功率增强型光声光谱气体传感技术的研究进展
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摘要
光声光谱(PAS)技术是痕量气体传感领域内十分重要的探测技术,科研人员正致力于提升光声光谱气体传感技术的性能,以满足不同的应用需求,其中通过增强激发光功率来提升探测灵敏度是当前行业内的研究热点,并已取得了许多突破性进展。介绍了这一重要领域的研究现状,总结了各类技术手段的工作原理、技术特点以及最新研究成果,并对其发展趋势进行了分析。
Photoacoutic spectroscopy(PAS)plays an important role in trace gas sensing.Researchers are focusing on improving the performance of PAS-based gas sensors to satisfy different applications.As a promising way to promote the detection sensitivity,power-enhanced PAS has attracted increasing attention in this field with many breakthroughs.This article aims to discuss the status of this important research field,starts from classifying the most used and different technologies to summarizing the fundamental,technical characteristics and current achievements,towards a reasonable development tendency analysis.
Photoacoutic spectroscopy(PAS)plays an important role in trace gas sensing.Researchers are focusing on improving the performance of PAS-based gas sensors to satisfy different applications.As a promising way to promote the detection sensitivity,power-enhanced PAS has attracted increasing attention in this field with many breakthroughs.This article aims to discuss the status of this important research field,starts from classifying the most used and different technologies to summarizing the fundamental,technical characteristics and current achievements,towards a reasonable development tendency analysis.
引文
[1]Hodgkinson J,Tatam R P.Optical gas sensing:a review[J].Measurement Science and Technology,2012,24(1):012004.
[2]Akimoto H.Global air quality and pollution[J].Science,2003,302(5651):1716-1719.
[3]Liu Q W,Wang X B,Chen Y F,et al.Detection of atmospheric NO2 concentration by differential absorption lidar based on dye lasers[J].Acta Optica Sinica,2017,37(4):0428004.刘秋武,王晓宾,陈亚峰,等.基于染料激光器的差分吸收激光雷达探测大气NO2浓度[J].光学学报,2017,37(4):0428004.
[4]Wang Q,Chang J,Wei W,et al.Dual-beam wavelength modulation spectroscopy for sensitive detection of water vapor[J].Applied Physics B,2014,117(4):1015-1023.
[5]Wang Z,Wang Q,Ching J Y L,et al.A portable low-power QEPAS-based CO2isotope sensor using a fiber-coupled interband cascade laser[J].Sensors and Actuators B:Chemical,2017,246:710-715.
[6]Chen Y,Gao G Z,Cai T D.Detection technique of ethylene based on photoacoustic spectroscopy[J].Chinese Journal of Lasers,2017,44(5):0511001.陈颖,高光珍,蔡廷栋.基于光声光谱的乙烯探测技术[J].中国激光,2017,44(5):0511001.
[7]Bozóki Z,Pogány A,SzabóG.Photoacoustic instruments for practical applications:present,potentials,and future challenges[J].Applied Spectroscopy Reviews,2011,46(1):1-37.
[8]Elia A,LugaràP M,Franco C D,et al.Photoacoustic techniques for trace gas sensing based on semiconductor laser sources[J].Sensors,2009,9(12):9616-9628.
[9]Tan Y,Zhang C,Jin W,et al.Optical fiber photoacoustic gas sensor with graphene nanomechanical resonator as the acoustic detector[J].IEEE Journal of Selected Topics in Quantum Electronics,2017,23(2):199-209.
[10]Kosterev A A,Tittel F K,Serebryakov D V,et al.Applications of quartz tuning forks in spectroscopic gas sensing[J].Review of Scientific Instruments,2005,76(4):043105.
[11]Liu X,Jeffries J B,Hanson R K.Measurements of spectral parameters of water-vapour transitions near1388and 1345nm for accurate simulation of highpressure absorption spectra[J].Measurement Science and Technology,2007,18(5):1185-1194.
[12]Dumitras D C,Dutu D C,Matei C,et al.Laser photoacoustic spectroscopy:principles,instrumentation,and characterization[J].Journal of Optoelectronics and Advanced Materials,2007,9(12):3655-3701.
[13]Viengerov M L.New method of gas analysis based on Tyndall-Roentgen optoacoustic effect[J].Doklady Akademii Nauk SSSR,1938,19:687-688.
[14]Pilgrim J,Bomse D S.Diode pumped solid state laser photoacoustic spectrometer[C].OSA Advanced Solid State Lasers,Washington,USA,2001:ME4.
[15]Ivascu I R,Matei C E,Patachia M,etal.CO2laser photoacoustic measurements of ethanol absorption coefficients within infrared region of 9.2-10.8μm[J].Spectrochimica Acta Part A:Molecular and Biomolecular Spectroscopy,2016,163:115-119.
[16]Liu K,Zhao W,Wang L,et al.Quartz-enhanced photoacoustic spectroscopy of HCN from 6433to6613cm-1[J].Optics Communications,2015,340:126-130.
[17]Mordmüller M,K9hring M,Schade W,et al.An electrically and optically cooperated QEPAS device for highly integrated gas sensors[J].Applied Physics B,2015,119(1):111-118.
[18]Wang Q,Chang J,Wang F P,et al.Recovery of pure wavelength modulation second harmonic signal waveforms in distributed feedback diode laser-based photoacoustic spectroscopy[J].Sensors and Actuators A:Physical,2016,245:54-62.
[19]Wu H,Dong L,Liu X,et al.Fiber-amplifierenhanced QEPAS sensor for simultaneous trace gas detection of NH3 and H2S[J].Sensors,2015,15(10):26743-26755.
[20]Ma Y,He Y,Tong Y,et al.Ppb-level detection of ammonia based on QEPAS using apower amplified laser and a low resonance frequency quartz tuning fork[J].Optics Express,2017,25(23):29356-29364.
[21]Wu H P.Research on new quartz enhanced photoacoustic spectroscopy[D].Taiyuan:Shanxi University,2017.武红鹏.新型石英增强光声光谱技术研究[D].太原:山西大学,2017
[22]Webber M E,Pushkarsky M,Patel C K.Fiberamplifier-enhanced photoacoustic spectroscopy with near-infrared tunable diode lasers[J].Applied Optics,2003,42(12):2119-2126.
[23]Wu H,Dong L,Zheng H,et al.Enhanced nearinfrared QEPAS sensor for sub-ppm level H2Sdetection by means of a fiber amplified 1582nm DFBlaser[J].Sensors and Actuators B:Chemical,2015,221:666-672.
[24]Ma Y,He Y,Yu X,et al.Compact all-fiber quartzenhanced photoacoustic spectroscopy sensor with a30.72kHz quartz tuning fork and spatially resolved trace gas detection[J].Applied Physics Letters,2016,108(9):091115.
[25]Chen K,Gong Z,Yu Q.Fiber-amplifier-enhanced resonant photoacoustic sensor for sub-ppb level acetylene detection[J].Sensors and Actuators A:Physical,2018,274:184-188.
[26]Rey J M,Marinov D,Vogler D E,et al.Investigation and optimization of a multipass resonant photoacoustic cell at high absorption levels[J].Applied Physics B,2005,80(2):261-266.
[27]Song K,Oh S,Jung E C,et al.Application of laser photoacoustic spectroscopy for the detection of water vapor near 1.38μm[J].Microchemical Journal,2005,80(2):113-119.
[28]Miklós A,Hess P,Bozóki Z.Application of acoustic resonators in photoacoustic trace gas analysis and metrology[J].Review of Scientific Instruments,2001,72(4):1937-1955.
[29]Yin X,Dong L,Wu H,et al.Sub-ppb nitrogen dioxide detection with a large linear dynamic range by use of a differential photoacoustic cell and a 3.5 Wblue multimode diode laser[J].Sensors and Actuators B:Chemical,2017,247:329-335.
[30]Hao L,Qiang S,Wu G,et al.Cylindrical mirror multipass Lissajous system for laser photoacoustic spectroscopy[J].Review of Scientific Instruments,2002,73(5):2079-2085.
[31]Gagliardi G.Cavity-enhanced spectroscopy and sensing[M].[S.l.]:Springer,2016.
[32]Rossi A,Buffa R,Scotoni M,et al.Optical enhancement of diode laser-photoacoustic trace gas detection by means of external Fabry-Perot cavity[J].Applied Physics Letters,2005,87(4):041110.
[33]Hippler M,Mohr C,Keen K A,et al.Cavityenhanced resonant photoacoustic spectroscopy with optical feedback cw diode lasers:a novel technique for ultratrace gas analysis and high-resolution spectroscopy[J].The Journal of Chemical Physics,2010,133(4):044308.
[34]Kachanov A,Koulikov S.Method and apparatus for the photo-acoustic identification and quantification of analyte species in a gaseous or liquid medium:US8327686[P].2012-12-11.
[35]Kachanov A,Koulikov S,Tittel F K.Cavityenhanced optical feedback-assisted photo-acoustic spectroscopy with a 10.4μm external cavity quantum cascade laser[J].Applied Physics B,2012,110(1):47-56.
[36]Kosterev A A,Bakhirkin Y A,Curl R F,et al.Quartz-enhanced photoacoustic spectroscopy[J].Optics Letters,2002,27(21):1902-1904.
[37]Borri S,Patimisco P,Galli I,et al.Intracavity quartz-enhanced photoacoustic sensor[J].Applied Physics Letters,2014,104(9):091114.
[38]Patimisco P,Borri S,Galli I,et al.High finesse optical cavity coupled with a quartz-enhanced photoacoustic spectroscopic sensor[J].Analyst,2015,140(3):736-743.
[39]Wojtas J,Gluszek A,Hudzikowski A,etal.Midinfrared trace gas sensor technology based on intracavity quartz-enhanced photoacoustic spectroscopy[J].Sensors,2017,17(3):513.
[40]R9per J,Chen G,Hess P.Intracavity photoacoustic resonance spectroscopy of C2H4[J].Applied Physics B,1987,43(1):57-59.
[41]Harren F J M,Bijnen F G C,Reuss J,et al.Sensitive intracavity photoacoustic measurements with a CO2 waveguide laser[J].Applied Physics B,1990,50(2):137-144.
[42]Groot T T.Trace gas exchange by rice,soil and pears:a study based on laser photoacoustic detection[D].Nijmegen:Katholieke Universiteit Nijmegen,2002.
[43]Starovoitov V S,Trushin S A.Highly sensitive 13 C16O2-laser photoacoustic detection of ammonia,phosphine and arsine in air[J].Pure and Applied Optics:Journal of the European Optical Society Part A,1993,2(5):505-514.
[44]Bozóki Z,Sneider J,SzabóG,et al.Intracavity photoacoustic gas detection with an external cavity diode laser[J].Applied Physics B,1996,63(4):399-401.
[45]Starovoitov V S,Kischkat J F,Semtsiv M P,et al.Intracavity photoacoustic sensing of water vapor with a continuously tunable external-cavity quantumcascade laser operating near 5.5μm[J].Optics Letters,2016,41(21):4955-4958.
[46]Wang Q,Wang Z,Chang J,et al.Fiber-ring laserbased intracavity photoacoustic spectroscopy for trace gas sensing[J].Optics Letters,2017,42(11):2114-2117.
[47]Pei L,Weng S J,Wu L Y,et al.Progress in optical fiber laser sensing system[J].Chinese Journal of Lasers,2016,43(7):0700001.裴丽,翁思俊,吴良英,等.光纤激光传感系统的研究进展[J].中国激光,2016,43(7):0700001.
[48]Shi J,Wang Y,Xu D,et al.Temperature sensor based on fiber ring laser with Sagnac loop[J].IEEEPhotonics Technology Letters,2016,28(7):794-797.
[49]Liu Z,Tan Z,Yin B,et al.Refractive index sensing characterization of a singlemode-claddinglesssinglemode fiber structure based fiber ring cavity laser[J].Optics Express,2014,22(5):5037-5042.
[50]Meng Q,Dong X,Ni K,et al.Optical fiber laser salinity sensor based on multimode interference effect[J].IEEE Sensors Journal,2014,14(6):1813-1816.
[51]Peng Y,Zhang W,Li L,et al.Tunable fiber laser and fiber amplifier based photoacoustic spectrometer for trace gas detection[J].Spectrochimica Acta Part A:Molecular and Biomolecular Spectroscopy,2009,74(4):924-927.
[52]Fomin A,Zavlev T,Rahinov I,et al.A fiber laser intracavity absorption spectroscopy(FLICAS)sensor for simultaneous measurement of CO and CO2concentrations and temperature[J].Sensors and Actuators B:Chemical,2015,210:431-438.
[53]Liu K,Liu T,Yu L,et al.Investigation of gas detection based on fiber laser intracavity absorption spectroscopy[C].Optoelectronics Global Conference(OGC),2015:1-4.
[54]Yu L,Liu T,Liu K,et al.Intracavity multigas detection based on multiband fiber ring laser[J].Sensors and Actuators B:Chemical,2016,226:170-175.
[55]Wang Q,Wang Z,Ren W.Theoretical and experimental investigation of fiber-ring laser intracavity photoacoustic spectroscopy(FLI-PAS)for acetylene detection[J].Journal of Lightwave Technology,2017,35(20):4519-4525.
[56]Fjodorow P,Hellmig O,Baev V M,et al.Intracavity absorption spectroscopy of formaldehyde from 6230to 6420cm-1[J].Applied Physics B,2017,123(5):147.
[57]Zhou B K,Gao Y Z,Chen T R,et al.Principles of lasers[M].Beijing:National Defense Industry Press,2000.
[58]Chesnoy J.Undersea fiber communication systems[M].San Diego:Academic Press,2015.
[59]Rothman L S,Gordon I E,Babikov Y,et al.The HITRAN2012molecular spectroscopic database[J].Journal of Quantitative Spectroscopy and Radiative Transfer,2013,130(11):4-50.
[60]Liu K,Liu T G,Peng G D,et al.Theoretical investigation of an optical fiber amplifier loop for intra-cavity and ring-down cavity gas sensing[J].Sensors and Actuators B:Chemical,2010,146(1):116-121.
[61]Zhang Y,Zhang M,Jin W,et al.Investigation of erbium-doped fiber laser intra-cavity absorption sensor for gas detection[J].Optics Communications,2004,232(1/2/3/4/5/6):295-301.
[62]Zhao Y,Chang J,Wang Q,et al.Research on a novel composite structure Er3+-doped DBR fiber laser with aπ-phase shifted FBG[J].Optics Express,2013,21(19):22515-22522.
[63]Delgado-Pinar M,Zalvidea D,Diez A,etal.Q-switching of an all-fiber laser by acousto-optic modulation of a fiber Bragg grating[J].Optics Express,2006,14(3):1106-1112.
[64]Zhang Q D,Chang J,Wang Q,et al.Acousto-optic Q-switched fiber laser-based intra-cavity photoacoustic spectroscopy for trace gas detection[J].Sensors,2017,18(1):E42.
[65]Schilt S,Thévenaz L,Niklès M,et al.Ammonia monitoring at trace level using photoacoustic spectroscopy in industrial and environmental applications[J].Spectrochimica Acta Part A:Molecular and Biomolecular Spectroscopy,2004,60(14):3259-3268.
[66]Besson J P,Schilt S,Rochat E,et al.Ammonia trace measurements at ppb level based on near-IRphotoacoustic spectroscopy[J].Applied Physics B,2006,85(2/3):323-328.
[67]Haisch C,Menzenbach P,Bladt H,etal.A wide spectral range photoacoustic aerosol absorption spectrometer[J].Analytical Chemistry,2012,84(21):8941-8945.
[68]Patimisco P,Sampaolo A,Dong L,et al.Recent advances in quartz enhanced photoacoustic sensing[J].Applied Physics Reviews,2018,5(1):011106.
[69]Patimisco P,Sampaolo A,Dong L,et al.Analysis of the electro-elastic properties of custom quartz tuning forks for optoacoustic gas sensing[J].Sensors and Actuators B:Chemical,2016,227:539-546.
[70]Borri S,Patimisco P,Sampaolo A,et al.Terahertz quartz enhanced photo-acoustic sensor[J].Applied Physics Letters,2013,103(2):021105.
[71]Wang Q Y.Study of optical fiber Fabry-Perot acoustic wave sensor and its application[D].Dalian:Dalian University of Technology,2010.王巧云.光纤法布里-珀罗声波传感器及其应用研究[D].大连:大连理工大学,2010.
[72]Zhou S,Slaman M,Iannuzzi D.Demonstration of a highly sensitive photoacoustic spectrometer based on a miniaturized all-optical detecting sensor[J].Optics Express,2017,25(15):17541-17548.
[73]K9hring M,Willer U,B9ttger S,et al.Fibercoupled ozone sensor based on tuning fork-enhanced interferometric photoacoustic spectroscopy[J].IEEEJournal of Selected Topics in Quantum Electronics,2012,18(5):1566-1572.
[74]Cao Y,Jin W,Ho H L,et al.Miniature fiber-tip photoacoustic spectrometer for trace gas detection[J].Optics Letters,2013,38(4):434-436.
[75]Liu B,Lin J,Liu H,et al.Extrinsic Fabry-Perot fiber acoustic pressure sensor based on large-area silver diaphragm[J].Microelectronic Engineering,2016,166:50-54.
[76]Ma J,Xuan H,Ho H L,et al.Fiber-optic FabryPerot acoustic sensor with multilayer graphene diaphragm[J].IEEE Photonics Technology Letters,2013,25(10):932-935.
[2]Akimoto H.Global air quality and pollution[J].Science,2003,302(5651):1716-1719.
[3]Liu Q W,Wang X B,Chen Y F,et al.Detection of atmospheric NO2 concentration by differential absorption lidar based on dye lasers[J].Acta Optica Sinica,2017,37(4):0428004.刘秋武,王晓宾,陈亚峰,等.基于染料激光器的差分吸收激光雷达探测大气NO2浓度[J].光学学报,2017,37(4):0428004.
[4]Wang Q,Chang J,Wei W,et al.Dual-beam wavelength modulation spectroscopy for sensitive detection of water vapor[J].Applied Physics B,2014,117(4):1015-1023.
[5]Wang Z,Wang Q,Ching J Y L,et al.A portable low-power QEPAS-based CO2isotope sensor using a fiber-coupled interband cascade laser[J].Sensors and Actuators B:Chemical,2017,246:710-715.
[6]Chen Y,Gao G Z,Cai T D.Detection technique of ethylene based on photoacoustic spectroscopy[J].Chinese Journal of Lasers,2017,44(5):0511001.陈颖,高光珍,蔡廷栋.基于光声光谱的乙烯探测技术[J].中国激光,2017,44(5):0511001.
[7]Bozóki Z,Pogány A,SzabóG.Photoacoustic instruments for practical applications:present,potentials,and future challenges[J].Applied Spectroscopy Reviews,2011,46(1):1-37.
[8]Elia A,LugaràP M,Franco C D,et al.Photoacoustic techniques for trace gas sensing based on semiconductor laser sources[J].Sensors,2009,9(12):9616-9628.
[9]Tan Y,Zhang C,Jin W,et al.Optical fiber photoacoustic gas sensor with graphene nanomechanical resonator as the acoustic detector[J].IEEE Journal of Selected Topics in Quantum Electronics,2017,23(2):199-209.
[10]Kosterev A A,Tittel F K,Serebryakov D V,et al.Applications of quartz tuning forks in spectroscopic gas sensing[J].Review of Scientific Instruments,2005,76(4):043105.
[11]Liu X,Jeffries J B,Hanson R K.Measurements of spectral parameters of water-vapour transitions near1388and 1345nm for accurate simulation of highpressure absorption spectra[J].Measurement Science and Technology,2007,18(5):1185-1194.
[12]Dumitras D C,Dutu D C,Matei C,et al.Laser photoacoustic spectroscopy:principles,instrumentation,and characterization[J].Journal of Optoelectronics and Advanced Materials,2007,9(12):3655-3701.
[13]Viengerov M L.New method of gas analysis based on Tyndall-Roentgen optoacoustic effect[J].Doklady Akademii Nauk SSSR,1938,19:687-688.
[14]Pilgrim J,Bomse D S.Diode pumped solid state laser photoacoustic spectrometer[C].OSA Advanced Solid State Lasers,Washington,USA,2001:ME4.
[15]Ivascu I R,Matei C E,Patachia M,etal.CO2laser photoacoustic measurements of ethanol absorption coefficients within infrared region of 9.2-10.8μm[J].Spectrochimica Acta Part A:Molecular and Biomolecular Spectroscopy,2016,163:115-119.
[16]Liu K,Zhao W,Wang L,et al.Quartz-enhanced photoacoustic spectroscopy of HCN from 6433to6613cm-1[J].Optics Communications,2015,340:126-130.
[17]Mordmüller M,K9hring M,Schade W,et al.An electrically and optically cooperated QEPAS device for highly integrated gas sensors[J].Applied Physics B,2015,119(1):111-118.
[18]Wang Q,Chang J,Wang F P,et al.Recovery of pure wavelength modulation second harmonic signal waveforms in distributed feedback diode laser-based photoacoustic spectroscopy[J].Sensors and Actuators A:Physical,2016,245:54-62.
[19]Wu H,Dong L,Liu X,et al.Fiber-amplifierenhanced QEPAS sensor for simultaneous trace gas detection of NH3 and H2S[J].Sensors,2015,15(10):26743-26755.
[20]Ma Y,He Y,Tong Y,et al.Ppb-level detection of ammonia based on QEPAS using apower amplified laser and a low resonance frequency quartz tuning fork[J].Optics Express,2017,25(23):29356-29364.
[21]Wu H P.Research on new quartz enhanced photoacoustic spectroscopy[D].Taiyuan:Shanxi University,2017.武红鹏.新型石英增强光声光谱技术研究[D].太原:山西大学,2017
[22]Webber M E,Pushkarsky M,Patel C K.Fiberamplifier-enhanced photoacoustic spectroscopy with near-infrared tunable diode lasers[J].Applied Optics,2003,42(12):2119-2126.
[23]Wu H,Dong L,Zheng H,et al.Enhanced nearinfrared QEPAS sensor for sub-ppm level H2Sdetection by means of a fiber amplified 1582nm DFBlaser[J].Sensors and Actuators B:Chemical,2015,221:666-672.
[24]Ma Y,He Y,Yu X,et al.Compact all-fiber quartzenhanced photoacoustic spectroscopy sensor with a30.72kHz quartz tuning fork and spatially resolved trace gas detection[J].Applied Physics Letters,2016,108(9):091115.
[25]Chen K,Gong Z,Yu Q.Fiber-amplifier-enhanced resonant photoacoustic sensor for sub-ppb level acetylene detection[J].Sensors and Actuators A:Physical,2018,274:184-188.
[26]Rey J M,Marinov D,Vogler D E,et al.Investigation and optimization of a multipass resonant photoacoustic cell at high absorption levels[J].Applied Physics B,2005,80(2):261-266.
[27]Song K,Oh S,Jung E C,et al.Application of laser photoacoustic spectroscopy for the detection of water vapor near 1.38μm[J].Microchemical Journal,2005,80(2):113-119.
[28]Miklós A,Hess P,Bozóki Z.Application of acoustic resonators in photoacoustic trace gas analysis and metrology[J].Review of Scientific Instruments,2001,72(4):1937-1955.
[29]Yin X,Dong L,Wu H,et al.Sub-ppb nitrogen dioxide detection with a large linear dynamic range by use of a differential photoacoustic cell and a 3.5 Wblue multimode diode laser[J].Sensors and Actuators B:Chemical,2017,247:329-335.
[30]Hao L,Qiang S,Wu G,et al.Cylindrical mirror multipass Lissajous system for laser photoacoustic spectroscopy[J].Review of Scientific Instruments,2002,73(5):2079-2085.
[31]Gagliardi G.Cavity-enhanced spectroscopy and sensing[M].[S.l.]:Springer,2016.
[32]Rossi A,Buffa R,Scotoni M,et al.Optical enhancement of diode laser-photoacoustic trace gas detection by means of external Fabry-Perot cavity[J].Applied Physics Letters,2005,87(4):041110.
[33]Hippler M,Mohr C,Keen K A,et al.Cavityenhanced resonant photoacoustic spectroscopy with optical feedback cw diode lasers:a novel technique for ultratrace gas analysis and high-resolution spectroscopy[J].The Journal of Chemical Physics,2010,133(4):044308.
[34]Kachanov A,Koulikov S.Method and apparatus for the photo-acoustic identification and quantification of analyte species in a gaseous or liquid medium:US8327686[P].2012-12-11.
[35]Kachanov A,Koulikov S,Tittel F K.Cavityenhanced optical feedback-assisted photo-acoustic spectroscopy with a 10.4μm external cavity quantum cascade laser[J].Applied Physics B,2012,110(1):47-56.
[36]Kosterev A A,Bakhirkin Y A,Curl R F,et al.Quartz-enhanced photoacoustic spectroscopy[J].Optics Letters,2002,27(21):1902-1904.
[37]Borri S,Patimisco P,Galli I,et al.Intracavity quartz-enhanced photoacoustic sensor[J].Applied Physics Letters,2014,104(9):091114.
[38]Patimisco P,Borri S,Galli I,et al.High finesse optical cavity coupled with a quartz-enhanced photoacoustic spectroscopic sensor[J].Analyst,2015,140(3):736-743.
[39]Wojtas J,Gluszek A,Hudzikowski A,etal.Midinfrared trace gas sensor technology based on intracavity quartz-enhanced photoacoustic spectroscopy[J].Sensors,2017,17(3):513.
[40]R9per J,Chen G,Hess P.Intracavity photoacoustic resonance spectroscopy of C2H4[J].Applied Physics B,1987,43(1):57-59.
[41]Harren F J M,Bijnen F G C,Reuss J,et al.Sensitive intracavity photoacoustic measurements with a CO2 waveguide laser[J].Applied Physics B,1990,50(2):137-144.
[42]Groot T T.Trace gas exchange by rice,soil and pears:a study based on laser photoacoustic detection[D].Nijmegen:Katholieke Universiteit Nijmegen,2002.
[43]Starovoitov V S,Trushin S A.Highly sensitive 13 C16O2-laser photoacoustic detection of ammonia,phosphine and arsine in air[J].Pure and Applied Optics:Journal of the European Optical Society Part A,1993,2(5):505-514.
[44]Bozóki Z,Sneider J,SzabóG,et al.Intracavity photoacoustic gas detection with an external cavity diode laser[J].Applied Physics B,1996,63(4):399-401.
[45]Starovoitov V S,Kischkat J F,Semtsiv M P,et al.Intracavity photoacoustic sensing of water vapor with a continuously tunable external-cavity quantumcascade laser operating near 5.5μm[J].Optics Letters,2016,41(21):4955-4958.
[46]Wang Q,Wang Z,Chang J,et al.Fiber-ring laserbased intracavity photoacoustic spectroscopy for trace gas sensing[J].Optics Letters,2017,42(11):2114-2117.
[47]Pei L,Weng S J,Wu L Y,et al.Progress in optical fiber laser sensing system[J].Chinese Journal of Lasers,2016,43(7):0700001.裴丽,翁思俊,吴良英,等.光纤激光传感系统的研究进展[J].中国激光,2016,43(7):0700001.
[48]Shi J,Wang Y,Xu D,et al.Temperature sensor based on fiber ring laser with Sagnac loop[J].IEEEPhotonics Technology Letters,2016,28(7):794-797.
[49]Liu Z,Tan Z,Yin B,et al.Refractive index sensing characterization of a singlemode-claddinglesssinglemode fiber structure based fiber ring cavity laser[J].Optics Express,2014,22(5):5037-5042.
[50]Meng Q,Dong X,Ni K,et al.Optical fiber laser salinity sensor based on multimode interference effect[J].IEEE Sensors Journal,2014,14(6):1813-1816.
[51]Peng Y,Zhang W,Li L,et al.Tunable fiber laser and fiber amplifier based photoacoustic spectrometer for trace gas detection[J].Spectrochimica Acta Part A:Molecular and Biomolecular Spectroscopy,2009,74(4):924-927.
[52]Fomin A,Zavlev T,Rahinov I,et al.A fiber laser intracavity absorption spectroscopy(FLICAS)sensor for simultaneous measurement of CO and CO2concentrations and temperature[J].Sensors and Actuators B:Chemical,2015,210:431-438.
[53]Liu K,Liu T,Yu L,et al.Investigation of gas detection based on fiber laser intracavity absorption spectroscopy[C].Optoelectronics Global Conference(OGC),2015:1-4.
[54]Yu L,Liu T,Liu K,et al.Intracavity multigas detection based on multiband fiber ring laser[J].Sensors and Actuators B:Chemical,2016,226:170-175.
[55]Wang Q,Wang Z,Ren W.Theoretical and experimental investigation of fiber-ring laser intracavity photoacoustic spectroscopy(FLI-PAS)for acetylene detection[J].Journal of Lightwave Technology,2017,35(20):4519-4525.
[56]Fjodorow P,Hellmig O,Baev V M,et al.Intracavity absorption spectroscopy of formaldehyde from 6230to 6420cm-1[J].Applied Physics B,2017,123(5):147.
[57]Zhou B K,Gao Y Z,Chen T R,et al.Principles of lasers[M].Beijing:National Defense Industry Press,2000.
[58]Chesnoy J.Undersea fiber communication systems[M].San Diego:Academic Press,2015.
[59]Rothman L S,Gordon I E,Babikov Y,et al.The HITRAN2012molecular spectroscopic database[J].Journal of Quantitative Spectroscopy and Radiative Transfer,2013,130(11):4-50.
[60]Liu K,Liu T G,Peng G D,et al.Theoretical investigation of an optical fiber amplifier loop for intra-cavity and ring-down cavity gas sensing[J].Sensors and Actuators B:Chemical,2010,146(1):116-121.
[61]Zhang Y,Zhang M,Jin W,et al.Investigation of erbium-doped fiber laser intra-cavity absorption sensor for gas detection[J].Optics Communications,2004,232(1/2/3/4/5/6):295-301.
[62]Zhao Y,Chang J,Wang Q,et al.Research on a novel composite structure Er3+-doped DBR fiber laser with aπ-phase shifted FBG[J].Optics Express,2013,21(19):22515-22522.
[63]Delgado-Pinar M,Zalvidea D,Diez A,etal.Q-switching of an all-fiber laser by acousto-optic modulation of a fiber Bragg grating[J].Optics Express,2006,14(3):1106-1112.
[64]Zhang Q D,Chang J,Wang Q,et al.Acousto-optic Q-switched fiber laser-based intra-cavity photoacoustic spectroscopy for trace gas detection[J].Sensors,2017,18(1):E42.
[65]Schilt S,Thévenaz L,Niklès M,et al.Ammonia monitoring at trace level using photoacoustic spectroscopy in industrial and environmental applications[J].Spectrochimica Acta Part A:Molecular and Biomolecular Spectroscopy,2004,60(14):3259-3268.
[66]Besson J P,Schilt S,Rochat E,et al.Ammonia trace measurements at ppb level based on near-IRphotoacoustic spectroscopy[J].Applied Physics B,2006,85(2/3):323-328.
[67]Haisch C,Menzenbach P,Bladt H,etal.A wide spectral range photoacoustic aerosol absorption spectrometer[J].Analytical Chemistry,2012,84(21):8941-8945.
[68]Patimisco P,Sampaolo A,Dong L,et al.Recent advances in quartz enhanced photoacoustic sensing[J].Applied Physics Reviews,2018,5(1):011106.
[69]Patimisco P,Sampaolo A,Dong L,et al.Analysis of the electro-elastic properties of custom quartz tuning forks for optoacoustic gas sensing[J].Sensors and Actuators B:Chemical,2016,227:539-546.
[70]Borri S,Patimisco P,Sampaolo A,et al.Terahertz quartz enhanced photo-acoustic sensor[J].Applied Physics Letters,2013,103(2):021105.
[71]Wang Q Y.Study of optical fiber Fabry-Perot acoustic wave sensor and its application[D].Dalian:Dalian University of Technology,2010.王巧云.光纤法布里-珀罗声波传感器及其应用研究[D].大连:大连理工大学,2010.
[72]Zhou S,Slaman M,Iannuzzi D.Demonstration of a highly sensitive photoacoustic spectrometer based on a miniaturized all-optical detecting sensor[J].Optics Express,2017,25(15):17541-17548.
[73]K9hring M,Willer U,B9ttger S,et al.Fibercoupled ozone sensor based on tuning fork-enhanced interferometric photoacoustic spectroscopy[J].IEEEJournal of Selected Topics in Quantum Electronics,2012,18(5):1566-1572.
[74]Cao Y,Jin W,Ho H L,et al.Miniature fiber-tip photoacoustic spectrometer for trace gas detection[J].Optics Letters,2013,38(4):434-436.
[75]Liu B,Lin J,Liu H,et al.Extrinsic Fabry-Perot fiber acoustic pressure sensor based on large-area silver diaphragm[J].Microelectronic Engineering,2016,166:50-54.
[76]Ma J,Xuan H,Ho H L,et al.Fiber-optic FabryPerot acoustic sensor with multilayer graphene diaphragm[J].IEEE Photonics Technology Letters,2013,25(10):932-935.