摘要
为了制备平整的氧传感器芯片空气孔道,采用了丝网印刷的方法。相应配制了一种适印性的炭浆,优化的条件为:优选了活性炭和松油醇、最佳的球磨级配为m_(Φ6.5)∶m_(Φ3)=1∶2、球磨时间为12 h、分散剂含量为30%、胶含量为5%。在优化的条件下制备的空气孔道平整稳定,该制备方法具有精度高、形状平整可控、成本低以及操作简便等优点。
In order to prepare the flat air pore canal of the lambda sensor chip, the method of screenprinting was used. A suitable carbon slurry was prepared, and the optimum conditions were as follows:activated carbon and terpineol were chosen, the grading was m_(Φ6.5)∶m_(Φ3)=1∶2, ball milling time was 12 h,dispersant content was 30%, rubber content was 5%. Under the optimal conditions, the smooth and sta-ble air duct was prepared. The method has the advantages of high precision, controllable shape, low costand simple operation.
引文
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