近红外宽截止窄带滤光膜的研制
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摘要
在空间光通信系统中,为满足光学系统对滤光膜的特殊要求,研制出了一种近红外宽截止窄带滤光膜,实现了降低深背景范围内杂散光干扰的要求.通过对薄膜材料特性的研究、膜系设计曲线的不断优化,得到了相对易于制备的窄带滤光膜结构;采用电子束加热蒸发及离子辅助沉积技术制备薄膜,采用光控加晶控同时监控的方法监控膜层厚度,通过不断优化工艺参量,提高中心波长处的透过率,最终成功得到了光谱性能较好的滤光膜.经光谱测试表明:所镀膜层在800~1 530nm、1 600~1 800nm波段平均透过率低于0.3%,1 565nm单点透过率高于92%,通带半带宽为18nm,满足光学系统的使用要求.
In order to meet the special requirements for filter coating of the space optical communication system,a narrow-band filter with high rejection in near-infrared band was prepared.The filter can reduce the interference of the stray light perfectly in the range of deep background.Through analyzing the characteristics of the coating materials,continually optimizing the film system design curve,an easily prepared narrow-band filter film structure was obtained.Thin films were prepared through electron beam evaporation method and ion-assisted deposition technique,and the thickness of the filter was controlled using crystal-controlled and light control monitoring methods at the same time.By continually optimizing technical parameters,the transmittance of the central wavelength increased,and the filter membrane with better spectral performance was obtained successfully.After the spectrum testing,the average transmittance of the filter is lower than 0.3%at the band of 800~1 530nm and 1 600~1 800nm,the transmittance at 1 565nm is higher than 92%and the full-width at half maximum of the filter is 18nm,and the technical requirements of the optical system are satisfied.
In order to meet the special requirements for filter coating of the space optical communication system,a narrow-band filter with high rejection in near-infrared band was prepared.The filter can reduce the interference of the stray light perfectly in the range of deep background.Through analyzing the characteristics of the coating materials,continually optimizing the film system design curve,an easily prepared narrow-band filter film structure was obtained.Thin films were prepared through electron beam evaporation method and ion-assisted deposition technique,and the thickness of the filter was controlled using crystal-controlled and light control monitoring methods at the same time.By continually optimizing technical parameters,the transmittance of the central wavelength increased,and the filter membrane with better spectral performance was obtained successfully.After the spectrum testing,the average transmittance of the filter is lower than 0.3%at the band of 800~1 530nm and 1 600~1 800nm,the transmittance at 1 565nm is higher than 92%and the full-width at half maximum of the filter is 18nm,and the technical requirements of the optical system are satisfied.
引文
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[14]SHEN Yi,LIU Dong-mei,FU Xiu-hua,et al.Research and preparation of the ultraviolet communication filters[J].Chinese Journal of Lasers,2011,38(12):1207005.沈弈,刘冬梅,付秀华,等.紫外光通信滤光膜的研制[J].中国激光,2011,38(12):1207005.
[15]FU Xiu-hua,SUN Ying-jie,LIU Dong-mei,et al.Study and fabrication of visible and infrared broadband antireflection coating[J].Acta Optica Sinica,2013,33(3):0331002.付秀华,孙英杰,刘冬梅,等.可见与近红外宽带减反膜的研制[J].光学学报,2013,33(3):0331002.
[16]FU Xiu-hua,WANG Gang,LIU Dong-mei,et al.Research and preparation of the visible and infrared control and guide system filters[J].Chinese Journal of Lasers,2013,40(1):0107001-5.王刚,付秀华,刘冬梅,等.可见红外制导系统高通滤光片的研制[J].中国激光,2013,40(1):0107001-5.
[2]FU Lian-xiao,WU Yong-gang,ZHENG Xiu-ping,et al.Design and preparation of narrowband filter with central wavelength 121.6nm in vacuum ultraviolet region[J].Acta Optica Sinica,2008,28(12):2427-2430.付联效,吴永刚,郑秀萍,等.中心波长121.6nm的真空紫外窄带滤光片设计和制备[J].光学学报,2008,28(12):2427-2430.
[3]FU Xiu-hua,KOU Yang,LIU Dong-mei,et al.Research of ultraviolet induced transmission filter for the solar blind system[J].Chinese Journal of Lasers,2013,40(5):0507002.付秀华,寇洋,刘冬梅,等.日盲系统紫外诱导滤光片的研制[J].中国激光,2012,40(5):0507002.
[4]YU Kan,LIAO Jian-feng,ZHANG Xiao-dan,et al.Optimal design of narrowband filter in oblique incidence based on genetic arithmetic[J].Acta Photonica Sinica,2013,42(2):181-185.俞侃,廖剑锋,张晓丹,等.基于遗传算法的斜入射窄带滤光片膜系优化设计[J].光子学报,2013,42(2):181-185.
[5]LI Shan,FU Xiu-hua,SU Jia-ni,et al.Fabrication of filter film using in lida ranging system[J].Infrared and Laser Engineering,2010,39(5):853-856.
[6]YANG Yong-liang,LIU Guo-jun,FU Xiu-hua,et al.Study and fabrication of filter film in laser identification between friend or foe system[J].Acta Optica Sinica,2012,32(1):0131002.杨永亮,刘国军,付秀华,等.激光敌我识别系统中滤光膜的研制[J].光学学报,2012,32(1):0131002.
[7]CHEN Chao-ping,SHI Jian-tao,GUO Rui,et al.Design and preparation of mid-infrared band-pass filter[J].Journal of Applied Optics,2012,33(3):595-598.陈建平,师建涛,郭芮,等.中红外带通滤光片的设计与制备.应用光学,2012,33(3):595-598.
[8]钟迪生.真空镀膜—光学材料的选择与应用[M].沈阳:辽宁大学出版社,2001.235-241,252-265.
[9]JIA Yu-chao,LI Gang,BAI Yu-zhuo,et al.Study of factors influencing half band width rectangularity and steepness in design of narrow bend-pass filter[J].Infrared Technology,2012,34(8):448-452.贾钰超,李刚,白玉琢,等.窄带滤光片设计中通带半宽度、矩形度和陡度的影响因素研究[J].红外技术,2012,34(8):448-452.
[10]唐晋发,顾培夫,刘旭等.现代光学薄膜技术[M].浙江:浙江大学出版社,2006:114-118.
[11]PAN Yong-qiang,ZHU Chang,MI Qian,et al.The optical properties of TiO2thin film prepared by electron beam evaporation[J].Applied Optics,2004,25(5):53-55.潘永强,朱昌,弥谦,等.电子束蒸发TiO2薄膜的光学特性[J].应用光学,2004,25(5):53-55.
[12]JANG Xiao-dong,HUANG Zu-xin,REN Huan,et al.Study of laser conditioning process for optical film[J].High Power Laser and Particle Beams,2001,14(3):321-324.蒋晓东,黄祖鑫,任寰,等.光学膜层激光预处理过程研究[J].强激光与粒子束,2002,14(3):321-324.
[13]ZHAN Mei-qiong,ZHANG Dong-ping,YANG Jian,et al.Thickness monitoring by quartz crystal oscillation for optical coatings[J].Acta Photonica Sinica,2004,33(5):585-588.占美琼,张东平,杨健,等.石英晶体振荡法监控膜厚研究[J].光子学报,2004,33(5):585-588.
[14]SHEN Yi,LIU Dong-mei,FU Xiu-hua,et al.Research and preparation of the ultraviolet communication filters[J].Chinese Journal of Lasers,2011,38(12):1207005.沈弈,刘冬梅,付秀华,等.紫外光通信滤光膜的研制[J].中国激光,2011,38(12):1207005.
[15]FU Xiu-hua,SUN Ying-jie,LIU Dong-mei,et al.Study and fabrication of visible and infrared broadband antireflection coating[J].Acta Optica Sinica,2013,33(3):0331002.付秀华,孙英杰,刘冬梅,等.可见与近红外宽带减反膜的研制[J].光学学报,2013,33(3):0331002.
[16]FU Xiu-hua,WANG Gang,LIU Dong-mei,et al.Research and preparation of the visible and infrared control and guide system filters[J].Chinese Journal of Lasers,2013,40(1):0107001-5.王刚,付秀华,刘冬梅,等.可见红外制导系统高通滤光片的研制[J].中国激光,2013,40(1):0107001-5.