窄带滤光片设计中敏感度的影响因素
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摘要
窄带滤光片设计中,通过改变一些参数可以设计出性能较好的窄带滤光片,但是有些理论设计却和制备的结果不符.为了揭示它们之间的变化关系,在光学薄膜设计软件Essential Macleod中进行了模拟试验.针对窄带膜系中的高低折射率间隔层、反射层层数、干涉级次和腔数对窄带滤光片设计与制备中敏感度的影响进行了分析.结果表明:增加反射层层数,会使陡度变好,半宽度变窄,矩形度变差,同时无论采用高折射率还是低折射率材料为间隔层都会增加膜系的敏感度,增大制备难度;增加干涉级次,会使陡度变好,半带宽变窄,矩形度变好,窄带滤光片的敏感度不会受到影响,然而当采用低折射率材料作为间隔层时,随着干涉级次的增加,敏感层(间隔层)会增大厚度误差和制作难度;增加腔数,会使陡度变好,半宽度变宽,矩形度变好,若以高折射率材料为间隔层则对膜系的敏感度没有影响,但是若以低折射率材料为间隔层则会增加膜系的敏感度.
For designing narrow band-pass filter,better narrow-band filter can be obtained by changing some parameters,but some theoretical designs are different with preparation results.To reveal the relationship between design and preparation,the simulation experiments were carried out with Essential Macleod software.The effects of high and low refractive index interval layer,number of reflectors,interference order and number of cavities on the sensitivity of narrow band-pass filter design and preparation were analyzed.The results show that the steepness can be improved with increased half bandwidth and rectangularity when the number of mirror layers is increased.The sensitivities of thin film narrow band-pass filters with both high and low refractive index cavity layer are increased,and the fabrication difficulty is increased.With the increasing of interference orders,the steepness is improved with decreased half bandwidth and increased rectangularity,and the sensitivity of thin film narrow bandpass filters cannot be affected.Using low refractive index material as cavity layer,the sensitive layers(cavity layer) can increase the thickness error and the fabrication difficulty with the increasing of interference orders.With the increasing of the number of cavities,the steepness can be improved with increased half bandwidth and rectangularity.The sensitivity of thin film narrow band-pass filters cannot be affected with high refractive index materials as cavity layer,while it is increased with low refractive index materials as cavity layer.
For designing narrow band-pass filter,better narrow-band filter can be obtained by changing some parameters,but some theoretical designs are different with preparation results.To reveal the relationship between design and preparation,the simulation experiments were carried out with Essential Macleod software.The effects of high and low refractive index interval layer,number of reflectors,interference order and number of cavities on the sensitivity of narrow band-pass filter design and preparation were analyzed.The results show that the steepness can be improved with increased half bandwidth and rectangularity when the number of mirror layers is increased.The sensitivities of thin film narrow band-pass filters with both high and low refractive index cavity layer are increased,and the fabrication difficulty is increased.With the increasing of interference orders,the steepness is improved with decreased half bandwidth and increased rectangularity,and the sensitivity of thin film narrow bandpass filters cannot be affected.Using low refractive index material as cavity layer,the sensitive layers(cavity layer) can increase the thickness error and the fabrication difficulty with the increasing of interference orders.With the increasing of the number of cavities,the steepness can be improved with increased half bandwidth and rectangularity.The sensitivity of thin film narrow band-pass filters cannot be affected with high refractive index materials as cavity layer,while it is increased with low refractive index materials as cavity layer.
引文
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[11]中国科学院上海技术物理研究所.4.26微米窄带滤光片:95244862.9[P].1997-04-16.
[2]李冬梅,刘爽,付秀华,等.红外线治疗仪中宽波段带通滤光片的研究[J].光子学报,2015,44(3):0301001.LI D M,LIU S,FU X H,et al.Study and fabrication of broad-pass filters in infrared therapy apparatus[J].Acta Photonica Sinica,2015,44(3):0301001.(in Chinese)
[3]陈朝平,师建涛,郭芮,等.中红外带通滤光片的设计与制备[J].应用光学,2012,33(3):595-598.CHEN C P,SHI J T,GUO R,et al.Design and preparation of mid-infrared band-pass filter[J].Journal of Applied Optics,2012,33(3):595-598.(in Chinese)
[4]王航,熊长新,何光宗.组合结构的中红外带通滤光片研制[J].光学与光电技术,2015,13(4):83-86.WANG H,XIONG C X,HE G Z.Design and preparation of medium-wavelength infrared band pass combined filter[J].Optics&Optoelectronic Technology,2015,13(4):83-86.(in Chinese)
[5]刘冬梅,王晓娟,付秀华,等.近红外宽截止窄带滤光片的研制[J].光子学报,2014,43(1):0131002.LIU D M,WANG X J,FU X H,et al.Design and fabrication of near-infrared narrow-band filters with wide rejection band[J].Acta Photonica Sinica,2014,43(1):0131002.(in Chinese)
[6]朱华新,高劲松,王彤彤,等.宽截止窄带滤光片设计[J].红外技术,2010,32(9):532-534.ZHU H X,GAO J S,WANG T T,et al.Design of wide stop-band and narrow pass-band filters[J].Infrared Techno-logy,2010,32(9):532-534.(in Chinese)
[7]卢进军,刘卫国.光学薄膜技术[M].西安:电子工业大学出版社,2011.
[8]唐晋发,顾培夫,刘旭,等.现代光学薄膜技术[M].杭州:浙江大学出版社,2006.
[9]MACLEOD H A.Thin-Film Optical Filters[M].Bristol and Philadelphia:Institute of Physics Publishing,2006.
[10]贾钰超,李刚,白玉琢,等.窄带滤光片设计中通带半宽度、矩形度和陡度的影响因素研究[J].红外技术,2012,34(8):448-452.JIA Y C,LI G,BAI Y Z,et al.Study of factors influencing half bandwidth,rectangularity and steepness in design of narrow band-pass filter[J].Infrared Technology,2012,34(8):448-452.(in Chinese)
[11]中国科学院上海技术物理研究所.4.26微米窄带滤光片:95244862.9[P].1997-04-16.