基于钝化微分的压电微动平台PID控制
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摘要
为避免压电微动平台在工作过程中受到扰动或冲击,采用改进比例、积分、微分(PID)控制器对其进行控制。首先,在平台的PID控制器中引入低通滤波器,以降低微分环节对扰动或冲击的敏感性(即使微分环节对扰动或冲击产生钝化效应),进而设计出了压电微动平台的改进PID控制器;接着,基于所搭建的压电微动平台位移测量系统,实验验证了所设计的钝化微分PID控制器的效果。实验结果表明,在钝化微分PID控制作用下,平台具有较快的响应,达到5μm阶跃目标的响应时间为0.3s,无超调;平台的定位误差显著减小,在跟踪最大值为15.25μm的变幅值三角波时,定位误差中线由无控制时的-0.7～1.2μm减小为-0.1～0.1μm。
In order to avoid the piezoelectric micro-positioning stage being disturbed or impacted during the working process,it is controlled by the improved proportional,integral and differential(PID)controller.At First,the low pass filter is introduced into the PID controller of the stage to reduce the sensitivity of the differential element to disturbance or impact(that is,making the differential element produce passivation effect on the disturbance or impact),and then an improved PID controller of piezoelectric micro-positioning stage is designed.Then,based on the built-in the displacement measuring system with the piezoelectric micro-positioning stage,the effect of the designed passivation differential PID controller has been verified experimentally.The results show that the stage has a fast response under the control of passivation differential PID,and the response time of 5μm step target is up to 0.3s without overshooting.The positioning error is significantly reduced.When tracking the variable amplitude triangle wave with a maximum value of 15.25μm,the location error center line is reduced from -0.7～1.2μm without control to-0.1～0.1μm.
In order to avoid the piezoelectric micro-positioning stage being disturbed or impacted during the working process,it is controlled by the improved proportional,integral and differential(PID)controller.At First,the low pass filter is introduced into the PID controller of the stage to reduce the sensitivity of the differential element to disturbance or impact(that is,making the differential element produce passivation effect on the disturbance or impact),and then an improved PID controller of piezoelectric micro-positioning stage is designed.Then,based on the built-in the displacement measuring system with the piezoelectric micro-positioning stage,the effect of the designed passivation differential PID controller has been verified experimentally.The results show that the stage has a fast response under the control of passivation differential PID,and the response time of 5μm step target is up to 0.3s without overshooting.The positioning error is significantly reduced.When tracking the variable amplitude triangle wave with a maximum value of 15.25μm,the location error center line is reduced from -0.7～1.2μm without control to-0.1～0.1μm.
引文
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[2]SALAPAKA S M,SALAPAKA M V.Scanning probe microscopy[J].Control Systems IEEE,2008,28(2):65-83.
[3]刘锦勇,杨湛,陈涛,等.面向三维组装的微纳平台设计与研究[J].压电与声光,2016,38(4):548-552.LIU Jinyong,YANG Zhan,CHEN Tao,et al.Design and research of the micro-nano system for 3Dmicro-assembly[J].Piezoelectrics&Acoustooptics,2016,38(4):548-552.
[4]宋林,崔玉国,万光继,等.基于阈值优化迟滞模型的压电微动平台前馈控制[J].宁波大学学报(理工版),2017,30(2):39-43.
[5]YANG Chuan,ZHANG Zhi,ZHAO Qiang.The study on precision positioning system of two-dimensional platform based on high speed and large range[J].Precision Engineering,2010,34(3):640-646.
[6]LIN J,CHIANG H,LIN C C.Tuning PID control parameters for micro-piezo-stage by using grey[J].Expert System with Applications,2011,38(11):13924-13932.
[7]周克良,王荡荡,韩李珂.基于Smith预估器的自适应模糊PID在电缆线径控制系统中的作用[J].重庆理工大学学报(自然科学),2018(6):175-181.ZHOU Keliang,WANG Dangdang,HAN Like.Application of self-adaptive fuzzy-pid based on smith predictor in cable wire size control[J].Journal of Chongqing University of Technology(Natural Science),2018(6):175-181.
[8]HAMED G,SEYED M R,MOHAMMAD Z,et al.Disturbance rejection-based robust control for micropositioning of piezoelectric actuators[J].Conptes Rendus Mecanique,2014,342(1):32-45.
[9]张桂林,张承进,李康.基于PI迟滞模型的压电驱动器自适应辨识与逆控制[J].纳米技术与精密工程,2013,11(1):85-89.ZHANG Guilin,ZHANG Chengjin,LI Kang.Adaptive identification and inverse control of piezoelectric actuators based on PI hjsteresis model[J].Nanotechnology and Precision Engineering,2013,11(1):85-89.
[10]GUO Z,TIAN Y,LIU C,et al.Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning[J].Robotics and ComputerIntegrated Mechatronics,2015,32:93-105.
[11]LIN Chiying,CHEN Poying.Precsion tracking control of a biaxial piezo stage using repetitive control and double-feedforward compensation[J].Mechatronic,2011,21(1):239-249.