纳米多孔铜膜的制备及其表面增强拉曼效应
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摘要
通过磁控溅射方法制备Cu-Mg合金薄膜,随后进行去合金化得到纳米多孔铜膜。研究了Ar流量和溅射功率对合金膜表面质量和厚度的影响,分析了盐酸浓度对纳米孔形成的影响。利用结晶紫分子来表征纳米多孔铜的表面增强拉曼散射性能。结果表明,磁控溅射参数设置Ar流量为45 mL/min,且功率为70 W时,能够得到表面平整的Cu28Mg72合金薄膜。经1.00 M(mol/L)HCl腐蚀得到的多孔铜的孔最均匀,同时具有最好的拉曼信号增强效果。
Cu-Mg alloy films were prepared by magnetron sputtering method and then subjected to dealloying to obtain nano-porous copper films. The effects of Ar flow and sputtering power on the surface quality and thickness of alloy films were studied. The influence of hydrochloric acid concentration on the formation of nano-pores was analyzed. Crystal violet was used to characterize the surface-enhanced Raman scattering of nano-porous copper. The results show that Cu28 Mg72 alloy film with smooth surface can be obtained by the magnetron sputtering under Ar flow of 45 mL/min and power of 70 W. The most uniform pore of porous copper is obtained by 1.00 M(mol/L) HCl etching, and shows the best SERS effect.
Cu-Mg alloy films were prepared by magnetron sputtering method and then subjected to dealloying to obtain nano-porous copper films. The effects of Ar flow and sputtering power on the surface quality and thickness of alloy films were studied. The influence of hydrochloric acid concentration on the formation of nano-pores was analyzed. Crystal violet was used to characterize the surface-enhanced Raman scattering of nano-porous copper. The results show that Cu28 Mg72 alloy film with smooth surface can be obtained by the magnetron sputtering under Ar flow of 45 mL/min and power of 70 W. The most uniform pore of porous copper is obtained by 1.00 M(mol/L) HCl etching, and shows the best SERS effect.
引文
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[2]KOWALSKA A A,KAMINSKA A,ADAMKIEWICZW,et al.Novel highly sensitive Cu-based SERSplatforms for biosensing applications[J].Journal of Raman Spectroscopy,2015,46(5):428-433.
[3]DING Y,CHEN M W.Nanoporous metals for catalytic and optical applications[J].MRS Bulletin,2009,34(8):569-576.
[4]魏雄帮,王涛,吴志明,等.氩流量对氧化钒薄膜直流磁控溅射制备的影响[J].材料导报,2007,21(5A):176-178.
[5]TUAN N T,PARK J,LEE J,et al.Synthesis of nanoporous Cu films by dealloying of electrochemically deposited Cu-Zn alloy films[J].Corrosion Science,2014,80:7-11.
[6]章新民.纳米多孔铜的制备及腐蚀环境对其结构的影响[D].兰州:兰州理工大学,2011.
[7]SARAKINOS K,ALAMI J,KONSTANTINIDIS S.High power pulsed magnetron sputtering:A review on scientific and engineering state of the art[J].Surface and Coatings Technology,2010,204(11):1661-1684.
[8]王新建,姜传海,洪波,等.单靶磁控溅射Cu1-xCrx合金薄膜的方法:1807675A[P].2006-07-26.
[9]HAYES J R,HODGE A M,BIENER J,et al.Monolithic nanoporous copper by dealloying Mn-Cu[J].Journal of Materials Research,2006,21(10):2611-2616.
[10]YANG S K,DAI X M,STOGIN B B,et al.Ultrasensitive surface-enhanced Raman scattering detection in common fluids[J].Proceedings of the National Academy of Sciences of the United States of America,2016,113(2):268-273.
[11]郑伟涛.薄膜材料与薄膜技术[M].2版.北京:化学工业出版社,2008.
[12]李玉琼,喻志农,王华清,等.基片材料与沉积参数对薄膜应力的影响[J].光学学报,2010,30(2):602-608.
[13]SHAO Q,QUE R H,SHAO M W,et al.Copper nanoparticles grafted on a silicon wafer and their excellent surface-enhanced Raman scattering[J].Advanced Functional Materials,2012,22(10):2067-2070.
[14]LI W Y,CAMARGO P H,LU X M,et al.Dimers of silver nanospheres:facile synthesis and their use as hot spots for surface-enhanced Raman scattering[J].Nano Letters,2009,9(1):485-490.
[15]QIAN C,NI C,YU W X,et al.Highly-ordered,3Dpetal-like array for surface-enhanced Raman scattering[J].Small,2011,7(13):1801-1806.
[16]QIAN L H,YAN X Q,FUJITA T,et al.Surface enhanced Raman scattering of nanoporous gold:smaller pore sizes stronger enhancements[J].Applied Physics Letters,2007,90(15):153120.