备光波导的研究[D].长春:吉林大学,2009.
[18]Haruna M,Segawa Y,Nishihara H.Nondestructive and simple method of optical waveguide loss measurment with optimization of end-fire coupling[J].Electronics Letters,1992,28(17):911-912.
[2]GAO Fei,YUANG Xiao,CHENG Guanghua,et al.Applications of femtosecond laser micromachining[J].Acta Photonica Sinica,2006,33(Suppl):415-418.(in Chinese)高飞,袁孝,程光华,等.飞秒激光在微加工中的应用[J].光子学报,2006,33(Suppl),415-418.
[3]NOLTE S,WILL M,BURGHOFF J,et al.Femtosecond waveguide writing a new avenue to three dimensional integrated optics[J].A p pl.Phys.A,2003,77:1092111.
[4]LI Shiling,YE Yongkai.Development of femtosecond laser direct writing waveguides in transparent optical materials[J].Laser Technolgy,2012,36(6):783-787.(in Chinese)李士玲,叶永凯.飞秒激光直写透明光学材料光波导的研究进展[J].激光技术,2012,36(6):783-787.
[5]R R Thomson,S Campbell,I J Blewett,et al.Active waveguide fabrication in erbium-doped oxyfluoride silicate glass[J].Applied Physics Letters,2005,87:121102.
[6]YU Xiantong,WANG Wenjun,LIU Yunlong,et al.Preparation and properties of an organic polymer waveguide[J].Laser&Infrared,2012,42(4):417-421.(in Chinese)俞宪同,王文军,刘云龙,等.一种有机聚合物光波导的制备及性能研究[J].激光与红外,2012,42(4):417-421.
[7]CHEN Hao.Development of planar waveguide materials[J].Information technology,2010,3:175-178.(in Chinese)陈昊.平面光波导器件的发展[J].信息技术,2010,3:175-178.
[8]Osellame R,Taccheo S,Marangoni M,et al.Femtosecond writing of active optical waveguides with astigmatically shaped beams[J].J.Opt.S oc.A m.B,2003,20:155921567.
[9]GAO Yu,LIAO Jinkun,YANG Yapei,et al.Measurement methods of optical waveguide propagation loss of polymer thin films[J].Laser&Infrared,2006,36(9)844-846.(in Chinese)高宇,廖进昆,杨亚培,等.有机聚合物薄膜光波导传输损耗的测量方法[J].激光与红外,2006,36(9):844-846.
[10]M Rochat,M Beck,J Faist,et al.Measurement of farinfrared waveguide loss using a multisection single-pass technique[J].Applied Physics Letters,2001.
[11]JIA Zhenhong.The fabrication of porous silicon channel waveguides and measurement of its propagation loss[J].Acta Photonica Sinica,2003,32(3):311-313.(in Chinese)贾振红.多孔硅通道型光波导的制备及传输损耗的测量[J].光子学报,2003,32(3):311-313.
[12]Kapron F P,Keck D B,Maurer R D.Radiation losses in glass optical waveguides[J].Appl.Phys.Lett.,1970,17(10):423-425.
[13]JIA Linghua,QIU Feng,QIAN Ying,et al.Digital camera photographing in measuring propagation loss properties of Ion-exchange planar optical waveguides[J].Acta Photonica Sinica,2009,38(5):1058-1061(in Chinese)贾凌华,邱枫,钱颖,等.数码照相法测量离子交换平面光波导损耗特性[J].光子学报,2009,38(5):1058-1061.
[14]LIANG Yulei.Measurement of slab optical waveguide losses[D].Changchun:Jilin University,2004.(in Chinese)梁宇雷.平面光波导损耗测试[D].长春:吉林大学,2004.
[15]LIU Dayong.Study on thresholds for femtosecond laser three dimensional micromachining of silica glass and its application[D].Beijing:Peking University,2008.(in Chinese)刘大勇.石英玻璃中飞秒激光三维加工阈值的研究及其应用[D].北京:北京大学,2008.
[16]XIA Guocai,SUN Xiaoyan,DUAN Ji'an.Beam shaping technologies for efficiency laser fabrication[J].Laser&Optoelectrionics Progress,2012,49(10):10000.(in Chinese)夏国才,孙小燕,段吉安.用于实现激光高效率加工的光束整形技术[J].激光与光电子学进展,2012,49(10):100002.
[17]CHEN Lei.Research and fabrication of waveguide in sapphire with femtosecond laser pulses[D].Changchun:Jilin University,2009.(in Chinese)陈磊.利用飞秒激光在蓝宝石内制备光波导的研究[D].长春:吉林大学,2009.
[18]Haruna M,Segawa Y,Nishihara H.Nondestructive and simple method of optical waveguide loss measurment with optimization of end-fire coupling[J].Electronics Letters,1992,28(17):911-912.