Experimental Investigation of Surface Wave Plasma Excited by a Cylindrical Dielectric Rod

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英文篇名：Experimental Investigation of Surface Wave Plasma Excited by a Cylindrical Dielectric Rod 作者：吴忠航 ; 李泽斌 ; 居家奇 ; 何孔多 ; 杨曦露 ; 颜航 ; 陈枕流 ; 区琼荣 ; 梁荣庆 英文作者：WU Zhonghang;LI Zebin;JU Jiaqi;HE Kongduo;YANG Xilu;YAN Hang;CHEN Zhenliu;OU Qiongrong;LIANG Rongqing;Department of Light Sources and Illuminating Engineering,Institute for Electric Light Sources,Fudan University;Engineering Research Centre of Advanced Lighting Technology,Ministry of Education; 英文关键词：surface wave plasma,dielectric rod,electron density,electron temperature 中文刊名：DNZK 英文刊名：等离子体科学和技术(英文版) 机构：Department of Light Sources and Illuminating Engineering,Institute for Electric Light Sources,Fudan University;Engineering Research Centre of Advanced Lighting Technology,Ministry of Education; 出版日期：2014-02-15 出版单位：Plasma Science and Technology 年：2014 期：v.16 基金：supported by National Natural Science Foundation of China(Nos.11005021,51177017 and 11175049);; the Fudan University Excellent Doctoral Research Program(985 Project);; the Ph.D Programs Foundation of Ministry of Education of China(No.20120071110031) 语种：英文; 页：DNZK201402007 页数：5 CN：02 ISSN：34-1187/TL 分类号：34-38

摘要

An improved surface wave plasma source equipped with a cylindrical quartz rod has been developed,which has great potential in processing inner wall of cylindrical workpieces. A cylindrical quartz rod not only excites the plasma around the rod,but also guides surface wave plasma along the rod. The distributions of plasma density and plasma temperature under different incident microwave powers and pressures are diagnosed by a Langmuir probe. The electron density near the rod is around the order of 1011cm-3. When the incident power is 450 W,the length of surface wave plasma column can reach up to 420 mm at 20 Pa.
        An improved surface wave plasma source equipped with a cylindrical quartz rod has been developed,which has great potential in processing inner wall of cylindrical workpieces. A cylindrical quartz rod not only excites the plasma around the rod,but also guides surface wave plasma along the rod. The distributions of plasma density and plasma temperature under different incident microwave powers and pressures are diagnosed by a Langmuir probe. The electron density near the rod is around the order of 1011cm-3. When the incident power is 450 W,the length of surface wave plasma column can reach up to 420 mm at 20 Pa.

引文

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