摘要
慢刀伺服加工微结构阵列的轨迹特点会影响阵列中各单元误差分布的一致性,并导致单元边缘误差大。为了提高微结构阵列加工的一致性,提出一种针对微结构阵列的超精密偏心加工方法,实现阵列各个子单元的单独加工。采用多体系统理论和对对刀误差影响的分析,建立了刀具轨迹生成算法及表面预测模型。仿真分析结果表明超精密偏心加工方法有利于提高阵列单元的一致性,可避免加工过程中Z轴加速度过大对加工形貌的影响,提高子单元边缘部分的加工质量。
The tool loci of slow tool servo(STS) diamond turning for microstructure arrays affect the error distribution in different elements, and increase the error in the edge of elements. In this paper, an ultra-precision eccentrical machining method is proposed to improve the consistency of the microstructure, which can machine each element individually. Based on the multibody system theory and the analysis of the tool un-alignment, the tool locus generation algorithm and surface generation model are established. The simulation results show that the ultra-precision eccentrical machining method can improve the consistency of microstructure array. It also contributes to avoiding the influence of the Z axis acceleration fluctuation and improving the machining quality in the element boundaries.
引文
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