Si/Ti原子比对TiO_2-SiO_2复合薄膜亲水性能与摩擦磨损性能的影响
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摘要
采用直流(DC)反应磁控溅射法在玻璃上制备了不同Si/Ti原子比的TiO_2-SiO_2复合薄膜。使用X射线衍射仪(XRD)、场发射扫描电子显微镜(SEM)、X射线光电子能谱仪(XPS)、紫外可见分光光度计、CA-XP150型接触角仪、UMT-2型多功能微摩擦仪,研究了不同Si/Ti原子比的TiO_2-SiO_2复合薄膜微观结构、表面形貌、亲水性能和摩擦磨损性能。结果表明,所制备的纯TiO_2薄膜具有锐钛矿结构,其平均晶粒尺寸为11 nm,TiO_2-SiO_2复合薄膜呈现非晶结构,其粒子尺寸相对减小;随着Si/Ti原子比的增大,薄膜在可见光区的平均透过率从76. 6%增加到84. 3%。当复合薄膜中Si/Ti原子比为1∶2时,薄膜的摩擦系数为0. 11,薄膜具有最佳的亲水性能;在紫外光照射2 h后水接触角降到3. 0°;在黑暗中放置30 h后水接触角略增加到7. 7°。
TiO_2-SiO_2 composite films with different atomic ratios of Si/Ti were deposited on glass by direct current( DC) reactive magnetron sputtering technique. The microstructure, surface morphology,hydrophilic properties and friction and wear properties of TiO_2-SiO_2 composite films as a function with various atomic of Si/Ti ratios were investigated by using X-ray diffraction,scanning electron microscope,X-ray photoelectron spectroscopy,spectrophotometer,CA-XP150 contact angle meter,UMT-2 multifunction micro-friction meter. It was showed that,the prepared pure TiO_2 was polycrystalline anatase phase with an average grain size of 11 nm,and the particle size of the TiO_2-SiO_2 composite films exhibited an amorphous phase was relatively reduced; as the atomic ratio of Si/Ti increases,the average transmittance of the film in the visible light region increased from 76. 6% to 84. 3%. The film possess the best hydrophilic property among all the grown samples when the atomic ratios of Si/Ti were 1 ∶ 2 in composite films,the friction coefficient of the composite film was 0. 11,the water contact angle of this film decreased drastically to 3. 0° after 2 h of UV irradiation and the water contact angle increased slightly to 7. 7° after it was remained in dark for 30 h.
TiO_2-SiO_2 composite films with different atomic ratios of Si/Ti were deposited on glass by direct current( DC) reactive magnetron sputtering technique. The microstructure, surface morphology,hydrophilic properties and friction and wear properties of TiO_2-SiO_2 composite films as a function with various atomic of Si/Ti ratios were investigated by using X-ray diffraction,scanning electron microscope,X-ray photoelectron spectroscopy,spectrophotometer,CA-XP150 contact angle meter,UMT-2 multifunction micro-friction meter. It was showed that,the prepared pure TiO_2 was polycrystalline anatase phase with an average grain size of 11 nm,and the particle size of the TiO_2-SiO_2 composite films exhibited an amorphous phase was relatively reduced; as the atomic ratio of Si/Ti increases,the average transmittance of the film in the visible light region increased from 76. 6% to 84. 3%. The film possess the best hydrophilic property among all the grown samples when the atomic ratios of Si/Ti were 1 ∶ 2 in composite films,the friction coefficient of the composite film was 0. 11,the water contact angle of this film decreased drastically to 3. 0° after 2 h of UV irradiation and the water contact angle increased slightly to 7. 7° after it was remained in dark for 30 h.
引文
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[2]Rong Wang,Kazuhito Hashimoto,Akira Fujishima,et al.Light-induced Amphiphilic Surfaces[J].Nature,1997,388(6641):431-432.
[3]Lee Y C,Hong Y P,Lee H Y,et al.Photocatalysis and Hydrophilicity of Doped Ti O2Thin Films[J].Journal of Colloid&Interface Science,2003,267(1):127-131.
[4]Yu J,Zhao X.Effect of Surface Treatment on the Photocatalytic Activity and Hydrophilic Property of the Sol-gel Derived Ti O2Thin Films[J].Materials Research Bulletin,2001,36(1):97-107.
[5]Takeuchi M,Onozaki Y,Matsumura Y,et al.Photoinduced Hydrophilicity of Ti O2Thin Film Modified by Ar Ion Beam Irradiation[J].Nuclear Instruments&Methods in Physics Research,2003,206(1):259-263.
[6]Maeda M,Yamasaki S.Effect of Silica Addition on Crystallinity and Photo-induced Hydrophilicity of Titania-Silica Mixed Films Prepared by Solgel Process[J].Thin Solid Films,2005,483(1):102-106.
[7]Liu Y Y,Qian L Q,Guo C,et al.Natural Superhydrophilic Ti O2/Si O2Composite Thin Films Deposited by Radio Frequency Magnetron Sputtering[J].Journal of Alloys&Compounds,2009,479(1):532-535.
[8]Mirshekari M,Azimirad R,Moshfegh A Z.Superhydrophilic Stability Enhancement of RF Co-sputtered TixSi1-xO2Thin Films In Dark[J].Applied Surface Science,2010,256(8):2500-2506.
[9]Adamczyk A,Rokita M.The Structural Studies of Ag Containing Ti O2-SiO2Gels and Thin Films Deposited on Steel[J].Journal of Molecular Structure,2016,1114:171-180.
[10]Lin W,Zheng J,Yan L,et al.Sol-gel Preparation of Self-cleaning SiO2-Ti O2/SiO2-Ti O2Double-layer Antireflective Coating for Solar Glass[J].Results in Physics,2018,8:532-536.
[11]Arturo Román VázquezVelázquez,Miguel Angel Velasco Soto,Sergio Alfonso Pérez García.Functionalization Effect on Polymer Nanocomposite Coatings Based on Ti O2-SiO2Nanoparticles with Superhydrophilic Properties:[J].Nanomaterials,2018,8(6):369.
[12]Huang T,Huang W,Zhou C,et al.Superhydrophilicity of Ti O2/SiO2Thin Films:Synergistic Effect of SiO2and Phase-Separation-Induced Porous Structure[J].Surface&Coatings Technology,2012,213(2037):126-132.
[13]Guan K,Lu B,Yin Y.Enhanced Effect and Mechanism of SiO2Addition in Super-Hydrophilic Property of Ti O2Films[J].Surface&Coatings Technology,2003,173(2):219-223.
[14]邱丽美,刘芬,赵良仲.样品表面污染对X射线光电子能谱定量分析的影响[J].理化检验-化学分册,2007,43(3):182-184.
[15]Baer D R,Engelhard M H,Lea A S,et al.Comparison of The Sputter Rates of Oxide Films Relative to The Sputter Rate of SiO2[J].Journal of Vacuum Science&Technology A Vacuum Surfaces&Films,2010,28(5):1060-1072.
[16]Yadav H M,Kim J S.Sol-Gel Synthesis of Co2+-Doped Ti O2Nanoparticles and Their Photocatalytic Activity Study[J].Science of Advanced Materials,2017,9(7):1114-1119.
[17]Addepalli S,Suda U.Influence of Heat Treatment on The Structural Morphological and Optical Properties of DC Magnetron Sputtered TixSi1-xO2films[J].Bulletin of Materials Science,2016,39(3):789-795.
[18]王学华,薛亦渝,刘长生.Ti O2薄膜的XRD和XPS研究[J].建材世界,2003,24(5):42-46.
[19]Mirshekari M,Azimirad R,Moshfegh A Z.Superhydrophilic Stability Enhancement of RF Co-sputtered TixSi1-xO2Thin Films In Dark[J].Applied Surface Science,2010,256(8):2500-2506.
[20]Netterfield R P,Martin P J,Pacey C G,et al.Ion-assisted Deposition of Mixed Ti O2-Si O2films[J].Journal of Applied Physics,1989,66(4):1805-1809.
[21]Yu J,Zhao X,Yu J C,et al.The Grain Size and Surface Hydroxyl Content of Super-Hydrophilic Ti O2/SiO2Composite Nanometer Thin Films[J].Journal of Materials Science Letters,2001,20(18):1745-1748.
[22]Lee K S,Sang H L.Influence of SiO2Interlayer on the Hydrophilicity of Ti O2/SiO2/glass Produced by RF Magnetron Sputtering[J].Materials Letters,2007,61(16):3516-3518.
[23]Liu Z,Zhang X,Murakami T,et al.Sol-gel SiO2/Ti O2Bilayer Films with Self-cleaning and Antireflection Properties[J].Solar Energy Materials&Solar Cells,2008,92(11):1434-1438.
[24]Yu J G.Photocatalytic Activity and Hydrophilic Property of Ti O2/Si O2Composite Nanometer Thin Films[J].Acta Physico-chimica Sinica,2001,17(3):261-264.
[25]Guan K.Relationship Between Photocatalytic Activity Hydrophilicity and Self-cleaning Effect of Ti O2/SiO2Films[J].Surface&Coatings Technology,2005,191(2):155-160.
[26]Tanabe K,Sumiyoshi T,Shibata K,et al.ChemInform Abstract:A New Hypothesis Regarding the Surface Acidity of Binary Metal Oxides[J].Chemischer Informationsdienst,1974,47(5):1064-1066.
[27]Couderc H,David E,Frechette M,et al.Influence of Water on PE-SiO2Nanocomposites Dielectric Properties[C].Electrical Insulation and Dielectric Phenomena.IEEE,2014:737-741.