基准圆光栅偏心检测及测角误差补偿
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摘要
为了修正关节测试平台中由圆光栅安装偏心所产生的测量误差,建立了圆光栅偏心测角误差补偿模型并对安装偏心检测方法进行研究。首先,根据圆光栅测角与偏心参数间的几何关系,推导出圆光栅测量误差补偿模型。然后,描述了采用双读数头对比接收正弦信号间相位差,检测偏心参数的方法和原理;通过合成信号的李萨茹图形,检测出关节测试平台内圆光栅的偏心距及偏心方向。最后,根据所推导的偏心测角误差补偿公式对测试系统进行修正。对比实验结果表明:修正后的圆光栅测角精度大幅提高,测量精度提高了近5倍,满足关节测试平台的测量精度要求。
To correct the measuring angle errors derived from the eccentricity of installing a circular grating in a manipulator joint test system,a model for compensation of grating measuring angle errors and the test method for installing eccentric errors are investigated.First,according to the relationship between angular error and eccentric parameters,the paper deduces the model of angular errors caused by install eccentricity.Then,it describes the method and principle to detect the grating eccentricity and eccentric direction by receiving phase errors of signals using two sensors in contrast.Based on the Lissajous plot generated by composite signals,the eccentric parameters of the grating in manipulator joint test system is measured.Finally,using the angle error formulas to compensate the measuring angle,the measuring system has been amended.The experiment shows that the amended angular accuracy has greatly improved,and the measurement accuracy is increased by nearly five times.It can satisfy the requirements of high accurate systems.
To correct the measuring angle errors derived from the eccentricity of installing a circular grating in a manipulator joint test system,a model for compensation of grating measuring angle errors and the test method for installing eccentric errors are investigated.First,according to the relationship between angular error and eccentric parameters,the paper deduces the model of angular errors caused by install eccentricity.Then,it describes the method and principle to detect the grating eccentricity and eccentric direction by receiving phase errors of signals using two sensors in contrast.Based on the Lissajous plot generated by composite signals,the eccentric parameters of the grating in manipulator joint test system is measured.Finally,using the angle error formulas to compensate the measuring angle,the measuring system has been amended.The experiment shows that the amended angular accuracy has greatly improved,and the measurement accuracy is increased by nearly five times.It can satisfy the requirements of high accurate systems.
引文
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[10]PORTMAN V,PESCHANSKY B.Phase-statisti-cal method and device for high precise and high-ef-ficiency angular measurements[J].Precision Engi-neering,2001,25(4):309-315.
[2]郭阳宽,李玉和,李庆祥,等.运动偏心对圆光栅副测量的影响及误差补偿[J].清华大学学报(自然科学版),2005,45(2):178-181.GUO Y K,LI Y H,LI Q X,et al..Error compen-sation for eccentric motions of circular gratings[J].Journal of Tsinghua University(Sci&Tech),2005,45(2):178-181.(in Chinese)
[3]于连栋,丁洋,程文涛.平行双关节坐标测量机圆光栅测角误差补偿技术[J].南京理工大学学报(自然科学版),2009,33(5):659-662.YU L D,DING Y,CHENG W T.Compensation ofangle measurement error of circular gratings forparallel dual-joint coordinate measuring machine[J].Journal of Nanjing University of Science andTechnology(Natural&Science),2009,33(5):659-662.(in Chinese)
[4]张礼松,管炳良.关节坐标测量机研制中圆光栅误差修正技术[J].计测技术,2007,27(4):41-44.ZHANG L S,GUAN B L.Error correction and itsapplication to multi-joint CMM research[J].Me-trology&Measurement Technology,2007,27(4):41-44.(in Chinese)
[5]王文,林铿,高贯斌,等.关节臂式坐标测量机角度传感器偏心参数辨识[J].光学精密工程,2010,18(1):135-134.WANG W,LIN K,GAO G B,et al..Eccentricityparameter identification of angle sensors for articu-lated arm CMMs[J].Opt.Precision Eng.,2010,18(1):135-141.(in Chinese)
[6]高贯斌,王文,林铿,等.圆光栅角度传感器的误差补偿及参数辨识[J].光学精密工程,2010,18(8):1766-1772.GAO G B,WANG W,LIN K,et al..Error com-pensation and parameter identification of circulargrating angle sensors[J].Opt.Precision Eng.,2010,18(8):1766-1772.(in Chinese)
[7]朱帆,吴易明,刘长春.四读头法消除码盘偏心和振动对叠栅条纹相位测量的影响[J].光学学报,2011,31(4):1-7.ZHU F,WU Y M,LIU CH CH.Eliminating in-fluence of grating encoders eccentricity and vibrationto moire fringes signal by four reading heads[J].Acta Optica Sinica,2011,31(4):1-7.(in Chinese)
[8]NOBUMI H,YOSHIHISA S,HIDEAKI M.Amethod of improving the resolution and accuracy ofrotary encoders using a code compensation tech-nique[J].IEEE Trans.on Instrumentation andMeasurentm,1992,41(1):98-101.
[9]洪喜,续志军,杨宁.基于径向基函数网络的光电编码器误差补偿法[J].光学精密工程,2008,16(4):598-604.HONG X,XU ZH J,YANG N.Error compensationof optical encoder based on RBF network[J].Opt.Precision Eng.,2008,16(4):598-604.(in Chinese)
[10]PORTMAN V,PESCHANSKY B.Phase-statisti-cal method and device for high precise and high-ef-ficiency angular measurements[J].Precision Engi-neering,2001,25(4):309-315.