Work Function Enhancement of Indium Tin Oxide via Oxygen Plasma Immersion Ion Implantation

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英文篇名：Work Function Enhancement of Indium Tin Oxide via Oxygen Plasma Immersion Ion Implantation 作者：高欢忠 ; 何龙 ; 何志江 ; 李泽斌 ; 吴忠航 ; 成卫海 ; 艾畦 ; 范晓轩 ; 区琼荣 ; 梁荣庆 英文作者：GAO Huanzhong , HE Long , HE Zhijiang , LI Zebin , WU Zhonghang , CHENG Weihai , AI Qi , FAN Xiaoxuan , OU Qiongrong , LIANG Rongqing Department of Illuminating Engineering and Light Sources, Institute for Electric Light Sources, Fudan University, Shanghai 200433, China 英文关键词：plasma immersion ion implantation, surface treatment, work function, indium tin oxide 中文刊名：DNZK 英文刊名：等离子体科学和技术(英文版) 机构：Department of Illuminating Engineering and Light Sources,Institute for Electric Light Sources,Fudan University; 出版日期：2013-08-15 出版单位：Plasma Science and Technology 年：2013 期：v.15 基金：supported by National Natural Science Foundation of China(Nos.11005021,51177017 and 11175049) 语种：英文; 页：DNZK201308016 页数：3 CN：08 ISSN：34-1187/TL 分类号：75-77

摘要

Indium tin oxide (ITO) transparent conducting film was treated with oxygen plasma immersion ion implantation (PIII). X-ray photoelectron spectroscopy (XPS) was employed to characterize the effect. The results suggested that the oxygen content in the surface was increased and maintained for more than 50 h compared with traditional plasma-treated samples. Meanwhile, the work function of ITO estimated by comparing the peak shift in the XPS diagram suggested a corresponding increase by more than 1 eV.
        Indium tin oxide (ITO) transparent conducting film was treated with oxygen plasma immersion ion implantation (PIII). X-ray photoelectron spectroscopy (XPS) was employed to characterize the effect. The results suggested that the oxygen content in the surface was increased and maintained for more than 50 h compared with traditional plasma-treated samples. Meanwhile, the work function of ITO estimated by comparing the peak shift in the XPS diagram suggested a corresponding increase by more than 1 eV.

引文

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