PDMS薄膜阀压电泵设计及实验研究
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摘要
文章设计、制作了PDMS薄膜阀压电泵,给出了由PMMA和PDMS构成的压电泵的基本结构,比较了悬臂梁和两端固支两种结构PDMS薄膜单向阀的压电泵性能,得出结论:在中低频下,悬臂梁结构阀压电泵输出流量大,在560 V,530 Hz下,悬臂梁结构阀压电泵最大输出流量为273.42 ml/min;相同条件下,两端固支阀压电泵最大输出流量为212.76 ml/min。两端固支阀具有优良的高频特性,在268.8 V,1110Hz下,悬臂梁阀压电泵的最大输出流量为135.57ml/min;相同条件下两端固支阀压电泵最大流量为227.08 ml/min。
Piezoelectric pump with PDMS valve was designed and manufactured. The basic structure of the piezoelectric pump composed of PMMA and PDMS is given. Two different structure of check valves including cantilever valve and clamped valve are analyzed and the performances of the piezoelectric pumps using the two different kinds of PDMS check valves are studied and compared. Experiments results show that when the working frequency is low, the flow rate of the pump with cantilever valve is higher than that with clamped valve. For example, when the driving voltage was 560 V and 530 Hz, the flowrate of the pump with cantilever valve and clamped valve were 273.42 ml/min and 212.76 ml/min, respectively. The results are reversed when the working frequency is high. For example, when the driving voltage was 268.8 V and 1110 Hz, the flowrate of the pump with cantilever valve and clamped valve were 135.57 ml/min and 227.08 ml/min, respectively.
Piezoelectric pump with PDMS valve was designed and manufactured. The basic structure of the piezoelectric pump composed of PMMA and PDMS is given. Two different structure of check valves including cantilever valve and clamped valve are analyzed and the performances of the piezoelectric pumps using the two different kinds of PDMS check valves are studied and compared. Experiments results show that when the working frequency is low, the flow rate of the pump with cantilever valve is higher than that with clamped valve. For example, when the driving voltage was 560 V and 530 Hz, the flowrate of the pump with cantilever valve and clamped valve were 273.42 ml/min and 212.76 ml/min, respectively. The results are reversed when the working frequency is high. For example, when the driving voltage was 268.8 V and 1110 Hz, the flowrate of the pump with cantilever valve and clamped valve were 135.57 ml/min and 227.08 ml/min, respectively.
引文
[1] 王雪艳.带有可压缩腔和两端固支阀的谐振式压电泵的研究[D].合肥:中国科学技术大学,2015:1—37.
[2] 刘勇.轮式阀微型压电泵的设计理论及试验研究[D].长春:吉林大学,2012:1—9,29—30.
[3] 孙晓锋,姜德龙,杨志刚. 压电泵用截止阀设计与性能测试[J].液压与气动, 2013 (09) :81—84.
[4] Grace Jeromaki.Long-term outlook for MEMS: New applications and markets[J].Solid StateTechnology,1999(07):62—69.
[5] 刘延柱,陈文良,陈立群.振动力学[M]. 北京:高等教育出版社 , 2011:130—140.
[2] 刘勇.轮式阀微型压电泵的设计理论及试验研究[D].长春:吉林大学,2012:1—9,29—30.
[3] 孙晓锋,姜德龙,杨志刚. 压电泵用截止阀设计与性能测试[J].液压与气动, 2013 (09) :81—84.
[4] Grace Jeromaki.Long-term outlook for MEMS: New applications and markets[J].Solid StateTechnology,1999(07):62—69.
[5] 刘延柱,陈文良,陈立群.振动力学[M]. 北京:高等教育出版社 , 2011:130—140.