通过噪声的分析评价实现划片刀的结构优化
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摘要
针对超高速旋转划片刀实际工作时存在的切削噪声问题,用INV 3018 G型振动与控制分析仪器对其切削晶圆的划片刀结构进行实验分析,利用改变划片刀工艺凹槽角度α的数值,得出不同角度对应转速的频谱图,并应用统计数据图表的方法,整理分析得到角度和频谱峰值的变化曲线图,确定工艺凹槽角度α对其结构的影响,得出对应的峰值最小即产生的噪声较小。结果表明:不同工艺凹槽角度α对高速旋转划片刀结构的设计有一定意义。
Aiming at the cutting noise problem of the scribing knife rotating at ultra high speed, the structure of the cutting wafer scribing knife is analyzed experimentally using INV 3018 G vibration and control analysis instrument. By changing the process groove angle α of the scribing knife, the speed spectrum diagram corresponding to different angles α is obtained. Applying statistical data chart, curves of angle α vs. the frequency spectrum peaks are plotted, with which the influence of the process groove angle α on the structure's performance can be determined. It can be concluded that the angle α corresponding to the minimum peak value will produce small noise only. This work is of some significance for the structure design of high-speed rotating scribing-knives.
Aiming at the cutting noise problem of the scribing knife rotating at ultra high speed, the structure of the cutting wafer scribing knife is analyzed experimentally using INV 3018 G vibration and control analysis instrument. By changing the process groove angle α of the scribing knife, the speed spectrum diagram corresponding to different angles α is obtained. Applying statistical data chart, curves of angle α vs. the frequency spectrum peaks are plotted, with which the influence of the process groove angle α on the structure's performance can be determined. It can be concluded that the angle α corresponding to the minimum peak value will produce small noise only. This work is of some significance for the structure design of high-speed rotating scribing-knives.
引文
[1]白琨.超高速切削加工及其关键技术[J].新技术新工艺,2009,9:30-65.
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[5]毛义军,祁大同,刘秋洪.基于非定常流场的离心风机气动噪声分析[J].西安交通大学学报,2005,39(9):989-993.
[2]刘战强,吉春辉,刘鲁宁,艾兴.高速面铣刀气动噪声及其频谱分析[J].机械工程学报,2011,47(11):163-168.
[3]Mote C D,ZHU Wen-hua.Aerodynamic far field noise in idling circular sawblades[J].Journal of VibrationJournal Vibration,AcousticsAcoustics,StressStress,and Reliability in Design,and Design,1984,106(3):441-446.
[4]李林凌,黄其柏.风机叶片噪声模型研究[J].机械工程学报,2004,40(7):114-118.
[5]毛义军,祁大同,刘秋洪.基于非定常流场的离心风机气动噪声分析[J].西安交通大学学报,2005,39(9):989-993.