Mo背电极对CIGS吸收层成分与结构的影响
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摘要
采用直流磁控溅射法,通过调整溅射气压制备双层和三层Mo背电极层,并在其上制备(In,Ga)_2Se_3(IGS)和Cu(In,Ga)Se_2(CIGS)。采用X射线荧光光谱(XRF)和X射线光电子能谱(XPS)测量成分;用扫描电子显微镜(SEM)观察IGS和CIGS的表面和断面形貌;用X射线衍射(XRD)研究背电极层对IGS和CIGS结晶取向的影响。结果表明,背电极的不同可影响CIGS表面Na的分布;三层Mo背电极层上制备的CIGS吸收层具有112择优,晶粒较大,贯通性更优;三层Mo背电极层上制备的CIGS电池的效率为14.1%,其中较双层J_(sc)和FF分别有9.4%和15.5%的提升。
Mo Bilayer and trip layer,prepared by DC magnetron sputtering using various sputtering pressure,as backelectrodes of(In,Ga)2 Se3(IGS)and Cu(In,Ga)Se2(CIGS). XRF and XPS were used to study the compositions of CIGS.The plane & cross section morphologies of IGS and CIGS were observed by scanning electron microscope(SEM). X-raydiffraction(XRD)was used to study the microstructure of the films. The results revealed that the content of Na in CIGSwas affected by the back electrodes. 112 preferential orientation CIGS with lager grain size was deposited on trip layer. Jscand FF receptively increased 9.4% and 15.5% with the CIGS prepared on trip layer,and the efficiency of the cellreached 14.1%.
Mo Bilayer and trip layer,prepared by DC magnetron sputtering using various sputtering pressure,as backelectrodes of(In,Ga)2 Se3(IGS)and Cu(In,Ga)Se2(CIGS). XRF and XPS were used to study the compositions of CIGS.The plane & cross section morphologies of IGS and CIGS were observed by scanning electron microscope(SEM). X-raydiffraction(XRD)was used to study the microstructure of the films. The results revealed that the content of Na in CIGSwas affected by the back electrodes. 112 preferential orientation CIGS with lager grain size was deposited on trip layer. Jscand FF receptively increased 9.4% and 15.5% with the CIGS prepared on trip layer,and the efficiency of the cellreached 14.1%.
引文
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[14] Yoon Ju-Heon,Kim Won Mok,Park Jong-Keuk,et al.Control of the preferred orientations of Cu(In,Ga)Se2films and the photovoltaic conversion efficiency using a surface-functionalized molybdenum back contact[J].Progress in Photovoltaics Research&Applications,2014,22(1):69—76.
[15]宋斌斌,于涛,张传升,等.溅射气压对磁控溅射Mo背电极层形貌与结构的影响[J].材料导报,2016,30(16):35—38.[15] Song Binbin, Yu Tao, Zhang Chuansheng, et al.Influence of working pressure on morphologies and microstructures of Mo back electrode by magnetron sputtering[J]. Materials Review,2016,30(16):35—38.
[16] Mise T, Nakada T. Microstructural properties of(In,Ga)2Se3precursor layers for efficient CIGS thinfilm solar cells[J]. Solar Energy Materials&Solar Cells,2009,93(6-7):1000—1003.
[17] Ishizuka Shogo, Yamada Akimasa, Fons P, et al.Texture and morphology variations in(In,Ga)2Se3and Cu(In,Ga)Se2thin films grown with various Se source conditions[J]. Progress in Photovoltaics Research&Applications,2013,21(4):544—553.
[18]彭寿,马立云,王芸,等.退火处理对CIGS薄膜物相及成分的影响[J].太阳能学报,2014,35(3):498—501.[18] Peng Shou,Ma Liyun,Wang Yun,et al. Effect of annealing onphase andelement of CIGS thin film[J].Acta Energiae Solaris Sinica,2014,35(3):498—501.
[2] Chirila A,Buecheler S,Pianezzi F,et al. Highly efficient Cu(In,Ga)Se2solar cells grown on flexible polymer films[J]. Nature Materials,2011,10(10):857—61.
[3]张传升.北京地区多种光伏组件发电性能对比实验研究[J].可再生能源,2016,34(8):1117—1123.[3] Zhang Chuansheng. Comparative experimental study on the power generation performance of photovoltaic modules in Beijing area[J]. Renewable Energy Resources,2016,34(8):1117—1123.
[4]欧阳良琦,庄大明,张宁,等.磁控溅射四元靶材法制备17.5%效率CIGS电池研究[J].太阳能学报,2016,37(11):2994—2998.[4] Ouyang Liangqi,Zhuang Daming,Zhang Ning,et al.Study of Cu(In,Ga)Se2solar cell with 17.5%efficiency achieved by sputtering a quaternary target[J]. Acta Energiae Solaris Sinica,2016,37(11):2994—2998.
[5] Yoon Ju-Heon,Yoon Kwan-Hee,Kim Won Mok,et al.High-temperature stability of molybdenum(Mo)back contacts for CIGS solar cells:A route towards more robust back contacts[J]. Journal of Physics D Applied Physics,2011,44(42):727—733.
[6] Yoon Ju-Heon,Cho Sunghun,Kim Won Mok,et al.Optical analysis of the microstructure of a Mo back contact for Cu(In,Ga)Se2solar cells and its effects on Mo film properties and Na diffusivity[J]. Solar Energy Materials&Solar Cells,2011,95(11):2959—2964.
[7] Yoon Ju-Heon,Kim Jun-Ho,Kim Won Mok,et al.Electrical properties of CIGS/Mo junctions as a function of MoSe2orientation and Na doping[J]. Progress in Photovoltaics:Research and Applications,2014,22:90—96.
[8] Sawaguchi T. Effect of a Mo back contact on Na diffusion in CIGS thin film solar cells[J]. Progress in Photovoltaics Research&Applications,2012,21(1):58—63.
[9] Forest R V,Han Kunhee,Eser E,et al. Understanding the effect of Na in improving the performance of Cu(InGa)Se2-based photovoltaics[A]. 39th IEEE Photovoltaic Specialists Conference[C], Tampa,Florida,USA,2013.
[10] Hedstrom J,Ohlsen H,Bodegard M,et al. ZnO/CdS/Cu(In,Ga)Se2, thin film solar cells with improved performance[A]. 23rd IEEE Photovoltaic Specialists Conference[C],Louisville,KY,USA,1993.
[11] Ard M B,Granath K,Stolt L. Growth of Cu(In,Ga)Se2,thin films by coevaporation using alkaline precursors[J].Thin Solid Films,2000,361-362:9—16.
[12] Rudmann D,Bilger G,Kaelin M,et al. Effects of NaF coevaporation on structural properties of Cu(In,Ga)Se2thin films[J]. Thin Solid Films,2003,431-432(3):37—40.
[13]何静婧,刘玮,李志国,等.低温生长Cu(InGa)Se2薄膜吸收层的掺钠工艺研究[J].物理学报,2012,61(19):519—525.[13] He Jingjing,Liu Wei,Li Zhiguo,et al. Research on sodium incorporation methods of growing Cu(InGa)Se2thin film by low-temperature deposition[J]. Acta Physica Sinica,2012,61(19):519—525.
[14] Yoon Ju-Heon,Kim Won Mok,Park Jong-Keuk,et al.Control of the preferred orientations of Cu(In,Ga)Se2films and the photovoltaic conversion efficiency using a surface-functionalized molybdenum back contact[J].Progress in Photovoltaics Research&Applications,2014,22(1):69—76.
[15]宋斌斌,于涛,张传升,等.溅射气压对磁控溅射Mo背电极层形貌与结构的影响[J].材料导报,2016,30(16):35—38.[15] Song Binbin, Yu Tao, Zhang Chuansheng, et al.Influence of working pressure on morphologies and microstructures of Mo back electrode by magnetron sputtering[J]. Materials Review,2016,30(16):35—38.
[16] Mise T, Nakada T. Microstructural properties of(In,Ga)2Se3precursor layers for efficient CIGS thinfilm solar cells[J]. Solar Energy Materials&Solar Cells,2009,93(6-7):1000—1003.
[17] Ishizuka Shogo, Yamada Akimasa, Fons P, et al.Texture and morphology variations in(In,Ga)2Se3and Cu(In,Ga)Se2thin films grown with various Se source conditions[J]. Progress in Photovoltaics Research&Applications,2013,21(4):544—553.
[18]彭寿,马立云,王芸,等.退火处理对CIGS薄膜物相及成分的影响[J].太阳能学报,2014,35(3):498—501.[18] Peng Shou,Ma Liyun,Wang Yun,et al. Effect of annealing onphase andelement of CIGS thin film[J].Acta Energiae Solaris Sinica,2014,35(3):498—501.