压电陶瓷驱动器疲劳特性对变形镜校正能力的影响
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摘要
基于变形镜(DM)的影响函数,采用有限元方法对波前校正过程进行了数值模拟,分析了压电陶瓷(PZT)驱动器的疲劳特性对变形镜校正能力的影响。研究结果表明,在压电陶瓷驱动器产生疲劳后,变形镜校正能力下降。待校正畸变波前的峰谷值越大或空间高频成分比例越高,变形镜在驱动器疲劳后的校正能力下降得越明显,且受前者影响更大。
Based on the influence functions of the deformable mirrors(DMs),the wavefront correction process is simulated by the finite element method and the influence of the fatigue characteristics of piezoelectric ceramics(PZT)actuators on the correction ability of DMs is analyzed.The research results show that the correction ability of DMs decreases when the phenomenon of the fatigue occurs in PZT actuators.The larger the peak-valley value of the distorted wavefront to be corrected or the higher the proportion of the spatial high-frequency components is,the more obvious of the decrease of the correction ability of DMs after the occurrence of fatigue is.In addition,the influence from the former is relatively larger.
Based on the influence functions of the deformable mirrors(DMs),the wavefront correction process is simulated by the finite element method and the influence of the fatigue characteristics of piezoelectric ceramics(PZT)actuators on the correction ability of DMs is analyzed.The research results show that the correction ability of DMs decreases when the phenomenon of the fatigue occurs in PZT actuators.The larger the peak-valley value of the distorted wavefront to be corrected or the higher the proportion of the spatial high-frequency components is,the more obvious of the decrease of the correction ability of DMs after the occurrence of fatigue is.In addition,the influence from the former is relatively larger.
引文
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[3]Zhang X,Su L K,Cai Q.Analysis of thermal effect and experimental test of beam wavefront aberration in all solid-state NdYAG laser[J].Acta Optica Sinica,2010,30(3):802-807.张翔,苏礼坤,蔡青.全固态NdYAG激光器热效应及输出光束波前像差分析[J].光学学报,2010,30(3):802-807.
[4]Guo G Y,Fan Z W,Yu J,et al.Solid-state laser distortion wavefront adaptive correction technology and its research progess[J].Laser&Optoelectronics Progress,2014,51(3):030001.郭广妍,樊仲维,余锦,等.固体激光器波前畸变自适应校正技术及研究进展[J].激光与光电子学进展,2014,51(3):030001.
[5]Chen L X,Hu X C,Zhang B,et al.Fatigue damage characteristics deformable mirrors for wavefront correction[J].Chinese Journal of Lasers,2016,43(11):1105002.陈丽霞,胡小川,张彬,等.波前校正变形镜的疲劳损伤特性[J].中国激光,2016,43(11):1105002.
[6]Qiao R J,Chen M S.Research of DM in adaptive optics[J].Electronic Design Engineering,2010,18(3):74-75.乔瑞杰,陈名松.自适应光学中变形镜的研究[J].电子设计工程,2010,18(3):74-75.
[7]Yang G,Yue Z X,Li L T.Research progress on the characteristics and mechanism of applied field-induced fatigue in piezoelectric ceramics[J].Journal of Inorganic Materials,2007,22(1):1-6.杨刚,岳振星,李龙土.压电陶瓷场致疲劳特性与机理研究进展[J].无机材料学报,2007,22(1):1-6.
[8]Wang W Q.Study on field-induced fatigue and nonlinearity of piezoelectric ceramics[D].Beijing:Tsinghua University,2007:4-29.王伟强.压电陶瓷的场致疲劳与非线性研究[D].北京:清华大学,2007:4-29.
[9]Sakai T,Ishikiriyama M,Shimazaki R.Durability of piezoelectric ceramics for an actuator[J].Japanese Journal of Applied Physics,1992,31(9B):3051-3054.
[10]Levstik A,Bobnar V,Kutnjak Z,et al.Fatigue and piezoelectric properties of lead lanthanum zirconate titanate ceramics[J].Journal of Physics D:Applied Physics,1998,31(20):2894-2897.
[11]Ma X M,Han K,Zhang B.Prediction for wavefront correction effect of discrete deformable mirror based on filter function[J].Acta Optica Sinica,2014,34(1):0101002.马雪梅,韩开,张彬.基于滤波函数的分立变形镜波前校正效果预估[J].光学学报,2014,34(1):0101002.
[12]Tyson R K,Byrne D M.The effect of wavefront sensor characteristics and spatiotemporal coupling on the correcting capability of a deformable mirror[J].Proceedings of SPIE,1980,228:21-25.
[13]Lin X D,Liu X Y,Wang J L,et al.Progress of the continuous surface deformable mirror based on piezoceramic actuator[J].Laser&Optoelectronics Progress,2014,51(9):090003.林旭东,刘欣悦,王建立,等.基于压电陶瓷促动器的连续镜面变形镜研制进展[J].激光与光电子学进展,2014,51(9):090003.
[14]Hui W A,He Z L.Modeling and analysis of laminated-type piezoelectric actuator based on finite element[J].Fluid Power Transmission and Control,2010(5):20-23.惠伟安,何再龙.积层式压电驱动器的有限元建模分析[J].流体传动与控制,2010(5):20-23.
[15]Chen L X,Hu X C,Han K,et al.Improvement method for fitting high-frequency phase by Zernike polynomials[J].Acta Optica Sinaca,2016,36(3):0314001.陈丽霞,胡小川,韩开,等.Zernike多项式对空间高频相位拟合的改进方法[J].光学学报,2016,36(3):0314001.
[16]Gao W.Definition of laser beam qualityβ-factor[J].Acta Photonica Sinica,2003,32(9):1038-1040.高卫.激光束衍射极限倍数β的确定方法[J].光子学报.2003,32(9):1038-1040.