压电陶瓷驱动器建模与控制技术的研究
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摘要
由于压电致动器(PA)具有高带宽、高纳米位移分辨率和零机械摩擦等优点,其广泛应用于微/纳米操作、微/纳米定位和光学系统。然而,压电致动器的迟滞非线性却严重影响了其跟踪定位精度,甚至引起闭环系统失稳。为了模拟具有不对称特性的压电致动器的滞后特性和频率相关性,使用广义Bouc-Wen模型来描述压电致动器的滞后性并对该模型进行了参数辨识。然后,使用基于该模型的线性化反馈滑模控制器来改善压电致动器的迟滞非线性,最后采用MATLAB对压电致动器的位移与速度进行跟踪控制仿真,并对其位移误差进行仿真,以验证该模型的有效性,其显著提高了压电致动器的位移控制精度,有效提高了系统的鲁棒性,进而可显著提高双光子聚合加工系统的定位精度。
Because of its high bandwidth,high nanometer displacement resolution and zero mechanical friction,piezoelectric actuators(PA)are widely used in micro/nano operation,micro/nano positioning and optical systems. However,the hysteresis nonlinearity of piezoelectric actuators has seriously affected the tracking and positioning accuracy,and even caused the instability of the closed-loop system. In order to simulate the hysteresis and frequency dependence of the piezoelectric actuator with asymmetric characteristics,I the generalized Bouc-Wen model was used to describe the hysteresis of the piezoelectric actuator and the parameters were identified. Then,The linearized feedback sliding mode controller of the model is used to improve the hysteresis nonlinearity of the piezoelectric actuator. Finally,the displacement and velocity of the piezoelectric actuator are simulated and simulated by using MATLAB,and the displacement error is simulated. Which greatly improves the displacement control precision of the piezoelectric actuator and improves the robustness of the system,and the positioning accuracy of the two-photon polymerization processing system can be improved remarkably.
Because of its high bandwidth,high nanometer displacement resolution and zero mechanical friction,piezoelectric actuators(PA)are widely used in micro/nano operation,micro/nano positioning and optical systems. However,the hysteresis nonlinearity of piezoelectric actuators has seriously affected the tracking and positioning accuracy,and even caused the instability of the closed-loop system. In order to simulate the hysteresis and frequency dependence of the piezoelectric actuator with asymmetric characteristics,I the generalized Bouc-Wen model was used to describe the hysteresis of the piezoelectric actuator and the parameters were identified. Then,The linearized feedback sliding mode controller of the model is used to improve the hysteresis nonlinearity of the piezoelectric actuator. Finally,the displacement and velocity of the piezoelectric actuator are simulated and simulated by using MATLAB,and the displacement error is simulated. Which greatly improves the displacement control precision of the piezoelectric actuator and improves the robustness of the system,and the positioning accuracy of the two-photon polymerization processing system can be improved remarkably.
引文
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[3]Qingsong Xu.Identification and compensation of piezoelectric hysteresiswithout modeling hysteresis inverse[J].IEEE Transactions on IndustrialElectronics,2013,60(9):3927-3937.
[4]Hassani Vahid,Tjahjowidodo Tegoeh,Thanh.Nho Do,A survey on hyster-esis modeling,identification and control[J].Mechanical Systems andSignal Processing,2014,49(1-2):209-233.
[5]A.B. Zhang,B.L. Wang. The influence of Maxwell stresses on the fracturemechanics of piezoelectric materials[J].Mechanics of Materials,2014(68):64-69.
[6]Ge P,Jouaneh M.Tracking control of a piezoceramic actuator[J].IEEE Tr-ans Control Syst Technol,1996,4(3):209-216.
[7]Ha JL.A comparison of fitness functions for the identification of a piezo-electric hysteretic actuator based on the real-coded genetic algorithm[J].Sens Actuators,A:Phys,2006,132(2):643-650.
[8]Zhu W,Bian LX,Rui XT.Online parameter identification of the asymm-etrical Bouc-Wen model for piezoelectric actuators[J].Precis Eng,2014,38(4):921-927.
[9]Long Ma,Wanqing Li,Qi Wang.Identification of the Bouc-Wen hystere-sis model for piezoelectric actuated micro/nano electromechanical system[J].Comput Theor.Nanosci,2013,10(4):983-988.
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