基于多齿谐振光栅的偏振无关宽带反射镜的研究
|
摘要
主要探讨了一种基于多层多齿谐振光栅结构的高性能偏振无关反射镜。得益于TE和TM偏振光泄漏模谐振的共存及相互作用,该器件在1.65~1.72μm较宽的频谱范围内具有反射率大于97%、角度带宽约为24.6°、插入损耗小于0.25dB、偏振相关损耗小于0.18dB的优越性能。通过严格耦合波分析方法验证了此器件在现有工艺误差范围内具有较好的工艺容差性。
A high-performance polarization independent reflector based on a multilayered grating structure with multi-subpart profile is discussed.Owing to the advantages of co-existence and interaction of TE polarization light and TM polarization light leaky modes,the proposed reflector can offer combined merits of high reflectivity(over97%),wide angular bandwidth(about 24.6°),low insertion loss(below 0.25dB)and low polarization dependent loss(below 0.18dB)over a broadband spectrum of 1.65-1.72μm.The rigorous coupled wave analysis method is used to verify the good process tolerance of the reflector in the existing process error range.
A high-performance polarization independent reflector based on a multilayered grating structure with multi-subpart profile is discussed.Owing to the advantages of co-existence and interaction of TE polarization light and TM polarization light leaky modes,the proposed reflector can offer combined merits of high reflectivity(over97%),wide angular bandwidth(about 24.6°),low insertion loss(below 0.25dB)and low polarization dependent loss(below 0.18dB)over a broadband spectrum of 1.65-1.72μm.The rigorous coupled wave analysis method is used to verify the good process tolerance of the reflector in the existing process error range.
引文
[1]Ma Linfei,Xiao Wenbo,Wu Huaming,et al.A dual-function polarization-selective beam splitter based on a subwavelength multi-subpart profile grating structure[J].Applied Physics,2016,6(9):193-203.马林飞,肖文波,吴华明,等.基于亚波长多齿光栅结构的双功能偏振选择分束器的研究[J].应用物理,2016,6(9):193-203.
[2]Wang Zhiwen,Chu Jinkui,Wang Qianyi.Transmission analysis of single layer sub-wavelength metal gratings[J].Acta Optica Sinica,2015,35(7):0705002.王志文,褚金奎,王倩怡.单层亚波长金属光栅偏振器透射机理研究[J].光学学报,2015,35(7):0705002.
[3]Popov E,Hoose J,Frankel B,et al.Low polarization dependent diffraction grating for wavelength demultimlexing[J].Optics Express,2004,12(2):269-275.
[4]Shokooh-Saremi M,Magnusson R.New nonpolarizing resonant beam splitters[J].IEEE Photonics Journal,2010,2(4):670-676.
[5]Magnusson R,Shokooh-Saremi M,Johnson E G.Guided-mode resonant wave plates[J].Optics Letters,2010,35(14):2472-2474.
[6]Peters D W,Boye R R,Wendt J R,et al.Demonstration of polarization-independent resonant subwavelength grating filter arrays[J].Optics Letters,2010,35(19):3201-3203.
[7]Chen X,Tsang H K.Polarization-independent grating couplers for silicon-on-insulator nanophotonic[J].Optics Letters,2011,36(6):796-798.
[8]Shao S Q,Wang Y.Highly compact polarization-independent grating coupler[J].Optics Letters,2010,35(11):1834-1836.
[9]Wu D,Sui Xin,Yang J,et al.Binary blazed grating-based polarization-independent filter on silicon on insulator[J].Frontiers of Optoelectronics,2011,5(1):78-81.
[10]Zhang R,Wang Y F,Zheng W H,et al.Broadband and polarization-insensitive subwavelength grating reflector for the near-infrared region[J].Chinese Optics Letters,2014,12(2):020502.
[11]Liu L,Deng Q,Zhou Z.Subwavelength-grating-assisted broadband polarization-independent directional coupler[J].Optics Letters,2016,41(7):1648-1651.
[12]Momeni B,Yegnanarayanan S,Soltani M,et al.Silicon nanophotonic devices for integrated sensing[J].Journal of Nanophotonics,2009,3(1):031001.
[13]Bogaerts W,Baets R,Dumon P,et al.Nanophotonic waveguides in silicon-on-insulator fabricated with CMOStechnology[J].Journal of Lightwave Technology,2005,23(1):401-412.
[14]Wu H,Huang L,Xiao Y,et al.A wideband reflector realized by a subwavelength multi-subpart profile grating structure[J].Journal of Optics,2013,15(3):035703.
[15]Lee W,Degertekin F L.Rigorous coupled-wave analysis for multilayered grating structures[C].SPIE,2003,4987:264-273.
[16]Lee W,Degertekin F L.Rigorous coupled-wave analysis of multilayered grating structures[J].Journal of Lightwave Technology,2004,22(10):2359-2363.
[17]Shokooh-Saremi M,Magnusson R.Particle swarm optimization and its application to the design of diffraction grating filters[J].Optics Letters,2007,32(8):894-896.
[18]Wu Huaming,Xu Huanhuan,Ma Linfei,et al.A high efficient reflector utilized by a subwavelength multi-subpart profile grating structure[J].Applied Physics,2016,6(8):167-174.吴华明,徐欢欢,马林飞,等.宽带多齿谐振光栅反射镜的研究[J].应用物理,2016,6(8):167-174.
[19]Feng Junbo.Compact SOI grating coupler and the fabrication technology[D].Wuhan:Huazhong University of Science and Technology,2009:58-88.冯俊波.硅基微纳光栅耦合器件及其制备技术研究[D].武汉:华中科技大学,2009:58-88.
[20]Ding Y,Magnusson R.Band gaps and leaky-wave effects in resonant photonic-crystal waveguides[J].Optics Express,2007,15(2):680-694.
[21]Shokooh-Saremi M,Magnusson R.Wideband leaky-mode resonance reflectors:influence of grating profile and sublayers[J].Optics Express,2008,16(22):18249-18263.
[22]Wu H,Mo W,Hou J,et al.Polarizing beam splitter based on a subwavelength asymmetric profile grating[J].Journal of Optics,2010,12(1):015703.
[23]Huang L,Liang D,Zeng J,et al.SOI-based high performance multi-subpart profile grating mirror[J].Optics&Laser Technology,2016,78:1-4.
[2]Wang Zhiwen,Chu Jinkui,Wang Qianyi.Transmission analysis of single layer sub-wavelength metal gratings[J].Acta Optica Sinica,2015,35(7):0705002.王志文,褚金奎,王倩怡.单层亚波长金属光栅偏振器透射机理研究[J].光学学报,2015,35(7):0705002.
[3]Popov E,Hoose J,Frankel B,et al.Low polarization dependent diffraction grating for wavelength demultimlexing[J].Optics Express,2004,12(2):269-275.
[4]Shokooh-Saremi M,Magnusson R.New nonpolarizing resonant beam splitters[J].IEEE Photonics Journal,2010,2(4):670-676.
[5]Magnusson R,Shokooh-Saremi M,Johnson E G.Guided-mode resonant wave plates[J].Optics Letters,2010,35(14):2472-2474.
[6]Peters D W,Boye R R,Wendt J R,et al.Demonstration of polarization-independent resonant subwavelength grating filter arrays[J].Optics Letters,2010,35(19):3201-3203.
[7]Chen X,Tsang H K.Polarization-independent grating couplers for silicon-on-insulator nanophotonic[J].Optics Letters,2011,36(6):796-798.
[8]Shao S Q,Wang Y.Highly compact polarization-independent grating coupler[J].Optics Letters,2010,35(11):1834-1836.
[9]Wu D,Sui Xin,Yang J,et al.Binary blazed grating-based polarization-independent filter on silicon on insulator[J].Frontiers of Optoelectronics,2011,5(1):78-81.
[10]Zhang R,Wang Y F,Zheng W H,et al.Broadband and polarization-insensitive subwavelength grating reflector for the near-infrared region[J].Chinese Optics Letters,2014,12(2):020502.
[11]Liu L,Deng Q,Zhou Z.Subwavelength-grating-assisted broadband polarization-independent directional coupler[J].Optics Letters,2016,41(7):1648-1651.
[12]Momeni B,Yegnanarayanan S,Soltani M,et al.Silicon nanophotonic devices for integrated sensing[J].Journal of Nanophotonics,2009,3(1):031001.
[13]Bogaerts W,Baets R,Dumon P,et al.Nanophotonic waveguides in silicon-on-insulator fabricated with CMOStechnology[J].Journal of Lightwave Technology,2005,23(1):401-412.
[14]Wu H,Huang L,Xiao Y,et al.A wideband reflector realized by a subwavelength multi-subpart profile grating structure[J].Journal of Optics,2013,15(3):035703.
[15]Lee W,Degertekin F L.Rigorous coupled-wave analysis for multilayered grating structures[C].SPIE,2003,4987:264-273.
[16]Lee W,Degertekin F L.Rigorous coupled-wave analysis of multilayered grating structures[J].Journal of Lightwave Technology,2004,22(10):2359-2363.
[17]Shokooh-Saremi M,Magnusson R.Particle swarm optimization and its application to the design of diffraction grating filters[J].Optics Letters,2007,32(8):894-896.
[18]Wu Huaming,Xu Huanhuan,Ma Linfei,et al.A high efficient reflector utilized by a subwavelength multi-subpart profile grating structure[J].Applied Physics,2016,6(8):167-174.吴华明,徐欢欢,马林飞,等.宽带多齿谐振光栅反射镜的研究[J].应用物理,2016,6(8):167-174.
[19]Feng Junbo.Compact SOI grating coupler and the fabrication technology[D].Wuhan:Huazhong University of Science and Technology,2009:58-88.冯俊波.硅基微纳光栅耦合器件及其制备技术研究[D].武汉:华中科技大学,2009:58-88.
[20]Ding Y,Magnusson R.Band gaps and leaky-wave effects in resonant photonic-crystal waveguides[J].Optics Express,2007,15(2):680-694.
[21]Shokooh-Saremi M,Magnusson R.Wideband leaky-mode resonance reflectors:influence of grating profile and sublayers[J].Optics Express,2008,16(22):18249-18263.
[22]Wu H,Mo W,Hou J,et al.Polarizing beam splitter based on a subwavelength asymmetric profile grating[J].Journal of Optics,2010,12(1):015703.
[23]Huang L,Liang D,Zeng J,et al.SOI-based high performance multi-subpart profile grating mirror[J].Optics&Laser Technology,2016,78:1-4.