无阀气体压电泵仿真分析与实验
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摘要
为了提高微型泵输出流量以及获得连续出流能力,设计了一种基于合成射流原理的无阀气体压电泵。首先,分析了压电气泵的工作原理,测试了压电振子的振幅;其次,利用CFX软件对无阀气泵进行仿真分析,得到压电气泵在0T,1/4T,2/4T和3/4T时刻的气体流速分布,以及容腔高度、泵腔高度、射流孔直径和出口直径对气泵流量的影响规律;最后,制作了无阀气体压电泵的实验样机。测试结果表明,当无阀压电气泵在驱动电压为120V、驱动频率为400Hz、容腔高度为0.1mm、泵腔高度为1.4mm、射流孔直径为1.3mm和出口直径为2mm时,泵输出气体流量为1800ml/min左右,实验与仿真分析基本吻合。该气泵能输出较大气体流量并具有连续出流的能力。
A valve-less gas piezoelectric pump based on synthetic is designed for continuous flow and the output flow rate increasing.First,the working principle of the gas piezoelectric pump is presented and the amplitude of the piezoelectric vibrator is measured.Then,the distribution of gas velocity at different moments(for 0 T,1/4 T,2/4 T,3/4 T)is obtained by simulation analysis of the valve-less gas piezoelectric pump with CFX software.Besides,the influences on the pump flow from the cavity height,pump cavity height,jet orifice diameter and outlet diameter are studied.Finally,the experimental prototype of valveless gas piezoelectric pump is fabricated.The valve-less gas piezoelectric pump has the cavity height of0.1 mm,the pump cavity height of 1.4 mm,the jet orifice diameter of 1.3 mm,and the outlet diameter of2.0 mm.When driven at a voltage of 120 V,400 Hz,the output flow is 1 800 ml/min.The experimental results agree with those of the simulation.The pump increases the gas flow,and is able to continuously output flow.
A valve-less gas piezoelectric pump based on synthetic is designed for continuous flow and the output flow rate increasing.First,the working principle of the gas piezoelectric pump is presented and the amplitude of the piezoelectric vibrator is measured.Then,the distribution of gas velocity at different moments(for 0 T,1/4 T,2/4 T,3/4 T)is obtained by simulation analysis of the valve-less gas piezoelectric pump with CFX software.Besides,the influences on the pump flow from the cavity height,pump cavity height,jet orifice diameter and outlet diameter are studied.Finally,the experimental prototype of valveless gas piezoelectric pump is fabricated.The valve-less gas piezoelectric pump has the cavity height of0.1 mm,the pump cavity height of 1.4 mm,the jet orifice diameter of 1.3 mm,and the outlet diameter of2.0 mm.When driven at a voltage of 120 V,400 Hz,the output flow is 1 800 ml/min.The experimental results agree with those of the simulation.The pump increases the gas flow,and is able to continuously output flow.
引文
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[3]Dinh T X,Ogami Y.Design and simulation of MEMS based Dual-Axis fluidic angular velocity sensor[J].Sensors and Actuators A:Physical,2013,189:61-66.
[4]Fukue T,Matsuura Y,Hirose K,et al.Evaluation of cooling performance of a piezoelectric micro blower in narrow flow passage[C]∥Electronics Packaging(ICEP),2014 International Conference.[S.l.]:IEEE,2014:69-73.
[5]Tan Xiaoming,Zhang Jingzhou.Flow and heat transfer characteristics under synthetic jets impingement driven by piezoelectric actuator[J].Experimental Thermal and Fluid Science,2013,48:134-146.
[6]Jang D,Lee K S.Flow characteristics of dual piezoelectric cooling jets for cooling applications in ultra-slim electronics[J].International Journal of Heat and Mass Transfer,2014,79:201-211.
[7]Glezer A,Amitay M.Synthetic jets[J].Annual Review of Fluid Mechanics,2002,34(1):503-529.
[8]Wang Yujen,Chen Chungde,Chien L.Design and analysis of a compact synthetic-jet-based air pump for large airflow[J].Microsyst Technol,2015,21(7):1437-1446
[9]罗小兵,李志信,过增元.一种新型无阀微泵的原理和模拟[J].中国机械工程,2002,13(15):1261-1263.Luo Xiaobing,Li Zhixin,Guo Zengyuan.Principle and simulation on a novel valve-less micropump[J].China Mechanical Engineering,2002,13(15):1261-1263.(in Chinese)
[10]罗剑,苑伟政,邓进军,等.压电式微型合成射流多域耦合数值模拟[J].航空学报,2009,30(7):1181-1186.Luo Jian,Yuan Weizheng,Deng Jinjun,et al.Multidomain coupling numerical simulation of micro piezoelectric synthetic jet[J].Acta Aeronautica et Astronautica Sinica,2009,30(7):1181-1186.(in Chinese)
[11]沈丹东,马炳和,邓进军,等.压电式微型合成射流器结构参数优化设计[J].航空学报,2011,32(9):1755-1760.Shen Dandong,Ma Binghe,Deng Jinjun,et al.Structural parameters optimization of piezoelectric micro synthetic jet actuators[J].Acta Aeronautica et Astronautica Sinaca,2011,32(9):1755-1760.(in Chinese)