化学气相沉积法制备Co-Re涂层沉积设备设计与实验
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摘要
设计了Co-Re化学气相沉积设备。该设备采用两个升华室,分别以Co(acac)_2和Re_2(CO)_(10)为前驱体,通过运载气体H_2输运至反应室,在速射武器身管钢基体上(0CrNi2MoVA型钢材)同时沉积Co原子和Re原子,生成Co-Re合金抗烧蚀涂层。文章介绍了设备的原理和构成以及设备控制系统的设计方案,并着重介绍了利用道尔顿分压定律设计计算设备的升华室、反应室尺寸。经过初步的测试表明:该设备能够为Co-Re涂层的制备提供合适的温度与气压,并且结构简单、制造成本低,可用于Co-Re合金涂层的制备与研究。
The Co-Re chemical vapor deposition equipment was designed. The two sublimation chambers were used as precursors of Co(acac)_2 and Re_2(CO)_(10) respectively. The carrier gas H_2 was transported to the reaction chamber, and the Co atom and Re atoms were deposited on the steel matrix of the rapid fire body tube(0 CrNi2 MoVA type steel) to produce the anti ablative coating of the Co-Re alloy.That the principle and composition of the equipment as well as the design scheme of the equipment control system was introduced in this paper, and the design of the sublimation chamber and the size of the reaction chamber was emphasized by using the Dalton's law of partial pressure. The preliminary test showed that the equipment can provide suitable temperature and pressure for the preparation of Co-Re coating, and the structure is simple and the manufacturing cost is low. It can be used in the preparation and research of Co-Re alloy coating.
The Co-Re chemical vapor deposition equipment was designed. The two sublimation chambers were used as precursors of Co(acac)_2 and Re_2(CO)_(10) respectively. The carrier gas H_2 was transported to the reaction chamber, and the Co atom and Re atoms were deposited on the steel matrix of the rapid fire body tube(0 CrNi2 MoVA type steel) to produce the anti ablative coating of the Co-Re alloy.That the principle and composition of the equipment as well as the design scheme of the equipment control system was introduced in this paper, and the design of the sublimation chamber and the size of the reaction chamber was emphasized by using the Dalton's law of partial pressure. The preliminary test showed that the equipment can provide suitable temperature and pressure for the preparation of Co-Re coating, and the structure is simple and the manufacturing cost is low. It can be used in the preparation and research of Co-Re alloy coating.
引文
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[13]CHARLES R G,HAVERLACK P G.The chemical vapor deposition of cobalt metal from Cobalt(II)acetylacetonate[J].J.inorg,nucl.Chem,1969,31:995-1005.
[14]丁黎光,黄英发,丁伟.DJR-7型等离子体加热装置的研究与应用[J].机械设计与研究,2001,16(4):54-55.
[15]王晟.MOCVD设备气体输运与加热控制系统设计[D].武汉:华中科技大学,2008.
[16]李成祥,张耀磊,沈毅军,等.基于PLC的钣金成型自动化设备设计[J].机械设计与研究,2018,34(3):163-166.
[2]SCHOENMAN L.4000 F materials for low-thrust rocket engines[J].Journal of Propulsion and Power,1995,11(6):1261-1267.
[3]陈永才,宋遒志,王建中.国内外火炮身管延寿技术研究进展[J].兵工学报,2006,27(2):330-334.
[4]彭小敏,夏长清,吴安如,等.火炮身管烧蚀及其防护研究进展[J].兵器装备工程学报,2014,35(3):11-17.
[5]张绪虎,汪翔,贾中华,等.小推力姿/轨控液体火箭发动机材料的研究进展[J].宇航材料工艺,2005,35(5):11-15.
[6]李靖华,胡昌义.化学气相沉积法制备铼管的研究[J].宇航材料工艺,2001,31(4):54-56.
[7]黎宪宽,陈力,蔡宏中,等.化学气相沉积技术及在难熔金属材料中的应用[J].稀有金属材料与工程,2010,39(Z1):438-443.
[8]杨诗瑞.化学气相沉积制备高纯度Re、Ir的相关机理研究[D].北京:北京理工大学,2015.
[9]BRONISLAVA G,HANS-J U··RGEN C,DEBASHIS M,et al.Thermodynamic calculations in the development of hightemperature Co-Re-based alloys[J].Journal of Alloys and Compounds,2014,582(1):50-58.
[10]GARRETT W,SHERMAN A J,STIGLICH J.Rhenium as a hard chrome replacement for gun tubes[J].Advanced Manufacturing Processes,2006,21(6):618-620.
[11]BAI M,LIU Z H,ZHOU L J,et al.Preparation of ultrafine rhenium powders by CVD hydrogen reduction of volatile rhenium oxides[J].Transactions of Nonferrous Metals Society of China,2013,23(2):538-542.
[12]GELFOND N V,MOROZOVA N B,FILATOV E S,et al.Structure of rhenium coating obtained by CVD[J].Journal of structural chemistry,2009,50(6):1126-1133.
[13]CHARLES R G,HAVERLACK P G.The chemical vapor deposition of cobalt metal from Cobalt(II)acetylacetonate[J].J.inorg,nucl.Chem,1969,31:995-1005.
[14]丁黎光,黄英发,丁伟.DJR-7型等离子体加热装置的研究与应用[J].机械设计与研究,2001,16(4):54-55.
[15]王晟.MOCVD设备气体输运与加热控制系统设计[D].武汉:华中科技大学,2008.
[16]李成祥,张耀磊,沈毅军,等.基于PLC的钣金成型自动化设备设计[J].机械设计与研究,2018,34(3):163-166.