宏/微运动控制的电感传感器动静态校准装置
|
摘要
为改善电感位移校准装置校准精度、校准量程及动态频响难以兼顾的问题,采用宏/微运动控制方法驱动校准装置作快速、精密、大范围定位。在简述校准方法工作原理及结构之后,对以静压双V导轨/直线电机组合的宏动平台及以柔性铰链/压电陶瓷组合的微动平台进行动力学建模,并获得宏微平台的传递函数。设计微动跟随宏动和宏动跟随微动两种控制策略,并进行建模和仿真分析,对比两种控制策略下的测量结果并分析原因。设计并搭建实验平台后进行校准装置的性能测试,实验结果表明:宏动跟随微动控制策略具有更高的动态频响性能,校准装置在全行程20 mm内分辨力达到5 nm,在幅值为0.05 mm的正弦频率响应实验中,动态频响达到100 Hz,可满足电感传感器的动静态校准要求。
To meet the requirements of calibration precision, calibration range and dynamic frequency response of the inductance displacement calibration device at the same time, a macro/micro motion control method is used to drive the calibration device for fast, precise and wide-range positioning. After briefly describing the working principle and structure of the calibration method, the kinematics modelings of the micro-motion platform with static hinged/piezoelectric ceramic combination and the macro-motion platform with static pressure floatation/linear motor combination are carried out, and the transfer function of the macro/micro platform is obtained. Two macro/micro control strategies, macro-follow-micro and micro-follow-macro, have been designed,simulated and compared. The experimental platform is built and the performance of the calibration device is tested. Experiment results show that the macro-follow-micro strategy has a higher dynamic frequency response performance. Calibration device has the ability of 5 nm resolution in the whole stroke of 20 mm, and the dynamic frequency response up to 100 Hz in the sinusoidal frequency response experiment with 0. 05 nm amplitude, which can prove that the calibration device has dynamic and static calibration capability.
To meet the requirements of calibration precision, calibration range and dynamic frequency response of the inductance displacement calibration device at the same time, a macro/micro motion control method is used to drive the calibration device for fast, precise and wide-range positioning. After briefly describing the working principle and structure of the calibration method, the kinematics modelings of the micro-motion platform with static hinged/piezoelectric ceramic combination and the macro-motion platform with static pressure floatation/linear motor combination are carried out, and the transfer function of the macro/micro platform is obtained. Two macro/micro control strategies, macro-follow-micro and micro-follow-macro, have been designed,simulated and compared. The experimental platform is built and the performance of the calibration device is tested. Experiment results show that the macro-follow-micro strategy has a higher dynamic frequency response performance. Calibration device has the ability of 5 nm resolution in the whole stroke of 20 mm, and the dynamic frequency response up to 100 Hz in the sinusoidal frequency response experiment with 0. 05 nm amplitude, which can prove that the calibration device has dynamic and static calibration capability.
引文
[1]刘凯,邹德福,廉五州,等.纳米传感器的研究现状与应用[J].仪表技术与传感器,2008(1):10-12.
[2]葛川,张德福,李朋志,等.电容式位移传感器的线性度标定与不确定度评定[J].光学精密工程,2015,23(9):2546-2552.
[3]李昕.线位移传感器自动校准装置研究[D].西安:西安电子科技大学,2014.
[4]薛梓,叶孝佑,杨国梁,等.高精度位移传感器动静态溯源和校准装置的研制[J].计量学报,2008,29(Z1):57-60
[5]张丰,曾燕华,张伟.线位移传感器的校准方法研究[J].光学仪器,2016,38(1):63-68.
[6]Xue Z,Ye S L,Ye X Y.The study and realization of standard dynamic signals of dynamic characteristic calibration for high precision displacement sensor[C]//Fifth International Symposium on Instrumentation Science and Technology.2009.
[7]Heertjes M,Temizer B.Data-based control tuning in masterslave systems[C]//2012 American Control Conference.2012:2461-2466.
[8]陈琦.大行程纳米级定位工作台的结构设计[J].光学精密工程,2016,24(5):1065-1071.
[9]吴剑威,袁勇,崔继文,等.双工件台宏微交接系统设计及实验[J].光学精密工程,2015,23(6):1673-1680.
[10]Pahk H J,Lee D S,Park J H.Ultra precision positioning system for servo motor piezo actuator using the dual servo loop and digital filter implementation[J].International Journal of Machine Tools&Manufacture,2001,41(1):51-63.
[11]Buice E S,Otten D,Yang R H,et al.Design evaluation of a single-axis precision controlled positioning stage[J].Precision Engineering,2009,33(4):418-424
[12]Shinno H,Yoshioka H,Sawano H.A newly developed long range positioning table system with a sub-nanometer resolution[J].CIRP Annals-Manufacturing Technology,2011,60(1):403-406
[13]匡也.高精度电感位移传感器校准平台设计[D].哈尔滨:哈尔滨工业大学,2016.
[14]翟小玉.三光轴集成式单频激光干涉测量关键技术研究[D].哈尔滨:哈尔滨工业大学,2015.
[2]葛川,张德福,李朋志,等.电容式位移传感器的线性度标定与不确定度评定[J].光学精密工程,2015,23(9):2546-2552.
[3]李昕.线位移传感器自动校准装置研究[D].西安:西安电子科技大学,2014.
[4]薛梓,叶孝佑,杨国梁,等.高精度位移传感器动静态溯源和校准装置的研制[J].计量学报,2008,29(Z1):57-60
[5]张丰,曾燕华,张伟.线位移传感器的校准方法研究[J].光学仪器,2016,38(1):63-68.
[6]Xue Z,Ye S L,Ye X Y.The study and realization of standard dynamic signals of dynamic characteristic calibration for high precision displacement sensor[C]//Fifth International Symposium on Instrumentation Science and Technology.2009.
[7]Heertjes M,Temizer B.Data-based control tuning in masterslave systems[C]//2012 American Control Conference.2012:2461-2466.
[8]陈琦.大行程纳米级定位工作台的结构设计[J].光学精密工程,2016,24(5):1065-1071.
[9]吴剑威,袁勇,崔继文,等.双工件台宏微交接系统设计及实验[J].光学精密工程,2015,23(6):1673-1680.
[10]Pahk H J,Lee D S,Park J H.Ultra precision positioning system for servo motor piezo actuator using the dual servo loop and digital filter implementation[J].International Journal of Machine Tools&Manufacture,2001,41(1):51-63.
[11]Buice E S,Otten D,Yang R H,et al.Design evaluation of a single-axis precision controlled positioning stage[J].Precision Engineering,2009,33(4):418-424
[12]Shinno H,Yoshioka H,Sawano H.A newly developed long range positioning table system with a sub-nanometer resolution[J].CIRP Annals-Manufacturing Technology,2011,60(1):403-406
[13]匡也.高精度电感位移传感器校准平台设计[D].哈尔滨:哈尔滨工业大学,2016.
[14]翟小玉.三光轴集成式单频激光干涉测量关键技术研究[D].哈尔滨:哈尔滨工业大学,2015.