钹型开槽式阀压电泵的设计
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摘要
由于有阀压电泵内部阀体所受应力过大易导致阀体失效,本文提出了钹型开槽式截止阀来减小有阀压电泵内部阀体所受应力。基于钹型开槽式截止阀设计了有阀压电泵,分析了钹型开槽式阀压电泵的工作原理。对钹型开槽膜片进行了受力分析,研究了该压电泵的输出性能及耦合作用下的膜片应力。加工制作了钹型开槽式阀压电泵样机,建立了钹型开槽式阀压电泵的有限元模型,数值计算了流固耦合作用下的阀体应力值。计算结果表明:在压电泵正常输出的驱动频率范围内,当驱动频率为418Hz时,膜片所受应力的计算值也达到最大,为81.74 MPa。最后,进行了压电泵性能试验。试验结果显示:该压电泵的输出流量最大值和振子振幅最大值均出现在低频段;当驱动电压为160V,驱动频率为5Hz时,输出流量达到最大,为6.6g/min;驱动频率为4Hz时,压电振子振幅达到最大,为165.8μm。文中的研究验证了钹型开槽式阀体压电泵的有效性,并得出当钹型开槽式阀压电泵工作在低频段时,阀门所受应力远小于高频段时阀门的应力值。
The valve inside a piezoelectric pump was easy to be failure when it was suffered too much stress concentration. A cymbal-shape slotted check valve was proposed to reduce the stress concentration of the piezoelectric pump.A valve-based piezoelectric pump was designed by using the cymbal-shape slotted check valve,and the working principle of the cymbal-shape slotted check valve based piezoelectric pump was introduced.The stress of the cymbal-shape slotted diaphragm was analyzed,the output performance of the piezoelectric pump was discussed and the stress of diaphragm on fluid-solid coupled interaction was calculated.Then,aprototype for the pump was fabricated.The finite element model of the cymbal-shape slotted check valve based piezoelectric pump was established and the stress of the cymbal-shaped slotted diaphragm on fluid-solid coupled interaction were calculated numerically.The calculation results indicate that the calculated value of the diaphragm isthe maximum when the driving frequency is 418 Hz,and it is 81.74 MPa in the normal driving frequency range of the piezoelectric pump.Finally,the performance of the piezoelectric pump was tested,and results show that the maximum output flow of the pump and the maximum amplitude of the oscillator are in the low frequency band.The maximum flow rate is 6.6 g/min driving by 160 V(5 Hz),and the maximum amplitude of the piezoelectric vibrator is 165.8μm(160 V,4 Hz).The experimental results validate the feasibility of the cymbal-shaped slotted valve based piezoelectric pump.Moreover,it concludes that the stress of the diaphragm working in high frequencies is larger than that working in low frequencies.
The valve inside a piezoelectric pump was easy to be failure when it was suffered too much stress concentration. A cymbal-shape slotted check valve was proposed to reduce the stress concentration of the piezoelectric pump.A valve-based piezoelectric pump was designed by using the cymbal-shape slotted check valve,and the working principle of the cymbal-shape slotted check valve based piezoelectric pump was introduced.The stress of the cymbal-shape slotted diaphragm was analyzed,the output performance of the piezoelectric pump was discussed and the stress of diaphragm on fluid-solid coupled interaction was calculated.Then,aprototype for the pump was fabricated.The finite element model of the cymbal-shape slotted check valve based piezoelectric pump was established and the stress of the cymbal-shaped slotted diaphragm on fluid-solid coupled interaction were calculated numerically.The calculation results indicate that the calculated value of the diaphragm isthe maximum when the driving frequency is 418 Hz,and it is 81.74 MPa in the normal driving frequency range of the piezoelectric pump.Finally,the performance of the piezoelectric pump was tested,and results show that the maximum output flow of the pump and the maximum amplitude of the oscillator are in the low frequency band.The maximum flow rate is 6.6 g/min driving by 160 V(5 Hz),and the maximum amplitude of the piezoelectric vibrator is 165.8μm(160 V,4 Hz).The experimental results validate the feasibility of the cymbal-shaped slotted valve based piezoelectric pump.Moreover,it concludes that the stress of the diaphragm working in high frequencies is larger than that working in low frequencies.
引文
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[15]LIU G J,YANG Z G,LIU J F,et al..A low cost,high performance insulin delivery system based on PZT actuation[J].Microsystem Technologies,2014,20(12):2287-2294.
[16]赵天,杨志刚,刘建芳,等.利用压电微泵驱动和脉动混合可控合成金纳米粒子[J].光学精密工程,2014,22(4):904-910.ZHAO T,YANG ZH G,LIU J F,et al..Controlled synthesis of gold nanoparticles based on PZT micropump and pulsating mixing[J].Opt.Precision Eng.,2014,22(4):904-910.(in Chinese)
[17]MA H K,LUO W F,LIN J Y.Development of a piezoelectric micropump with novel separable design for medical applications[J].Sensors&Actuators A:Physical,2015,236:57-66.
[18]ZHANG R H,FENG Y,LV ZH H,et al..Development and characterization a single-active-chamber piezoelectric membrane pump with multiple passive check valves[J].Sensors,2016,16(12):2108.
[19]张丛春,郭泰,丁桂甫.基于SU-8胶的新型被动式微型阀[J].光学精密工程,2013,21(4):1011-1016.ZHANG C CH,GUO T,DING G F.Passive micro-valve based on SU-8[J].Opt.Precision Eng.,2013,21(4):1011-1016.(in Chinese)
[20]HUANG J,ZHANG J H,SHI W D,et al..3D FEM analyses on flow field characteristics of the valveless piezoelectric pump[J].Chinese Journal of Mechanical Engineering,2016,29(4):825-831.
[2]刘国君,范尊强,董景石,等.用于胰岛素推注的压电微泵[J].吉林大学学报(工学版),2007,37(2):372-376.LIU G J,FAN Z Q,DONG J SH,et al..Piezoelectric micro-pump for insulin injection[J].Journal of Jilin University(Engineering and Technology Edition),2007,37(2):372-376.(in Chinese)
[3]徐莹,胡正添,郭淼.基于微生物代谢成分的电化学多参数检测平台微泵设计[J].传感技术学报,2015,28(1):1-8.XU Y,HU ZH T,GUO M.Design of micropump for parallel multi-parameter detection of microbial metabolic components based on electrochemical platform[J].Chinese Journal of Sensors and Actuators,2015,28(1):1-8.(in Chinese)
[4]ZHANG CH S,XING D,LI Y Y.Micropumps,microvalves,and micromixers within PCR microfluidic chips:advances and trends[J].Biotechnology Advances,2007,25(5):483-514.
[5]XIA Q X,ZHANG J H,LEI H,et al..Analysis on flow field of the valveless piezoelectric pump with two inlets and one outlet and a rotating unsymmetrical slopes element[J].Chinese Journal of Mechanical Engineering,2012,25(3):474-483.
[6]张蕊华,张建辉,朱银法,等.三棱柱阻流体无阀压电泵的设计与试验[J].光学精密工程,2016,24(2):327-334.ZHANG R H,ZHANG J H,ZHU Y F,et al..Design and experiment of valveless piezoelectric pump with triangular prism bluff body[J].Opt.Precision Eng.,2016,24(2):327-334.(in Chinese)
[7]曾平,李立安,胥锋,等.无阀压电泵的流固耦合仿真及试验验证[J].光学精密工程,2016,24(1):112-118.ZENG P,LI L A,XU F,et al..Structural-fluid coupling simulation and experimental verification on valveless piezoelectric pump[J].Opt.Precision Eng.,2016,24(1):112-118.(in Chinese)
[8]HUANG J,ZHANG J H,WANG SH Y,et al..Analysis of the flow rate characteristics of valveless piezoelectric pump with fractal-like Y-shape branching tubes[J].Chinese Journal of Mechanical Engineering,2014,27(3):628-634.
[9]梁莉,马旭,张铁民.圆环型压电蠕动泵的结构设计与仿真[J].农业工程学报,2012,28(11):40-44.LIANG L,MA X,ZHANG T M.Structure design and simulation of circular ring piezoelectric peristaltic pump[J].Transactions of the Chinese Society of Agricultural Engineering,2012,28(11):40-44.(in Chinese)
[10]黄俊,张建辉,王守印.多级“Y”型流管无阀压电泵的原理与试验验证[J].光学精密工程,2013,21(2):423-430.HUANG J,ZHANG J H,WANG S Y.Theory and experimental verification on valveless piezoelectric pump with multistage Y-shape tubes[J].Opt.Precision Eng.,2013,21(2):423-430.(in Chinese)
[11]ZHANG J H,WANG Y,FU J,et al..Advances in Technologies of Piezoelectric Pumping with Valves.Transactionsof Nanjing Universityof Aeronautics&Astronautics,2016,33(3):260-273.
[12]HAM Y B,SONG J J,PARK J H,et al..A study on the small size PZT pump for cooling water circulation[C].SICE-ICASE International Joint Conference,IEEE,2006:4126-4129.
[13]HWANG J Y,SHIN K Y,LEE S H,et al..Periodic fuel supply to a micro-DMFC using apiezoelectric linear actuator[J].Journal of Micromechanics and Microengineering,2010,20(8):85023-85029.
[14]张建辉,郭宗信,黄毅,等.内外不等锥度的软质锥壳形单阀体压电泵的原理与试验研究[J].机械工程学报,2010,46(24):143-149.ZHANG J H,GUO Z X,HUANG Y,et al..Theory and experiment on the soft texture and conning shaped single valve piezoelectric pump with different interior and exterior taper[J].Journal of Mechanical Engineering,2010,46(24):143-149.(in Chinese)
[15]LIU G J,YANG Z G,LIU J F,et al..A low cost,high performance insulin delivery system based on PZT actuation[J].Microsystem Technologies,2014,20(12):2287-2294.
[16]赵天,杨志刚,刘建芳,等.利用压电微泵驱动和脉动混合可控合成金纳米粒子[J].光学精密工程,2014,22(4):904-910.ZHAO T,YANG ZH G,LIU J F,et al..Controlled synthesis of gold nanoparticles based on PZT micropump and pulsating mixing[J].Opt.Precision Eng.,2014,22(4):904-910.(in Chinese)
[17]MA H K,LUO W F,LIN J Y.Development of a piezoelectric micropump with novel separable design for medical applications[J].Sensors&Actuators A:Physical,2015,236:57-66.
[18]ZHANG R H,FENG Y,LV ZH H,et al..Development and characterization a single-active-chamber piezoelectric membrane pump with multiple passive check valves[J].Sensors,2016,16(12):2108.
[19]张丛春,郭泰,丁桂甫.基于SU-8胶的新型被动式微型阀[J].光学精密工程,2013,21(4):1011-1016.ZHANG C CH,GUO T,DING G F.Passive micro-valve based on SU-8[J].Opt.Precision Eng.,2013,21(4):1011-1016.(in Chinese)
[20]HUANG J,ZHANG J H,SHI W D,et al..3D FEM analyses on flow field characteristics of the valveless piezoelectric pump[J].Chinese Journal of Mechanical Engineering,2016,29(4):825-831.