Enhanced Work Function of Al-Doped Zinc-Oxide Thin Films by Oxygen Inductively Coupled Plasma Treatment

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英文篇名：Enhanced Work Function of Al-Doped Zinc-Oxide Thin Films by Oxygen Inductively Coupled Plasma Treatment 作者：李泽斌 ; 吴忠航 ; 居家奇 ; 何孔多 ; 陈枕流 ; 杨曦露 ; 颜航 ; 区琼荣 ; 梁荣庆 英文作者：LI Zebin;WU Zhonghang;JU Jiaqi;HE Kongduo;CHEN Zhenliu;YANG Xilu;YAN Hang;OU Qiongrong;LIANG Rongqing;Department of Light Sources and Illuminating Engineering,Fudan University;Engineering Research Center of Advanced Lighting Technology,Ministry of Education; 英文关键词：oxygen inductively coupled plasma,Al-doped zinc-oxide(AZO),work function 中文刊名：DNZK 英文刊名：等离子体科学和技术(英文版) 机构：Department of Light Sources and Illuminating Engineering,Fudan University;Engineering Research Center of Advanced Lighting Technology,Ministry of Education; 出版日期：2014-01-15 出版单位：Plasma Science and Technology 年：2014 期：v.16 基金：supported by National Natural Science Foundation of China(Nos.11005021,51177017 and 11175049);; the Fudan University Excellent Doctoral Research Program(985 Project);; the Ph.D Programs Foundation of Ministry of Education of China(No.20120071110031) 语种：中文; 页：DNZK201401018 页数：4 CN：01 ISSN：34-1187/TL 分类号：83-86

摘要

Al-doped zinc-oxide(AZO) thin films treated by oxygen and chlorine inductively coupled plasma(ICP) were compared. Kelvin probe(KP) and X-ray photoelectron spectroscopy(XPS) were employed to characterize the e?ect of treatment. The results of KP measurement show that the surface work function of AZO thin films can increase up to 5.92 eV after oxygen ICP(O-ICP)'s treatment, which means that the work function was increased by at least 1.1 eV. However, after the treatment of chlorine ICP(Cl-ICP), the work function increased to 5.44 eV, and the increment was 0.6 eV. And 10 days later, the work function increment was still 0.4 eV after O-ICP's treatment, while the work function after Cl-ICP's treatment came back to the original value only after 48 hours. The XPS results suggested that the O-ICP treatment was more e?ective than Cl-ICP for enhancing the work function of AZO films, which is well consistent with KP results.
        Al-doped zinc-oxide(AZO) thin films treated by oxygen and chlorine inductively coupled plasma(ICP) were compared. Kelvin probe(KP) and X-ray photoelectron spectroscopy(XPS) were employed to characterize the e?ect of treatment. The results of KP measurement show that the surface work function of AZO thin films can increase up to 5.92 eV after oxygen ICP(O-ICP)'s treatment, which means that the work function was increased by at least 1.1 eV. However, after the treatment of chlorine ICP(Cl-ICP), the work function increased to 5.44 eV, and the increment was 0.6 eV. And 10 days later, the work function increment was still 0.4 eV after O-ICP's treatment, while the work function after Cl-ICP's treatment came back to the original value only after 48 hours. The XPS results suggested that the O-ICP treatment was more e?ective than Cl-ICP for enhancing the work function of AZO films, which is well consistent with KP results.

引文

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