低功耗聚合物MZI结构热光开关研究
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摘要
设计并制作了一种基于马赫-曾德尔干涉仪(MZI)结构的低功耗聚合物热光开关。聚合物材料具有低热导率和高热光系数的优点,可以有效降低热光器件的功耗。在Si O2衬底上,采用热光系数较大的Norland紫外固化胶(NOA73)作为波导芯层,聚甲基丙烯酸甲酯和甲基丙烯酸环氧丙酯的共聚物[P(MMA-GMA)]作为波导的上包层,设计了热光开关器件,并对光场和热场进行了模拟,采用传统的半导体工艺完成了热光开关器件的制备。器件的测试结果表明,在1550 nm工作波长下,热光开关器件的消光比为20.2 d B,驱动功率仅为9.14 m W,开关的上升时间为174μs,下降时间为292μs。
A polymeric Mach- Zehnder interferometer(MZI) thermo- optic(TO) switch with low power consumption is designed and fabricated. The polymer materials have the advantages of low thermal conductivity and high thermo-optic coefficient. Therefore it can reduce the power consumption of the thermooptic device effectively. The TO switch is designed on the Si O2 substrate with selecting the Norland optical adhesive(NOA73) as the core layer and using Poly(methyl methacrylate- glycidyl methacrylate) [P(MMAGMA)] as the upper cladding. The light field and thermal field distribution of the TO switch are both simulated.The TO switch is fabricated by using the traditional semiconductor technology. At 1550 nm wavelength, the extinction ratio of the device is 20.2 d B and the power consumption is only about 9.14 m W. The rise time and the fall time of the switch are 174 ms and 292 ms, respectively.
A polymeric Mach- Zehnder interferometer(MZI) thermo- optic(TO) switch with low power consumption is designed and fabricated. The polymer materials have the advantages of low thermal conductivity and high thermo-optic coefficient. Therefore it can reduce the power consumption of the thermooptic device effectively. The TO switch is designed on the Si O2 substrate with selecting the Norland optical adhesive(NOA73) as the core layer and using Poly(methyl methacrylate- glycidyl methacrylate) [P(MMAGMA)] as the upper cladding. The light field and thermal field distribution of the TO switch are both simulated.The TO switch is fabricated by using the traditional semiconductor technology. At 1550 nm wavelength, the extinction ratio of the device is 20.2 d B and the power consumption is only about 9.14 m W. The rise time and the fall time of the switch are 174 ms and 292 ms, respectively.
引文
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10 Zijian Cao,Yunfei Yan,Jie Meng,et al..Low power consumption thermo-optic switch based on DR1/PMMA[J].Microwave and Optical Technology Letters,2012,54(9):2163-2165.
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12 Zhang Haixin,Wang Lei,Niu Xiaoyan,et al..650 nm visible band thermo-optic switch based on bonded organic-inorganic hybrid materials[J].Chinese J Lasers,2013,40(9):0906002.张海鑫,王雷,牛小艳,等.650 nm可见光波段全复合材料热光开关[J].中国激光,2013,40(9):0906002.
13 Niu Xiaoyan,Han Chao,Wang Lei,et al..650 nm wavelength all-polymer thermo-optical waveguide switch based on organicinorganic grafting polymethyl methacrylate matericals[J].Chinese J Lasers,2013,33(10):1016001.牛小艳,韩超,王雷,等.650 nm波长有机-无机接枝改性.聚甲基丙烯酸甲酯全聚合物热光波导开关[J].中国激光,2013,33(10):1016001.
14 Chen K X,Chu P L,Chan H P.A vertically coupled polymer optical waveguide switch[J].Optics Communications,2005,244(1):153-158.
15 Wang Wei,Sun Xiaoqiang,Wang Xibin,et al..Low power consumption polymer thermo-optic switch with Mach-Zehnder interferometer[J].Acta Photonica Sinica,2010,39(4):610-613.王微,孙小强,王希斌,等.低功耗聚合物Mach-Zehnder热光开关[J].光子学报,2010,39(4):610-613.
16 Liang Lei,Yan Yunfei,Sun Xiaoqiang,et al..Design and fabrication of an organic/inorganic hybrid thermo-optic switch with low power consumption[J].Journal of Optoelectronics·Laser,2012,23(7):1246-1251.梁磊,闫云飞,孙小强,等.低功耗有机/无机混合结构热光开关的研制[J].光电子·激光,2012,23(7):1246-1251.
2 Xie N,Hashimoto T,Utaka K.Very low power operation of compact MMI polymer thermooptic switch[J].IEEE Photonics Technology Letters,2009,21(18):1335-1337.
3 Song Hongyan,Han Xiuyou,Zou Pin,et al..Optimal design of low power tunable coupler based on polymer waveguide[J].Acta Optica Sinica,2012,32(7):0723002.宋红妍,韩秀友,邹品,等.低功耗聚合物波导可调耦合器的优化设计[J].光学学报,2012,32(7):0723002.
4 QüLucheng,Liang Lei,Sun Jian,et al..Design and fabrication of polymer/Si O2hybrid variable optical attenuator with fast response and low power consumption[J].Chinese J Lasers,2014,41(12):1216001.曲禄成,梁磊,孙健,等.基于Polymer/Si O2的快速低功耗可变光衰减器的研制[J].中国激光,2014,41(12):1216001.
5 M Haruna,J Koyama.Thermooptic deflection and switching in glass[J].Appl Opt,1982,21(19):3461-3465.
6 M Haruna,J Koyama.Thermo-optic effect in Linb3for light deflection and switching[J].Electronics Letters,1981,17(22):842-844.
7 Guohua Hu,Binfeng Yun,Yang Ji,et al..Crosstalk reduced and low power consumption polymeric thermo-optic switch[J].Optics Communications,2010,283(10):2133-2135.
8 M P Earnshaw,M A Cappuzzo,E Chen,et al..Ultra-low power thermo-optic silica-onsilicon waveguide membrane switch[J].Electronics Letters,2007,43(7):393-394.
9 Yang Jianyi,Jiang Xiaoqing,Yang Fanghui,et al..Orgainic polymer thermo-optic switches with Y-branch[J].Acta Optica Sinica,2002,22(6):735-738.杨建义,江晓清,杨方辉,等.Y分支有机聚合物热光开关的研制[J].光学学报,2002,22(6):735-738.
10 Zijian Cao,Yunfei Yan,Jie Meng,et al..Low power consumption thermo-optic switch based on DR1/PMMA[J].Microwave and Optical Technology Letters,2012,54(9):2163-2165.
11 Diemeer M B J,Brons J J,Trommel E S.Polymeric optical waveguide switch using the thermooptic effect[J].Journal of Lightwave Technology,1989,7(3):449-453.
12 Zhang Haixin,Wang Lei,Niu Xiaoyan,et al..650 nm visible band thermo-optic switch based on bonded organic-inorganic hybrid materials[J].Chinese J Lasers,2013,40(9):0906002.张海鑫,王雷,牛小艳,等.650 nm可见光波段全复合材料热光开关[J].中国激光,2013,40(9):0906002.
13 Niu Xiaoyan,Han Chao,Wang Lei,et al..650 nm wavelength all-polymer thermo-optical waveguide switch based on organicinorganic grafting polymethyl methacrylate matericals[J].Chinese J Lasers,2013,33(10):1016001.牛小艳,韩超,王雷,等.650 nm波长有机-无机接枝改性.聚甲基丙烯酸甲酯全聚合物热光波导开关[J].中国激光,2013,33(10):1016001.
14 Chen K X,Chu P L,Chan H P.A vertically coupled polymer optical waveguide switch[J].Optics Communications,2005,244(1):153-158.
15 Wang Wei,Sun Xiaoqiang,Wang Xibin,et al..Low power consumption polymer thermo-optic switch with Mach-Zehnder interferometer[J].Acta Photonica Sinica,2010,39(4):610-613.王微,孙小强,王希斌,等.低功耗聚合物Mach-Zehnder热光开关[J].光子学报,2010,39(4):610-613.
16 Liang Lei,Yan Yunfei,Sun Xiaoqiang,et al..Design and fabrication of an organic/inorganic hybrid thermo-optic switch with low power consumption[J].Journal of Optoelectronics·Laser,2012,23(7):1246-1251.梁磊,闫云飞,孙小强,等.低功耗有机/无机混合结构热光开关的研制[J].光电子·激光,2012,23(7):1246-1251.