动态原子力显微镜悬臂高阶谐振相位特性研究
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摘要
硅悬臂具有多阶谐振的特性,基于这一特性,提出了在动态原子力显微镜(AFM)中,利用硅悬臂高阶谐振相位特性进行三维扫描的方法,并对悬臂高阶相位特性进行了理论分析与实验验证。从理论上分析了AFM悬臂高阶谐振相位特性较其一阶谐振的相位特性有更高的灵敏度和空间分辨力,在自制动态AFM的基础上加入相位反馈模块进行了实验,实验测得悬臂一阶、二阶谐振的灵敏度分别为9.0和17.5 V/μm;垂直方向空间分辨力分别为0.56和0.29 nm,实验结果与理论分析一致。通过悬臂二阶谐振相位扫描得到了光栅的表面形貌,证明了利用悬臂高阶谐振相位特性进行扫描的可行性。
Based on the higher-order resonance characteristic of the silicon cantilever,a method which makes use the phase characteristic of the cantilever working at the higher-order resonance mode in AFM( atomic force microscope) is proposed. And the theoretical analysis and experimental verification on the phase characteristic of the higher-order resonance cantilever are carried out. It is proved in theory that the phase characteristic of the higher-order resonance cantilever has higher flexural sensitivity and vertical spatial resolution than the first-order.The experiment is carried out on the basis of the home built dynamic AFM adding the phase feedback module,the flexural sensitivity of the first and the second order resonance cantilever measured in the experiment is 9. 0 and17. 5 V / μm,and the vertical spatial resolution is 0. 56 and 0. 29 nm,respectively. The experimental results are in agreement with the theoretical analysis. The surface profile of a grating is obtained by the cantilever scanning at the second order resonance in phase-feedback,which proves that using the phase characteristics of the higher-order resonance cantilever to measure the surface topography is feasible.
Based on the higher-order resonance characteristic of the silicon cantilever,a method which makes use the phase characteristic of the cantilever working at the higher-order resonance mode in AFM( atomic force microscope) is proposed. And the theoretical analysis and experimental verification on the phase characteristic of the higher-order resonance cantilever are carried out. It is proved in theory that the phase characteristic of the higher-order resonance cantilever has higher flexural sensitivity and vertical spatial resolution than the first-order.The experiment is carried out on the basis of the home built dynamic AFM adding the phase feedback module,the flexural sensitivity of the first and the second order resonance cantilever measured in the experiment is 9. 0 and17. 5 V / μm,and the vertical spatial resolution is 0. 56 and 0. 29 nm,respectively. The experimental results are in agreement with the theoretical analysis. The surface profile of a grating is obtained by the cantilever scanning at the second order resonance in phase-feedback,which proves that using the phase characteristics of the higher-order resonance cantilever to measure the surface topography is feasible.
引文
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[19]陈俊,徐志伟,陈杰.压电驱动器驱动电源设计[J].国外电子测量技术,2014,33(4):48-53.CHEN J,XU ZH W,CHEN J.Design of the piezoelectric actuator driving power[J].Foreign Electronic Measurement Technology,2014,33(4):48-53.
[2]LI M,LIU L Q,XI N,et,al.Progress of AFM singlecell and single-molecule morphology imaging[J].Chinese Science Bulletin,2013,58(26):3177-3182.
[3]MAY T M,KRISTIN B B,PAIGE A,et al.RNA isolation from single living cells using AFM[J].Biophysical Journal,2014,106(2):799.
[4]TAREFDER R A,AHSAN S.Neural network modelling of asphalt adhesion determined by AFM[J].Journal of Microscopy,2014,254(1):31-41.
[5]HO M H,LI C H,HSIAO S W,et al.Preparation ofchitosan/hydroxyapatite substrates with controllable osteoconductivity tracked by AFM[J].Annals of Biomedical Engineering,2015,43(4):1024-1035.
[6]KIEN X N,NORIYUKI K,AKRIA N,et al.Video imaging of cofilin-induced actin filament severing by high speed AFM[J].Biophysical Journal,2014,106(2):163a.
[7]TOSHIO A.High-speed AFM imaging[J].Current Opinion in Structural Biology,2014,28(1):63-68.
[8]KROHS F,HAGEMANN S,FATIKOW S,et al.Highspeed atomic force microscopy coming of age[J].IEEE Transactions on nanotechnology,2013,12(2):246-254.
[9]TOSHIO A,TAKAYUKI U,SIMON S.Filming biomolecular processes by high-speed atomic force microscopy[J].Chemical Reviews,2014,114(6):3120-3188.
[10]黄强先,袁丹,尤焕杰,等.动态AFM悬臂的高阶谐振特性研究及实验[J].仪器仪表学报,2013,34(12):2647-2652.HUANG Q X,YUAN D,YOU H J,et al.Research and experiment on higher-order resonance characteristic of dynamic AFM cantilever[J].Chinese Journal of Scientific Instrument,2013,34(12):2647-2652.
[11]黄强先,尤焕杰,袁丹,等.基于硅悬臂高阶谐振的动态原子力显微镜的快速扫描[J].光学精密工程,2014,22(3):656-662.HUANG Q X,YOU H J,YUAN D,et al.High speed scanning for dynamic atomic force microscope based on higher-order resonance of silicon cantilever[J].Optics and Precision Engineering,2014,22(3):656-663.
[12]赵阳,黄强先,张蕤.基于高阶谐振悬臂的轻敲式原子力显微镜测量特性[J].纳米技术与精密工程,2016,14(3):223-228.ZHAO Y,HUANG Q X,ZHANG R.Measurement characteristics of tapping-mode atomic force microscope based on the higher-order resonant cantilever[J].Nanotechnology and Precision Engineering,2016,14(3):223-228.
[13]DANZEBRINK H U,KOENDER L,WILKENING G,et al.Advances in scanning force microscopy for dimensional metrology[J].CIRP Annals,2006,55(2):841-878.
[14]WANG G F,FENG X Q.Effects of surface stresses on contact problems at nanoscale[J].Journal of Applied Physics,2007,101(1):013510.
[15]TSEYTLIN,YAKOV M.Atomic force microscope cantilever spring constant evaluation for higher mode oscillations:A kinetostatic method[J].Review of Scientific Instruments,2008,79(2):324-330.
[16]张春雷,刘健,王绍治,等.前馈控制算法校正相移微动台非线性运动[J].电子测量与仪器学报,2014,28(8):879-884.ZHANG CH L,LIU J,WANG SH ZH,et al.Feed forward control algorithm for nonlinear motion correction of phase shifting stage[J].Journal of Electronic Measurement and Instrumentation,2014,28(8):879-884.
[17]王栋,于鹏,周磊,等.基于梯形算子的AFM驱动器非对称迟滞性校正[J].仪器仪表学报,2015,36(1):32-39.WANG D,YU P,ZHOU L,et al.Asymmetric hysteresis calibration of AFM actuator based on keystone operator[J],Chinese Journal of Scientific Instrument,2015,36(1):32-39.
[18]王学亮,李佩玥,郑楠,等.运放对压电陶瓷驱动电路系统精度影响的研究[J].电子测量技术,2014,37(10):33-36.WANG X L,LI P Y,ZHENG N,et al.Study on the impact of operational amplifier on system accuracy of the PZT driving circuit[J].Electronic Measurement Technology,2014,37(10):33-36.
[19]陈俊,徐志伟,陈杰.压电驱动器驱动电源设计[J].国外电子测量技术,2014,33(4):48-53.CHEN J,XU ZH W,CHEN J.Design of the piezoelectric actuator driving power[J].Foreign Electronic Measurement Technology,2014,33(4):48-53.