基于粘滑驱动的精密旋转压电执行器研究
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摘要
研究了一种基于粘滑驱动原理的旋转式精密压电执行器。运用一种十字交叉型柔性铰链将2个压电陶瓷的直线位移转化为旋转角位移,然后通过与转子之间可调的摩擦接触实现执行器的粘滑运动。在锯齿波电压信号的驱动下,该压电执行器能够输出大行程、高分辨率的角位移。详细介绍了该压电执行器的结构组成与工作原理,并对执行器的运动进行了分析。建立了试验系统对加工的执行器样机的工作性能进行了测试。
A precision rotary piezoelectric actuator based on stick-slip principle driving was studied. Using a decussate type flexure hinges,the linear displacements of the two piezoelectric ceramic components can be transformed into angular displacement. Then the stick-slip motion can be achieved utilizing the frictional contact between the rotor and the stator. Under the actuation of sawtooth wave voltage signals,the proposed piezoelectric actuator can generated rotary motions with long range and high resolution. The configuration and the working principle of the piezoelectric actuator were introduced in detail. The motion of the piezoelectric actuator was also analyzed. The working performance of the actuator prototype was tested by the established experimental system.
A precision rotary piezoelectric actuator based on stick-slip principle driving was studied. Using a decussate type flexure hinges,the linear displacements of the two piezoelectric ceramic components can be transformed into angular displacement. Then the stick-slip motion can be achieved utilizing the frictional contact between the rotor and the stator. Under the actuation of sawtooth wave voltage signals,the proposed piezoelectric actuator can generated rotary motions with long range and high resolution. The configuration and the working principle of the piezoelectric actuator were introduced in detail. The motion of the piezoelectric actuator was also analyzed. The working performance of the actuator prototype was tested by the established experimental system.
引文
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[2]马立,周莎莎,王坤.行走式尺蠖压电直线驱动器研究现状及关键技术综述[J].微电机,2012,45(7):82-85.
[3]刘向锋,刘大伟,高志,等.新型压电旋转驱动器的设计与试验研究[J].机械工程学报,2010(1):169-174.
[4] Liu Z,Yao Z,Li X,et al. Design and experiments of a linear piezoelectric motor driven by a single mode[J]. Review of Scientific Instruments,2016,87(11):115001.
[5] Zhu C,Chu X,Yuan S,et al. Development of an ultrasonic linear motor with ultra-positioning capability and four driving feet[J].Ultrasonics,2016(72):66-72.
[6] Yildirim Y A,Toprak A,Tigli O. Piezoelectric Membrane Actuators for Micropump Applications Using PVDF-Tr FE[J]. Journal of Microelectromechanical Systems,2018,27(1):86-94.
[7] Lucinskis R,Mazeika D,Bansevicius R. Investigation of oscillations of piezoelectric actuators with multi-directional polarization[J]. Mechanical Systems and Signal Processing,2018(99):450-458.
[8]张兆成.新型压电尺蠖精密驱动器柔性机构分析与实验研究[D].哈尔滨:哈尔滨工业大学,2010:2-20.
[9] Peng Y,Peng Y,Gu X,et al. A review of long range piezoelectric motors using frequency leveraged method[J]. Sensors and Actuators A:Physical,2015(235):240-255.
[10]邵明坤.粘滑式惯性压电精密驱动器设计分析与试验研究[D].吉林:吉林大学,2015:2-15.
[11]尹大亮.压电微步进旋转驱动器的研究[D].合肥:合肥工业大学,2009:1-5.
[12]胡小华.压电粘滑性驱动器综合模型与该驱动器热效应补偿策略的研究[D].上海:华东理工大学,2012:1-5.