基于高温烧结氧化铝陶瓷的无线无源温度传感器
|
摘要
通过高温烧结技术获得了总体尺寸为28 mm×28 mm×0.47 mm的氧化铝陶瓷基板,结合厚膜技术在该基板上印刷无源LC串联谐振电路,设计并制备了一种基于氧化铝陶瓷的无线无源温度传感器。在18℃~300℃的温度范围内实现了传感器的无线测试,测试结果表明该温度传感器呈现出了良好的线性特征,线性范围大且非线性误差小,其谐振频率对温度的灵敏度约为2.75 kHz/℃,可应用于高温恶劣环境下的温度检测。
A wireless passive temperature sensor based on Alumina ceramic is designed and fabricated,where the alumina ceramic substrate is obtained with the overall size of 28 mm×28 mm×0.47 mm through high temperature sintering technology,and passive LC series resonant circuit is printed on the substrate by thick film technology.A wireless test on the sensor is achieved under the temperature from 18 ℃ to 300 ℃.The results show that the temperature sensor demonstrates good linear characteristics,large linear range and low non-linear error.The sensitivity of the sensor on resonant frequency to temperature is about 2.75 kHz / ℃.It can be applied to detect high temperature in harsh environments.
A wireless passive temperature sensor based on Alumina ceramic is designed and fabricated,where the alumina ceramic substrate is obtained with the overall size of 28 mm×28 mm×0.47 mm through high temperature sintering technology,and passive LC series resonant circuit is printed on the substrate by thick film technology.A wireless test on the sensor is achieved under the temperature from 18 ℃ to 300 ℃.The results show that the temperature sensor demonstrates good linear characteristics,large linear range and low non-linear error.The sensitivity of the sensor on resonant frequency to temperature is about 2.75 kHz / ℃.It can be applied to detect high temperature in harsh environments.
引文
[1]Thorsten Wagner,Sren Krotzky,Alexander Wei,et al.A High Temperature Capacitive Humidity Sensor Based on mesoporous silica[J].Sensors,2011(11):3135-3144
[2]Guo S,Guo J,Ko W H.A Monolithically Integrated Surface Micromachined Touch Mode Capacitive Pressure Sensor[J].Sensors and Actuators A,2000,80(3):224-232
[3]Qiu S,Gao S,Liu Q,et al.Electrochemical Impedance Spectroscopy Sensor for Ascorbic Acid Based on Copper(I)Catalyzed Click Chemistry[J].Biosensors and Bioelectronics,2011,26(11):4326-4330
[4]Bovard F S,Burleigh T D,Smith A T.Electrochemical Impedance Spectroscopy of Electrocoated Aluminum Food Cans[J].Electrochimica Acta,1995,40(2):201-207
[5]Nabipoor M,Majlis B Y.A New Passive Telemetry LC Pressure and Temperature Sensor Optimized for TPMS[J].Journal of Physics,2006,34(1):770-775
[6]Ong K G,Grimes C A,Robbins C L,et al.Design and Application of a Wireless,Passive,Resonant-Circuit Environmental Monitoring Sensor[J].Sensors and Actuators A,2001,93(1):33-43
[7]韩安太,郭小华,陈志强,等.基于LC谐振传感器的包装茶叶含水率无损检测[J].茶叶科学,2009,29(5):395-401
[8]李平,文玉梅,黄尚廉.声表面波谐振器型无源无线温度传感器[J].仪器仪表学报,2003,24(4):403-405
[9]Huang Y S,Chen Y Y.A Passive Wireless Hydrogen Surface Acoustic Wave Sensor Based on Pt-Coated ZnO Nanorods[J].Nanotechnology,2010,21(9):1-6
[10]Tan E L,Ng W N,Shao R,et al.A Wireless,Passive Sensor for Quantifying Packaged Food Quality[J].Sensors,2007(7):1747-1756
[11]Chen P J,Saati S,Varma R,et al.Wireless Intraocular Pressure Sensing Using Microfabricated Minimally Invasive Flexible-Coiled LC Sensor Implant[J].Journal of Microelectromechanical Systems,2010,19(4):721-734
[12]Horton B E,Schweitzer S,DeRouin A J,et al.A Varactor-Based,Inductively Coupled Wireless PH Sensor[J].IEEE Sensors Journal,2011,11(4):1061-1066
[13]王渊朝,彭斌,黄武林.一种LC谐振无线无源温度传感器的研究[J].传感技术学报,2013,26(10):1341-1344
[14]朱志斌,郭志军,刘英,等.氧化铝陶瓷的发展与应用[J].陶瓷,2003(1):5-8
[15]Mohan S S.The Design,Modeling and Pptimization of On-Chip Inductor and Transformer Circuits[D].California:Stanford University,1999
[16]Jia Yi,Sun Ke,Fredrick Just Agosto.Design and Characterization of a Passive Wireless Strain Sensor[J].Measurement Science and Technology,2006(17):2869-2876
[2]Guo S,Guo J,Ko W H.A Monolithically Integrated Surface Micromachined Touch Mode Capacitive Pressure Sensor[J].Sensors and Actuators A,2000,80(3):224-232
[3]Qiu S,Gao S,Liu Q,et al.Electrochemical Impedance Spectroscopy Sensor for Ascorbic Acid Based on Copper(I)Catalyzed Click Chemistry[J].Biosensors and Bioelectronics,2011,26(11):4326-4330
[4]Bovard F S,Burleigh T D,Smith A T.Electrochemical Impedance Spectroscopy of Electrocoated Aluminum Food Cans[J].Electrochimica Acta,1995,40(2):201-207
[5]Nabipoor M,Majlis B Y.A New Passive Telemetry LC Pressure and Temperature Sensor Optimized for TPMS[J].Journal of Physics,2006,34(1):770-775
[6]Ong K G,Grimes C A,Robbins C L,et al.Design and Application of a Wireless,Passive,Resonant-Circuit Environmental Monitoring Sensor[J].Sensors and Actuators A,2001,93(1):33-43
[7]韩安太,郭小华,陈志强,等.基于LC谐振传感器的包装茶叶含水率无损检测[J].茶叶科学,2009,29(5):395-401
[8]李平,文玉梅,黄尚廉.声表面波谐振器型无源无线温度传感器[J].仪器仪表学报,2003,24(4):403-405
[9]Huang Y S,Chen Y Y.A Passive Wireless Hydrogen Surface Acoustic Wave Sensor Based on Pt-Coated ZnO Nanorods[J].Nanotechnology,2010,21(9):1-6
[10]Tan E L,Ng W N,Shao R,et al.A Wireless,Passive Sensor for Quantifying Packaged Food Quality[J].Sensors,2007(7):1747-1756
[11]Chen P J,Saati S,Varma R,et al.Wireless Intraocular Pressure Sensing Using Microfabricated Minimally Invasive Flexible-Coiled LC Sensor Implant[J].Journal of Microelectromechanical Systems,2010,19(4):721-734
[12]Horton B E,Schweitzer S,DeRouin A J,et al.A Varactor-Based,Inductively Coupled Wireless PH Sensor[J].IEEE Sensors Journal,2011,11(4):1061-1066
[13]王渊朝,彭斌,黄武林.一种LC谐振无线无源温度传感器的研究[J].传感技术学报,2013,26(10):1341-1344
[14]朱志斌,郭志军,刘英,等.氧化铝陶瓷的发展与应用[J].陶瓷,2003(1):5-8
[15]Mohan S S.The Design,Modeling and Pptimization of On-Chip Inductor and Transformer Circuits[D].California:Stanford University,1999
[16]Jia Yi,Sun Ke,Fredrick Just Agosto.Design and Characterization of a Passive Wireless Strain Sensor[J].Measurement Science and Technology,2006(17):2869-2876