熔石英磨削砂轮截面轮廓分析与优化
|
摘要
为提高熔石英光学元件磨削加工质量,降低亚表面缺陷层深度,通过实验和理论分析发现,具有平直截面轮廓的平行金刚石砂轮,在加工熔石英光学元件时砂轮边缘位置处会产生加工应力集中,该应力集中直接导致了元件表面产生"连续白线"状深缺陷,其深度达22μm。为抑制砂轮边缘位置加工应力集中现象,设计了"中央平直线+两侧边缘圆弧过渡"的复合式截面轮廓,并提出了相应的修整方法。通过砂轮修整实验,验证了该方法的可行性,磨削元件"连续白线"状深缺陷得到明显改善,亚表面缺陷深度小于2.5μm,实现熔石英元件的低缺陷磨削加工。
In order to improve the grinding quality of fused silica optics and reduce the depth of subsurface defect(SSD),the experiment of grinding fused silica and theoretical analysis were carried out by parallel diamond grinding wheels with straight edge and circular edge.The stress concentration on the straight edge of wheel was the main cause of deep defects like continuous white line,whose depth was about 22μm.To relieve the stress concentration,a combined cross section profile with circular edges was designed. The propounded dressing method was verified by wheel dressing experiment.After grinding using the latter wheel,the deep defect was constrained remarkably,and the depth of SSD was below 2.5μm.The purpose of low defect grinding of fused silica optics was achieved.
In order to improve the grinding quality of fused silica optics and reduce the depth of subsurface defect(SSD),the experiment of grinding fused silica and theoretical analysis were carried out by parallel diamond grinding wheels with straight edge and circular edge.The stress concentration on the straight edge of wheel was the main cause of deep defects like continuous white line,whose depth was about 22μm.To relieve the stress concentration,a combined cross section profile with circular edges was designed. The propounded dressing method was verified by wheel dressing experiment.After grinding using the latter wheel,the deep defect was constrained remarkably,and the depth of SSD was below 2.5μm.The purpose of low defect grinding of fused silica optics was achieved.
引文
[1]杜秀蓉,宋学富,孙元成,等.抛光石英玻璃亚表面波纹研究[J].材料导报,2014,28(23):240–249.DU Xiurong,SONG Xuefu,SUN Yuancheng,et al.Study of subsurface waves on polished silica glass[J].Materials Review,2014,28(23):240–249.
[2]YANG S T,MATTHEWS M J,ELHADJ S,et al.Comparison of laser-based mitigation of fused silica surface damage using midversus far-infrared lasers[J].Applied Optic,2009,49(14):2606–2616.
[3]GENIN F Y,SALLEO A,PISTOR T V,et al.Role of light intensification by cracks in optical breakdown on surfaces[J].JOSA A,2001,18(10):2607–2616.
[4]徐乐,张春雷,代雷,等.高精度非回转对称非球面加工方法研究[J].中国光学,2016,9(3):364–370.XU Le,ZHANG Chunlei,DAI Lei,et al.Research on manufacturing method of non–rotationally symmetrical aspheric surface with high accuracy[J].Chinese Optics,2016,9(3):364–370.
[5]仇中军,邹大程,闫广鹏.基于修整力的树脂结合剂金刚石砂轮机械修整[J].光学精密工程,2015,23(4):996–1003.QIU Zhongjun,ZOU Dacheng,YAN Guangpeng.Mechanical dressing of resin bold diamond grinding wheel based on dressing force[J].Optics and Precision Engineering,2015,23(4):996–1003.
[6]TONNELLIER X,SHORE P,MORANTZ P,et al.Sub-surface damage issues for effective fabrication of large optics[J].Proc.of SPIE,2008,7018:70180F–1.
[7]殷龙海,王孝坤,李龙响,等.大口径SiC离轴非球面的高效磨削加工[J].光学精密工程,2015,23(9):2497–2505.YIN Longhai,WANG Xiaokun,LI Longxiang,et al.Fast grinding of large SiC off–axis aspheric surface[J].Optics and Precision Engineering,2015,23(9):2497–2505.
[8]CHEN M J,LI Z,YU B,et al.On–machine precision preparation and dressing of ball–headed diamond wheel for the grinding of fused silica[J].Chinese Journal of Mechanical Engineering,2013,26(5):982–987.
[9]赵清亮,赵玲玲,王宇,等.电镀金刚石砂轮高效精密修整及熔融石英磨削试验研究[J].机械工程学报,2013,49(23):174–181.ZHAO Qingliang,ZHAO Lingling,WANG Yu,et al.High efficient precision conditioning of the electroplated diamond wheel and grinding of fused silica glass[J].Journal of Mechanical Engineering,2013,49(23):174–181.
[10]王振忠,郭隐彪,黄浩,等.先进光学磨削中杯形修整技术开发及应用[J].金刚石与磨料磨具工程,2009(1):18–22.WANG Zhenzhong,GUO Yinbiao,HUANG Hao,et al.Development and application of cup truer in advanced optical grinding[J].Diamond&Abrasives Engineering,2009(1):18–22.
[11]崔仲鸣,赫青山,冯创举,等.超硬磨料磨具修整技术研究[J].金刚石与磨料磨具工程,2016,36(1):43–49.CUI Zhongming,HE Qingshan,FENG Chuangju,et al.Study on dressing technology of superabrasive products[J].Diamond&Abrasives Engineering,2016,36(1):43–49.
[12]李圣怡,戴一凡.大中型光学非球面镜制造与测量新技术[M].北京:国防工业出版社,2011.LI Shengyi,DAI Yifan.New technology for manufacturing and measurement of large and middle–scale aspheric surfaces[M].Beijing:National Defense Industry Press,2011.
[13]LAMBROPOULOS J C,JACOBS S D,RUCKMAN J.Material removal mechanisms from grinding to polishing[J].Ceram.Trans.,1999,102:113–128.
[2]YANG S T,MATTHEWS M J,ELHADJ S,et al.Comparison of laser-based mitigation of fused silica surface damage using midversus far-infrared lasers[J].Applied Optic,2009,49(14):2606–2616.
[3]GENIN F Y,SALLEO A,PISTOR T V,et al.Role of light intensification by cracks in optical breakdown on surfaces[J].JOSA A,2001,18(10):2607–2616.
[4]徐乐,张春雷,代雷,等.高精度非回转对称非球面加工方法研究[J].中国光学,2016,9(3):364–370.XU Le,ZHANG Chunlei,DAI Lei,et al.Research on manufacturing method of non–rotationally symmetrical aspheric surface with high accuracy[J].Chinese Optics,2016,9(3):364–370.
[5]仇中军,邹大程,闫广鹏.基于修整力的树脂结合剂金刚石砂轮机械修整[J].光学精密工程,2015,23(4):996–1003.QIU Zhongjun,ZOU Dacheng,YAN Guangpeng.Mechanical dressing of resin bold diamond grinding wheel based on dressing force[J].Optics and Precision Engineering,2015,23(4):996–1003.
[6]TONNELLIER X,SHORE P,MORANTZ P,et al.Sub-surface damage issues for effective fabrication of large optics[J].Proc.of SPIE,2008,7018:70180F–1.
[7]殷龙海,王孝坤,李龙响,等.大口径SiC离轴非球面的高效磨削加工[J].光学精密工程,2015,23(9):2497–2505.YIN Longhai,WANG Xiaokun,LI Longxiang,et al.Fast grinding of large SiC off–axis aspheric surface[J].Optics and Precision Engineering,2015,23(9):2497–2505.
[8]CHEN M J,LI Z,YU B,et al.On–machine precision preparation and dressing of ball–headed diamond wheel for the grinding of fused silica[J].Chinese Journal of Mechanical Engineering,2013,26(5):982–987.
[9]赵清亮,赵玲玲,王宇,等.电镀金刚石砂轮高效精密修整及熔融石英磨削试验研究[J].机械工程学报,2013,49(23):174–181.ZHAO Qingliang,ZHAO Lingling,WANG Yu,et al.High efficient precision conditioning of the electroplated diamond wheel and grinding of fused silica glass[J].Journal of Mechanical Engineering,2013,49(23):174–181.
[10]王振忠,郭隐彪,黄浩,等.先进光学磨削中杯形修整技术开发及应用[J].金刚石与磨料磨具工程,2009(1):18–22.WANG Zhenzhong,GUO Yinbiao,HUANG Hao,et al.Development and application of cup truer in advanced optical grinding[J].Diamond&Abrasives Engineering,2009(1):18–22.
[11]崔仲鸣,赫青山,冯创举,等.超硬磨料磨具修整技术研究[J].金刚石与磨料磨具工程,2016,36(1):43–49.CUI Zhongming,HE Qingshan,FENG Chuangju,et al.Study on dressing technology of superabrasive products[J].Diamond&Abrasives Engineering,2016,36(1):43–49.
[12]李圣怡,戴一凡.大中型光学非球面镜制造与测量新技术[M].北京:国防工业出版社,2011.LI Shengyi,DAI Yifan.New technology for manufacturing and measurement of large and middle–scale aspheric surfaces[M].Beijing:National Defense Industry Press,2011.
[13]LAMBROPOULOS J C,JACOBS S D,RUCKMAN J.Material removal mechanisms from grinding to polishing[J].Ceram.Trans.,1999,102:113–128.