基于统一场追迹理论的激光扫描系统公差分析
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摘要
激光扫描系统广泛应用于激光加工和激光成像等高精度系统中,其光学质量是制造过程最终的评价指标。在批量生产中,需要对光学系统进行公差分析,以满足使用需求,同时降低加工成本。以激光扫描系统为例,采用统一场光学分析对该光学系统进行仿真,结合激光扫描系统的光学性能,对系统各个元件间的位置误差和旋转误差进行公差分析。通过对每个元件进行公差约束,使整体系统满足设计和使用需求。搭建激光扫描系统的测量平台,验证了测量结果与统一场分析的一致性。
Laser scanning system is widely used in high precision systems,such as laser machining and imaging.The optical quality is the final index of manufacture process.In mass production,the tolerance analysis of the optical system is needed to meet the demand of use and reduce processing cost.For example,the laser scanning system is simulated by the unified field optical analysis.The position tolerance and rotation tolerance of each workpiece of the system is analyzed based on the optical properties of the laser scanning systems.The overall system meets the design and uses requirements through tolerance constraints for each workpiece.The measurement platform is built,and the measurement result is consistent with the analysis of unified field tracing.
Laser scanning system is widely used in high precision systems,such as laser machining and imaging.The optical quality is the final index of manufacture process.In mass production,the tolerance analysis of the optical system is needed to meet the demand of use and reduce processing cost.For example,the laser scanning system is simulated by the unified field optical analysis.The position tolerance and rotation tolerance of each workpiece of the system is analyzed based on the optical properties of the laser scanning systems.The overall system meets the design and uses requirements through tolerance constraints for each workpiece.The measurement platform is built,and the measurement result is consistent with the analysis of unified field tracing.
引文
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[2]Marshall G F.High-quality image recorder and evaluation[J].SPIE,1991,1454:370-381.
[3]Yurevich V I,Grimm V A,Afonyushkin A A,et al.Optical design and performance of F-Theta lenses for high-power and high-precision applications[C].SPIE,2015,9626:962660.
[4]Fu Minmin,Chen Peifeng,Wang Ying,et al.Optical design of super wide angle F-Theta lens with large operation area[J].Journal of Applied Optics,2011,32(6):1083-1087.付敏敏,陈培锋,王英,等.超广角大工作面F-Theta镜头的光学设计[J].应用光学,2011,32(6):1083-1087.
[5]Beiser L.Unified optical scanning technology[M].John Wiley&Sons,2005.
[6]Fang F,Cheng Y,Zhang X.Design of freeform optics[J].Advanced Optical Technologies,2013,2(5):445-453.
[7]Xie Hongbo,Li Yong,Yao Lijuan,et al.Design of free-formf-θlens in polygonal mirror laser scanning system[J].Laser Technology,2014,38(6):742-746.谢洪波,李勇,姚丽娟,等.激光转镜扫描系统中自由曲面f-θ物镜的设计[J].激光技术,2014,38(6):742-746.
[8]Deng Pinghu,Lin Feng.Method of tolerance sensitivity reduction of optical design[J].Laser&Optoelectronics Progress,2015,52(11):112202.邓枰湖,林峰.光学设计中降低公差灵敏度的方法[J].激光与光电子学进展,2015,52(11):112202.
[9]Sun Yuanyuan,Li Yanqiu,Cao Zhen.Tolerance analysis of high-numerical aperture extreme ultraviolet lithographic objective[J].Laser&Optoelectronics Progress,2015,52(12):122207.孙圆圆,李艳秋,曹振.超大数值孔径极紫外光刻物镜的公差分析[J].激光与光电子学进展,2015,52(12):122207.
[10]Ji Yiqun,Shen Weimin.Optical design of large working area F-Theta lens[J].Acta Optica Sinica,2005,25(11):1539-1542.季轶群,沈为民.大工作面F-Theta镜头的光学设计[J].光学学报,2005,25(11):1539-1542.
[11]Fang F Z,Zhang X D,Weckenmann A,et al.Manufacturing and measurement of freeform optics[J].CIRP AnnalsManufacturing Technology,2013,62(2):823-846.
[12]Wyrowski F K M.Introduction to field tracing[J].Journal of Modern Optics,2011,58(5/6):449-467.