微振动对超精密撞点加工精度影响
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摘要
振动在加工中普遍存在,超精密撞点加工存在高速撞点加工精度差等问题,文章研究微振动对超精密撞点加工的影响,基于撞点各轴的振动误差,通过MATLAB构造出的振动仿真模型,发现适当降低X轴直线电机刚性、增强撞点加工中柔性铰链刚性可以抑制振动从而提高加工精度。根据仿真结果,进行了不同加工速度下的加工实验,验证结果表明,微振动对于撞点的超精密加工有很大影响,若加工速度超过35点/s,加工精度就会严重降低。该实验中采用微结构密集阵列加工机床,发现撞点加工速度维持在20点/s~30点/s,可以保证较高的加工精度。
Vibration is ubiquitous in processing and thus high-speed collision point processing accuracy problem exists in ultra-precision hit point processing. Based on the experimental results and the measurement of vibration error of each axis,with the vibration model constructed by MATLAB,the paper studies the influence of micro vibration on the ultraprecision machining. The simulation results showthat the properly reduced rigidity of the X-axis linear motor and the intensive flexibility of the flexible hinge can be efficient to suppress vibrations to improve the processing accuracy. According to the simulation results,different processing speeds are carried out in the machining experiments. The results showthe micro vibration has a great influence on the ultraprecision machining of the collision point. The processing speed and machining precision are interdependent. If the processing speed arrives at 35 points per second,Vibration will seriously affect the processing accuracy. In this experiment,high processing accuracy can be guaranteed if the micro-structureintensive array processing machine hit point processing speed is maintained at 20 to 30 points per second.
Vibration is ubiquitous in processing and thus high-speed collision point processing accuracy problem exists in ultra-precision hit point processing. Based on the experimental results and the measurement of vibration error of each axis,with the vibration model constructed by MATLAB,the paper studies the influence of micro vibration on the ultraprecision machining. The simulation results showthat the properly reduced rigidity of the X-axis linear motor and the intensive flexibility of the flexible hinge can be efficient to suppress vibrations to improve the processing accuracy. According to the simulation results,different processing speeds are carried out in the machining experiments. The results showthe micro vibration has a great influence on the ultraprecision machining of the collision point. The processing speed and machining precision are interdependent. If the processing speed arrives at 35 points per second,Vibration will seriously affect the processing accuracy. In this experiment,high processing accuracy can be guaranteed if the micro-structureintensive array processing machine hit point processing speed is maintained at 20 to 30 points per second.
引文
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[20]付贵,李克天,李阳.基于机器视觉的导光板模具网点测量系统研究[J].制造技术与机床,2016(10):58-61.
[2]Woronko A,Huang J,Altintas Y.Piezoelectric tool actuator for precision machining on conventional CNC turning centers[J].Precision Engineering,2003,27(4):335-345.
[3]To S,Kwok T C,Cheung C F,et al.Study of ultra-precision diamond turning of a microlens array with a fast tool servo system[C].2nd international Symposium on Advanced Optical Manufacturing and Testing Technologies.International Society for Optics and Photonics,2006.
[4]郭兵.超硬微结构光学功能表面的超声振动磨削加工技术研究[D].哈尔滨:哈尔滨工业大学,2012.
[5]李荣彬,张志辉,杜雪,等.自由曲面光学元件的设计、加工及面形测量的集成制造技术[J].机械工程学报,2010,46(11):137-148.
[6]李荣彬,张志辉,杜雪,等.自由曲面光学的超精密加工技术及其应用[J].红外与激光工程,2010,39(1):110-115.
[7]王晓慧.基于FTS的微结构表面超精密车削控制系统及实验研究[D].哈尔滨:哈尔滨工业大学,2011.
[8]Fang F Z,Zhang X D,Hu X T.Cylindrical coordinate machining of optical freeform surfaces[J].Optics Express,2008,16(10):7323-7329.
[9]隋翯,张德远,陈华伟,等.超声振动切削对耦合颤振的影响[J].航空学报,2016,37(5):1696-1704.
[10]郑锐.高速电主轴振动测试系统的研究[D].兰州:兰州理工大学,2011.
[11]严普强,乔陶鹏.工程中的低频振动测量与其传感器[J].振动、测试与诊断,2002,22(4):247-253.
[12]高紫俊.机载光电平台振动特性测量技术研究[D].大连:大连海事大学,2014.
[13]杜岩.基于固有振动频率的危岩块体稳定评价模型研究[D].北京:北京科技大学,2016.
[14]杨振宇,卢海燕,蔡莉,等.六自由度地震动测量方法及其误差分析[J].世界地震工程,2007,23(4):84-87.
[15]陈家良.面向大面积微/纳加工的柔性衬底多针尖阵列的制备[D].成都:西南交通大学,2016.
[16]陆兆峰,秦旻,陈禾,等.压电式加速度传感器在振动测量系统的应用研究[J].仪表技术与传感器,2007(7):3-4.
[17]韩贤国.基于三维移动载荷理论的细长轴工件加工过程振动研究[D].大连:大连理工大学,2013.
[18]崔惠婷,陈蔚芳,冯婷.装夹优化抑制薄壁件加工振动研究[J].组合机床与自动化加工技术,2016(5):138-142.
[19]李阳.基于PMAC的微结构密集阵列加工机床数控系统的开发[D].广州:广东工业大学,2016.
[20]付贵,李克天,李阳.基于机器视觉的导光板模具网点测量系统研究[J].制造技术与机床,2016(10):58-61.