基于加载条形光波导结构的聚合物热光开关
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摘要
为解决有机/无机杂化材料薄膜厚度较薄且难加工等问题,设计并制作了一种基于加载条形光波导结构的MZI(Mach-Zehnder Interferometer)型快速、低功耗热光开关器件。聚合物材料具有较低的热导率和较大的热光系数,能有效降低器件的功耗,以热导率相对较大的Si O2的衬底作为下包层,可有效加快器件响应时间。采用热光系数较大的有机/无机杂化材料DR1/Si O2-Ti O2作为波导芯层,以聚甲基丙烯酸甲酯和甲基丙烯酸环氧丙酯的共聚物(P(MMA-GMA):Poly-Methyl-Methacrylate-Glycicly-Methacrylate)作为加载条波导,以聚甲基丙烯酸甲酯(PMMA:Polymethyl Methacrylate)作为波导上包层,设计了热光开关器件。采用COMSOL软件模拟了器件的光场和热场分布,采用微加工工艺并结合光漂白技术进行了开关器件的制备。并在1 550 nm工作波长下测试开关器件的性能。可在缩短器件响应时间的同时降低器件的功耗,驱动功率为9.2 m W,消光比为21.2 d B,开关的上升、下降时间分别为152.8μs和180.0μs。
To solve the problem of that the organic/inorganic material has a thinner film and is difficult to process,we design and fabricate a polymeric MZI( Mach-Zehnder Interferometer) TO( Thermo-Optic) switch based on strip-loaded waveguide structure. The polymer materials have the advantages of lower thermal conductivity and larger thermo-optical coefficient,and can reduce the power-consumption of the TO device effectively. The SiO_2 is used as the under-cladding which can shorten the response time of the device. We selected the organic/inorganic hybrid material DR1/SiO_2-TiO_2 as the core layer,the P( MMA-GMA)( PolyMethyl-Methacrylate-Glycicly-Methacrylate) as the loading strip, and poly methyl methacrylate( PMMA:Polymethyl Methacrylate) as the upper-cladding. The light field and thermal field distribution of the TO switch are both simulated. The TO switch is fabricated by using the microfabrication process and photobleaching technology. At 1 550 nm wavelength,the power consumption is about 9. 2 m W,and the extinction ratio of the device is 21. 2 d B. The rise/fall times of the switch are 152. 8 μs/180. 0 μs,respectively.
To solve the problem of that the organic/inorganic material has a thinner film and is difficult to process,we design and fabricate a polymeric MZI( Mach-Zehnder Interferometer) TO( Thermo-Optic) switch based on strip-loaded waveguide structure. The polymer materials have the advantages of lower thermal conductivity and larger thermo-optical coefficient,and can reduce the power-consumption of the TO device effectively. The SiO_2 is used as the under-cladding which can shorten the response time of the device. We selected the organic/inorganic hybrid material DR1/SiO_2-TiO_2 as the core layer,the P( MMA-GMA)( PolyMethyl-Methacrylate-Glycicly-Methacrylate) as the loading strip, and poly methyl methacrylate( PMMA:Polymethyl Methacrylate) as the upper-cladding. The light field and thermal field distribution of the TO switch are both simulated. The TO switch is fabricated by using the microfabrication process and photobleaching technology. At 1 550 nm wavelength,the power consumption is about 9. 2 m W,and the extinction ratio of the device is 21. 2 d B. The rise/fall times of the switch are 152. 8 μs/180. 0 μs,respectively.
引文
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[2]WANG Lingfang,SONG Qianqian,WU Jieyun,et al.Low-Lower Variable Optical Attenuator Based on a Hybrid Si ONPolymer S-Bend Waveguide[J].Applied Optics,2016,55(5):969-973.
[3]牛小艳,韩超,王雷,等.650 nm波长有机-无机接枝改性聚甲基丙烯酸甲酯全聚合物热光波导开关[J].中国激光,2013,33(10):204-208.NIU Xiaoyan,HAN Chao,WANG Lei,et al.650 nm Wavelength All-Polymer Thermo-Optical Waveguide Switch Based on Organic-Inorganic Grafting Polymethyl Methacrylate Matericals[J].Chinese J Lasers,2013,33(10):204-208.
[4]曲禄成,梁磊,孙健,等.基于Polymer/Si O2的快速低功耗可变光衰减器的研制[J].中国激光,2014,41(12):268-273.QU Lucheng,LIANG Lei,SUN Jian,et al.Design and Fabrication of Polymer/Si O2Hybrid Variable Optical Attenuator with Fast Response and Low Power Consumption[J].Chinese J Lasers,2014,41(12):268-273.
[5]SUN P,REANO R M.Submilliwatt Thermo-Optic Switches Using Free-Standing Silicon-On-Insulator Strip Waveguides[J].Optics Express,2010,18(8):8406-8411.
[6]YU Longhai,DAI Daoxing,HE Sailing.Graphene-Based Transparent Flexible Heat Conductor for Thermally Tuning Nanophotonic Integrated Devices[J].Applied Physics Letters,2014,105(25):1679.
[7]LIU U,WANG X,SUN J,et al.Improved Performance of Thermal-Optic Switch Using Polymer/Silica Hybrid and Air Trench Waveguide Structures[J].Optics Letters,2015,40(9):1888-1891.
[8]HU Guohua,YUN Binfeng,JI Yang,et al.Crosstalk Reduced and Low Power Consumption Polymeric Thermo-Optic Switch[J].Optics Communications,2010,283(10):2133-2135.
[9]WANG X,SUN J,LIU X,et al.650 nm 1×2 Polymeric Thermo-Optic Switch with Low Power Consumption[J].Optics Express,2014,22(9):11119-11128.
[10]LIN X,LING T,SUBBARAMAN H,et al.Printable Thermo-Optic Polymer Switches Utilizing Imprinting and Ink-Jet Printing[J].Optics Express,2013,21(2):2110-2117.
[11]孙杰.基于加载条形光波导的极化聚合物电光调制器的研究[D].长春:吉林大学电子科学与工程学院,2009:28-32.SUN Jie.Investigation on Poled Ploymer Electro-Optic Modulator Based on Strip-Loaded Waveguide[D].Changchun:College of Electronic Science and Engineering,Jilin University,2009:28-32.
[12]王微,孙小强,王希斌,等.低功耗聚合物Mach-Zehnder热光开关[J].光子学报,2010,39(4):610-613.WANG Wei,SUN Xiaoqiang,WANG Xibin,et al.Low Power Consumption Polymer Thermo-Optic Switch with Mach-Zehnder Interferometer[J].Acta Photonica Sinica,2010,39(4):610-613.
[13]梁磊,闫云飞,孙小强,等.低功耗有机/无机混合结构热光开关的研制[J].光电子·激光,2012,23(7):1246-1251.LIANG Lei,YAN Yunfei,SUN Xiaoqiang,et al.Design and Fabrication of an Organic/Inorganic Hybrid Thermo-Optic Switch with Low Power Consumption[J].Journal of Optoelectronics·Laser,2012,23(7):1246-1251.
[14]林军,胡国华,顾凯,等.高性能有机聚合物波导数字型热光开关[J].光电子·激光,2016,27(5):473-478.LIN Jun,HU Guohua,GU Kai,et al.High-Performance Polymer-Waveguide Digital Thermo-Optic Switch[J].Journal of Optoelectronics·Laser,2016,27(5):473-478.
[15]SONG P,CHEN L,CHEN Y.High-Speed Low-Voltage Single-Drive Push-Pull Silicon Mach-Zehnder Modulators[J].Optics Express,2012,20(6):6163-6169.
[2]WANG Lingfang,SONG Qianqian,WU Jieyun,et al.Low-Lower Variable Optical Attenuator Based on a Hybrid Si ONPolymer S-Bend Waveguide[J].Applied Optics,2016,55(5):969-973.
[3]牛小艳,韩超,王雷,等.650 nm波长有机-无机接枝改性聚甲基丙烯酸甲酯全聚合物热光波导开关[J].中国激光,2013,33(10):204-208.NIU Xiaoyan,HAN Chao,WANG Lei,et al.650 nm Wavelength All-Polymer Thermo-Optical Waveguide Switch Based on Organic-Inorganic Grafting Polymethyl Methacrylate Matericals[J].Chinese J Lasers,2013,33(10):204-208.
[4]曲禄成,梁磊,孙健,等.基于Polymer/Si O2的快速低功耗可变光衰减器的研制[J].中国激光,2014,41(12):268-273.QU Lucheng,LIANG Lei,SUN Jian,et al.Design and Fabrication of Polymer/Si O2Hybrid Variable Optical Attenuator with Fast Response and Low Power Consumption[J].Chinese J Lasers,2014,41(12):268-273.
[5]SUN P,REANO R M.Submilliwatt Thermo-Optic Switches Using Free-Standing Silicon-On-Insulator Strip Waveguides[J].Optics Express,2010,18(8):8406-8411.
[6]YU Longhai,DAI Daoxing,HE Sailing.Graphene-Based Transparent Flexible Heat Conductor for Thermally Tuning Nanophotonic Integrated Devices[J].Applied Physics Letters,2014,105(25):1679.
[7]LIU U,WANG X,SUN J,et al.Improved Performance of Thermal-Optic Switch Using Polymer/Silica Hybrid and Air Trench Waveguide Structures[J].Optics Letters,2015,40(9):1888-1891.
[8]HU Guohua,YUN Binfeng,JI Yang,et al.Crosstalk Reduced and Low Power Consumption Polymeric Thermo-Optic Switch[J].Optics Communications,2010,283(10):2133-2135.
[9]WANG X,SUN J,LIU X,et al.650 nm 1×2 Polymeric Thermo-Optic Switch with Low Power Consumption[J].Optics Express,2014,22(9):11119-11128.
[10]LIN X,LING T,SUBBARAMAN H,et al.Printable Thermo-Optic Polymer Switches Utilizing Imprinting and Ink-Jet Printing[J].Optics Express,2013,21(2):2110-2117.
[11]孙杰.基于加载条形光波导的极化聚合物电光调制器的研究[D].长春:吉林大学电子科学与工程学院,2009:28-32.SUN Jie.Investigation on Poled Ploymer Electro-Optic Modulator Based on Strip-Loaded Waveguide[D].Changchun:College of Electronic Science and Engineering,Jilin University,2009:28-32.
[12]王微,孙小强,王希斌,等.低功耗聚合物Mach-Zehnder热光开关[J].光子学报,2010,39(4):610-613.WANG Wei,SUN Xiaoqiang,WANG Xibin,et al.Low Power Consumption Polymer Thermo-Optic Switch with Mach-Zehnder Interferometer[J].Acta Photonica Sinica,2010,39(4):610-613.
[13]梁磊,闫云飞,孙小强,等.低功耗有机/无机混合结构热光开关的研制[J].光电子·激光,2012,23(7):1246-1251.LIANG Lei,YAN Yunfei,SUN Xiaoqiang,et al.Design and Fabrication of an Organic/Inorganic Hybrid Thermo-Optic Switch with Low Power Consumption[J].Journal of Optoelectronics·Laser,2012,23(7):1246-1251.
[14]林军,胡国华,顾凯,等.高性能有机聚合物波导数字型热光开关[J].光电子·激光,2016,27(5):473-478.LIN Jun,HU Guohua,GU Kai,et al.High-Performance Polymer-Waveguide Digital Thermo-Optic Switch[J].Journal of Optoelectronics·Laser,2016,27(5):473-478.
[15]SONG P,CHEN L,CHEN Y.High-Speed Low-Voltage Single-Drive Push-Pull Silicon Mach-Zehnder Modulators[J].Optics Express,2012,20(6):6163-6169.